Abstract:
PURPOSE: A micro valve for controlling a nano flow rate and a pH sensor reference electrode by using the same are provided to improve detecting characteristics of the pH sensor reference electrode by using a shape memory alloy thin film. CONSTITUTION: A micro valve(26) includes a silicon wafer(24), an insulation layer(13), DLC layers(14,14'), a chamber(18), carbon nano tubes(16,16'), an SMA thin film(17), and electrodes(19,19'). The silicon wafer(24) has a cavity section(11) which is opened towards an opening of a reference electrode(30). The insulation layer(13) is formed on the silicon wafer(24) and has a perforated slot having a predetermined length and a width. The chamber(18) is surrounded by the insulation layer(13) and the DLC layers(14,14'). The SMA layer(17) receives electric energy from the electrodes(19,19').
Abstract:
PURPOSE: A pretreatment apparatus having an optical temperature control unit is provided to heat a graphite boat at a uniform temperature even if an operator of the pretreatment apparatus is replaced, by making a controller control power supply of a power supply apparatus according to the temperature of the graphite boat which is measured by an optical temperature system. CONSTITUTION: An observation window(20a) is formed in a side of a vacuum chamber(20). An electrode(21) penetrates the vacuum chamber, and the graphite boat is supported by the electrode. The power supply apparatus(22) supplies power to the electrode. A controller(23) controls the power supply apparatus. The optical temperature system(24) measures the temperature inside the vacuum chamber, installed in the outside of the observation window of the vacuum chamber. An analog-to-digital converter(ADC)(25) converts the temperature of the optical temperature system to a digital signal and transfers the digital signal to the controller.
Abstract:
PURPOSE: A method for forming a liquid junction potential film of a micro pH sensor is provided to prevent a buffer solution filled in a reference electrode from evaporating, extend the life span of the micro pH sensor, and improve the stability of the micro pH sensor. CONSTITUTION: In a micro pH sensor(20) including a silicon wafer(21), a reference electrode(22) formed on the silicon wafer, a buffer solution(23) filled in an etching part(27) of the silicon wafer, an acryl(28) accumulated to surround the etching part, an epoxy(24) accumulated on the acryl, a method for forming a liquid junction potential film(25) of the micro pH sensor includes the steps of doping a through part(26) of the etching part of the silicon wafer in p type, fixing the silicon wafer at a partition of an electrolytic cell to contact one side of the silicon wafer to an HF solution and the other side of the silicon wafer to an electrolyte, and electrifying the positive pole and the negative pole in the solution, so that an electric field is generated and fine pores grow gradually in the silicon area doped in p type of the silicon wafer.
Abstract:
PURPOSE: A sample holder is provided to improve working efficiency and to shorten time required for processing a sample by forming the sample holder using hard metal and plastic. CONSTITUTION: A sample holder includes a wire inlet hole(10), an upper body(12), a stopper(14), a lower body(16), a coupling section(18), a locking section and a fixing section(24). The sample holder has a cylindrical shape. The upper body(12) faces the lower body(16). A stopper(14) is positioned between the upper and lower bodies(12,16) in order to stably grip a sample. Two stoppers(14) are provided at both sides of the wire inlet hole(10). An upper portion of the coupling section(18) is formed at one side of the upper body(12) and a lower portion of the coupling section(18) is fixed to the fixing section(24). The fixing section(24) is formed with a screw.
Abstract:
PURPOSE: A temperature measuring apparatus for an electric power line is provided to directly measure a temperature variation of a conductive wire from a remote place by measuring a color variation of a thermal-sensitive tape using optical fiber, a color filter and a photo transistor. CONSTITUTION: A thermal-sensitive tape(206) is attached to a surface of a bonding part(204) formed between first and second conductive wires(200a,200b). A protective cover(202) is provided to protect the first and second conductive wires(200a,200b). Optical fiber(208) passes through the protective cover(202). One end of optical fiber(208) is opposite to the thermal-sensitive tape(206) and the other end of optical fiber(210) is coupled to a connector(214). A color filter section(212) includes red, green and blue filters, which are connected to a photo transistor(216). A color signal generated from the photo transistor(216) is amplified by means of a signal amplifier(218) and is converted into a digital signal by an A/D converter(220). The A/D converter(220) is connected to a signal processing device(222).
