公开(公告)号：US20190049481A1

公开(公告)日：2019-02-14

申请号：US15673361

申请日：2017-08-09

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang

IPC: G01P15/125

Abstract: An electromechanical system (MEMS) accelerometer is described. The MEMS accelerometer may be configured to sense linear acceleration along one, two or three axes, and to sense angular acceleration about one, two or three axes. As such, the MEMS accelerometer may serve as 2-axis, 3-axis, 4-axis, 5-axis or 6-axis inertial accelerometer. In some embodiments, the MEMS accelerometer may comprise a single mass connected to at least one anchor via a plurality of tethers. In other embodiments, the MEMS accelerometer may comprise a proof mass connected to at least one anchor via a plurality of tethers and one or more shuttle masses connected to the proof mass via a second plurality of tethers. Rotational and linear motion of the MEMS accelerometer may be sensed using capacitive sensors.

公开(公告)号：US20190047846A1

公开(公告)日：2019-02-14

申请号：US16160965

申请日：2018-10-15

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael Judy ,  George M. Molnar ,  Christopher Needham ,  Kemiao Jia

IPC: B81B7/00

CPC classification number: B81B7/0048 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2924/00014

Abstract: A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

公开(公告)号：US10203351B2

公开(公告)日：2019-02-12

申请号：US14505928

申请日：2014-10-03

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08

Abstract: In some exemplary embodiments, a MEMS accelerometer includes a device wafer having a proof mass and a plurality of tracking anchor points attached to a substrate. Each tracking anchor is configured to deflect in response to asymmetrical deformation in the substrate, and transfer mechanical forces generated in response to the deflection to tilt the proof mass in a direction of the deformation.

公开(公告)号：US20170328931A1

公开(公告)日：2017-11-16

申请号：US15400109

申请日：2017-01-06

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Jianglong Zhang

IPC: G01P15/125 ,  B81B3/00 ,  G01P15/18

Abstract: Angular accelerometers are described, as are systems employing such accelerometers. The angular accelerometers may include a proof mass and rotational acceleration detection beams directed toward the center of the proof mass. The angular accelerometers may include sensing capabilities for angular acceleration about three orthogonal axes. The sensing regions for angular acceleration about one of the three axes may be positioned radially closer to the center of the proof mass than the sensing regions for angular acceleration about the other two axes. The proof mass may be connected to the substrate though one or more anchors.

公开(公告)号：US20130108084A1

公开(公告)日：2013-05-02

申请号：US13719466

申请日：2012-12-19

Applicant: ANALOG DEVICES, INC.

Inventor： Xin Zhang

IPC: H04R19/04 ,  H04R31/00

CPC classification number: H04R17/02 ,  H04R1/222 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  H04R31/006 ,  H04R2499/11 ,  Y10T29/49005

Abstract: A MEMS microphone has a base, a backplate, and a backplate spring suspending the backplate from the base. The microphone also has a diaphragm forming a variable capacitor with the backplate.

Abstract translation: MEMS麦克风具有底座，背板和背板弹簧，从底座悬挂背板。 麦克风还具有与背板形成可变电容器的隔膜。