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公开(公告)号：SG128608A1
公开(公告)日：2007-01-30
申请号：SG200604048
申请日：2006-06-14
Applicant: LAM RES CORP
Inventor： LARIOS DE JOHN M , RAVKIN MIKE , FARBER JEFFREY , KOROLIK MIKHAIL , REDEKER FRED C
Abstract: A method for cleaning a substrate is provided. In this method, a flow of non-Newtonian fluid is provided where at least a portion of the flow exhibits plug flow. To remove particles from a surface of the substrate, the surface of the substrate is placed in contact with the portion of the flow that exhibits plug flow such that the portion of the flow exhibiting plug flow moves over the surface of the substrate. Additional methods and apparatuses for cleaning a substrate also are described.
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