Abstract:
PURPOSE: A sensor measuring hydrogen ion concentration and dissolved oxygen and an apparatus for measuring the same using the sensor are provided to easily handle and use the apparatus for measuring by simultaneously measuring hydrogen ion concentration and dissolved oxygen with a micro sensor. CONSTITUTION: A sensor measuring hydrogen ion concentration and dissolved oxygen includes a base formed with a silicon wafer and having a measurement groove(12) for measuring hydrogen ion concentration, a reference groove(14), a dissolved oxygen sensor part; a measurement electrode(16) formed at the surface of the measurement groove measuring excited voltage of a solution to be measure; a reference electrode(18) attached to the surface of the reference groove; a detecting electrode(26) attached to the dissolved oxygen sensor part; a sensing membrane(20) formed at the lower hole of the measurement groove to be contacted with the solution; a transmissive film(22) formed at the lower hole of the reference groove to be contacted with the solution; a wall member attached to around each groove and the sensor part to secure a space for filling the solution in each groove and the sensor part; and a sealing member preventing the filled solution from leaking out or evaporating.
Abstract:
PURPOSE: An apparatus for measuring hydrogen ion concentration having an automatic calibration function is provided to accurately measure hydrogen ion concentration by automatically calibrating an output of a detector sensor related to a standard solution. CONSTITUTION: An apparatus for measuring hydrogen ion concentration having an automatic calibration function includes a reference sensor(30) sealed in a reference solution for obtaining an output voltage of the reference solution, a measurement sensor(40) settled in a solution to be measured for obtaining an output voltage of the solution, a differential amplifier(50) automatically calibrating a change variable by subtracting the voltage value obtained from the reference sensor from the voltage value obtained from the measurement sensor to amplify a pure output voltage to be measured, a buffering filter(60) filtering the output voltage value output from the differential amplifier, a gain amplifier(70) collecting and amplifying the output voltage value filtered from the buffering filter, an analog/digital converter(80) converting the analog output voltage value into the digital output voltage value, and a CPU(90) automatically processing the converted output voltage value.
Abstract:
PURPOSE: A method for forming a liquid junction potential film of a micro pH sensor is provided to prevent a buffer solution filled in a reference electrode from evaporating, extend the life span of the micro pH sensor, and improve the stability of the micro pH sensor. CONSTITUTION: In a micro pH sensor(20) including a silicon wafer(21), a reference electrode(22) formed on the silicon wafer, a buffer solution(23) filled in an etching part(27) of the silicon wafer, an acryl(28) accumulated to surround the etching part, an epoxy(24) accumulated on the acryl, a method for forming a liquid junction potential film(25) of the micro pH sensor includes the steps of doping a through part(26) of the etching part of the silicon wafer in p type, fixing the silicon wafer at a partition of an electrolytic cell to contact one side of the silicon wafer to an HF solution and the other side of the silicon wafer to an electrolyte, and electrifying the positive pole and the negative pole in the solution, so that an electric field is generated and fine pores grow gradually in the silicon area doped in p type of the silicon wafer.
Abstract:
PURPOSE: An illumination device for recognizing a character of a testing piece is provided to improve a recognition efficiency of a testing piece with respect to various surface states and pollution by irradiating a light of a short wavelength having a predetermined level continuously and uniformly on a surface of the testing piece. CONSTITUTION: The first and second light source units(20,30) are mounted at the upper and lower portions of a testing piece(10) and output a light of a short wavelength at a predetermined angle from a plane. A light pickup unit(60) picks up a quantity of light being irradiated on the testing piece(10) and outputs data corresponded thereto. An amplification unit(70) amplifies and outputs a signal being output in the light pickup unit(60). A comparison unit(80) inputs the data output in the amplification unit(70) and the reference data inputted in a data input unit(85) and compares the data therewith. An illumination strength control unit(90) controls illumination strengths being output in the light source units(20,30) in accordance with a level of a control signal being output in the comparison unit(80).