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公开(公告)号：JPH103853A
公开(公告)日：1998-01-06
申请号：JP17288396
申请日：1996-06-13
Applicant: CANON KK
Inventor： AEBA TOSHIAKI , MITOME MASANORI , NOMA TAKASHI , TAKADA KAZUHIRO
Abstract: PROBLEM TO BE SOLVED: To provide an electron emitting element, in which a leakage and inactive area is reduced, by depositing an element electrode material on a substrate, and forming a narrow clearance between a pair of element electrodes and an electrode so as to form an electron emitting part in the narrow clearance. SOLUTION: A quarts glass is used as a substrate 1, and after sufficiently washing the substrate with an organic solvent, Ti and Pt with predetermined thicknesses are deposited on the substrate 1 by vacuum evaporation so as to form the element electrode material. Then, a part between the element electrodes is locally eliminated by the focusing ion beam(FIB) so as to form a narrow clearance between the element electrodes 2, 3 at a predetermined distances W, L. A predetermined voltage is applied between the element electrodes 2, 3, and the value of the flowing current is measured so as to confirm the insulation between the electrodes 2, 3. A predetermined voltage is applied between the electrodes 2, 3 in a vacuum container for electrifying (activation processing), and the element current and the emission current, the value of which was 0 before the activation processing is performed, is remarkably changed for increase, and an electron emitting part 5 is formed.
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52.发明专利
公开(公告)号：JPH103852A
公开(公告)日：1998-01-06
申请号：JP17288096
申请日：1996-06-13
Applicant: CANON KK
Inventor： AEBA TOSHIAKI , TAKADA KAZUHIRO , NOMA TAKASHI , MIYATA HIROKATSU
Abstract: PROBLEM TO BE SOLVED: To provide an electron emitting element having an excellent electron emitting characteristic with excellent reproducibility by forming a thin crack latent image at a part of a conductive film, and performing the foaming process and the activating process. SOLUTION: A quartz glass board is prepared as an insulating substrate 1, and after sufficiently washing this substrate, element electrodes 2, 3 made of Ni are formed on a substrate surface. After spattering Pd and heating it for oxidation in the atmospheric air, a conductive film 4 is formed by photolithography and dry etching. Continuously, the film 4 between the electrodes 2, 3 is locally eliminated so as to form a thin part (crack latent image) near a central part between the electrodes 2, 3. This element is provided in a vacuum container, and after discharging the air, voltage is applied between the electrodes 2, 3 by a power source, and electrifying (forming processing) is performed to the film 4 so as to form an electron emitting part 5 in the crack latent image part. Voltage is applied between the electrodes 2, 3 in the vacuum container, and activating processing is performed so as to form the electron emitting part 5.
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公开(公告)号：JPH05242793A
公开(公告)日：1993-09-21
申请号：JP26871492
申请日：1992-10-07
Applicant: CANON KK
Inventor： NOMURA ICHIRO , SAKANO YOSHIKAZU , UENO RIE , NOMA TAKASHI , SUZUKI HIDETOSHI , NAKAMURA NAOHITO
Abstract: PURPOSE:To decrease reactive current remarkably so as to improve electron emission characteristics and decrease irregularity in luminance of light generation image by arranging dispersibly perticulates specified in their occupancy area rate, perticulate interval, and mean diameter of perticulates in an electron emission element having an electron emission area between the electrodes. CONSTITUTION:An electron emission element comprises an insulating base material 1, electrodes 2, 3, an electron emission area 5, and perticulate films 4 which are located on both sides to sandwich the area and minimized in its resistance value, and perticulates 6 are dispersed in the area 5. In this constitution, the interval of the perticulates 6 is set within a range of 5-100Angstrom , the mean diameter is set within a range of 5-1000Angstrom , and occupancy area rate is set within a range of 20-15%. The length on which voltage is applied within the area 5 is set is set within a range of 5-300Angstrom and field intensity is set more than 10V/cm. thus clear image having contrast faithful to original information signals is provided.
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公开(公告)号：JPH05101769A
公开(公告)日：1993-04-23
申请号：JP26036091
申请日：1991-10-08
Applicant: CANON KK
Inventor： SAKANO YOSHIKAZU , NOMURA ICHIRO , SUZUKI HIDETOSHI , UENO RIE , NOMA TAKASHI
Abstract: PURPOSE:To provide an electron emitting element and an electron beam generating device which have a very small coefficient of variation of the element current and the emitting current, a high electron emission effect, and long service life, and to provide an image forming device which can give a high contrast and a clear image, especially an image forming device which has very little unevenness of brightness of the luminous image, and very little flickering of display. CONSTITUTION:In an electron emitting element in which an electron emitting member is provided between electrodes 2 and 3 provided on a base 1, an area A and an area B are arranged between the electrode 2 and 3, and the area A is provided concurrently through the area B to at least one side of the electrodes 2 and 3. The conductivity sigma1 of the main material to compose the area A, and the conductivity sigma2 of the main material to compose the area B satisfy the relation sigma1>sigma2, and the area A is made as the electron emitting member. Such a constitution is the specific feature of the electron emitting element, and the electron beam generator and the image forming device, using such an electron emitting element.
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公开(公告)号：JPH04236784A
公开(公告)日：1992-08-25
申请号：JP1917691
申请日：1991-01-21
Applicant: CANON KK
Inventor： NOMA TAKASHI
Abstract: PURPOSE:To provide the selective plating method for a nonmetallic substrate which can form desired metallic film patterns on the nonmetallic substrate without damaging the elements on the substrate by extremely simple processing stages. CONSTITUTION:This method consists of the stage for forming a fine particle layer 2 of palladium oxide consisting of fine particles essentially consisting of palladium oxide (PdO) on the surface of the nonmetallic substrate 1, the reduction stage for irradiating the palladium oxide fine particles at the desired positions the fine particle layer of the palladium oxide with an electron beam 3 to reduce the palladium oxide to metal palladium and the stage for immersing the nonmetallic substrate 1 into an electroless plating liquid and depositing a plating metal with the metal palladium as a nucleus.
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Patent Agency Ranking
公开(公告)号：JPH02155789A
公开(公告)日：1990-06-14
申请号：JP31146488
申请日：1988-12-09
Applicant: CANON KK
Inventor： ARAGAKI SEIICHI , NAGAO KAZUMI , TAKAHASHI YASUO , NOMA TAKASHI
Abstract: PURPOSE:To obtain a heat mode optical recording medium being excellent in humidity resistance and solvent resistance by making a light absorbing substance be contained in a glass-form thin film whose main elements are Sn, P, Pb, O and F. CONSTITUTION:Glass use for a glass-form thin film is of a low melting point making it easy to prepare the film by a vaporphase deposition method such as evaporation, sputtering or others. In addition, it enables easy formation of the glass-form thin film whose refractive index after the preparation is higher than 1.65. The contents of elements constituting this glass-form thin film are suitably Sn of 30 to 90wt.%, P of 1 to 20wt.%, Pb of 0.1 to 20wt.%, O of 2 to 30wt.% and F of 5 to 35wt.%. It is suitable that the total quantity of the main elements is 90wt.% or above of a glass constituent. As for a substrate for forming the glass-form thin film, for which plastic is used ordinarily, glass, metal, ceramic or a composite of these substances can be used therefor. The ratio of a light absorbing substance is preferably 1 to 80pts.wt. based on 100pts. wt. of the glass constituent.
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公开(公告)号：JP2002310960A
公开(公告)日：2002-10-23
申请号：JP2001119966
申请日：2001-04-18
Applicant: CANON KK
Inventor： NOMA TAKASHI
IPC: G01N23/225 , C23C14/14 , G01N1/28 , H01J37/20
Abstract: PROBLEM TO BE SOLVED: To provide an apparatus which enables the formation of electroconductive thin films on non-conductive samples for observation with electron microscopes or the like with a higher controllability. SOLUTION: The sample pre-processing apparatus makes the non- electroconductive samples electroconductive for observation with scanning electron microscopes or for electron beam microanalysis. The pre-processing apparatus for the non-electroconductive samples has a vacuum tank, a holding means for the non-electroconductive samples provided in the vacuum tank, and a means which heats and evaporates palladium as evaporation source provided in the vacuum tank facing it at a temperature below the melting point thereof.
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公开(公告)号：JP2000081399A
公开(公告)日：2000-03-21
申请号：JP25137398
申请日：1998-09-04
Applicant: CANON KK
Inventor： NOMA TAKASHI
IPC: G01N23/207 , G21K1/06
Abstract: PROBLEM TO BE SOLVED: To provide a membrane X-ray diffraction apparatus capable of obtaining the crystal data of the minute area in a polycrystal membrane sample. SOLUTION: Primary X-rays 4 of a single wavelength emitted from a fixed X-ray source 9 pass through an irradiation area restriction means 7 as almost parallel beam to irradiate the minute area of the surface of the membrane 1 formed on a substrate 2. Diffracted X-rays 5 by the membrane 1 pass through an emission angle restriction means 8 to be guided to an X-ray detector 6.
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公开(公告)号：JPH11248651A
公开(公告)日：1999-09-17
申请号：JP6931998
申请日：1998-03-04
Applicant: CANON KK
Inventor： TAKADA KAZUHIRO , NOMA TAKASHI
IPC: G01N23/207
Abstract: PROBLEM TO BE SOLVED: To make automatically adjustable the position of a microarea in a short time. SOLUTION: In this X-ray diffractometer, an adjustment sample is mounted on a sample stage 1 and a video camera 6 is inserted right under or near the adjustment sample to operate an x-axis and a y-axis with an exterior driving motor so as to set a pattern into the view of the video camera 6 for focusing the sample on its surface with z-axis driving motor. When the adjustment sample has been fixed, the search of a steady point is started, thereby to start the rotation of the sample stage 1 around a ϕ-axis, take an output signal from the video camera for every preset time, recognize a position on the sample corresponding to the position by using an image prior to one frame and find the steady point as the center of rotation in the view of the video camera 6 with computation. Such operation is continued until the steady point is fixed in a range of position error εof the steady point preset by a measuring person, this coordinate position is stored when the steady point is fixed, and the operation for finding the value of the steady point is ended. The sample is changed into a fluorescent plate to position adjust an X-ray source 3 and X-ray is generated from the X-ray source 3 to be radiated to the fluorescent plate for jigging a collimator 4 corresponding to the position of the steady point found by an X-ray emission area.
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公开(公告)号：JPH1055747A
公开(公告)日：1998-02-24
申请号：JP15420597
申请日：1997-06-12
Applicant: CANON KK
Inventor： UENO RIE , SAKANO YOSHIKAZU , TAKEDA TOSHIHIKO , NOMURA ICHIRO , SUZUKI HIDETOSHI , KANEKO TETSUYA , NOMA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To enable electron characteristics to be controlled and decrease characteristic dispersion between elements by pre-forming plural protrusions at specific intervals so as to pinch an electrode interval between opposite electrodes and forming an electron emission part along this. SOLUTION: A protrusion 101 is pre-formed so as to narrow an electrode interval further between mutually opposed electrodes 3 and 4. An electron emission part 6 is formed along this electric field intensive part. Relationship between a distance g between protrusions 101 and a width w of the protrusion 101 is g
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