公开(公告)号：EP1093142A2

公开(公告)日：2001-04-18

申请号：EP00203564.0

申请日：2000-10-16

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Bishop, David John ,  Bolle, Cristian A. ,  Kim, Jungsang

IPC: H01H59/00

CPC classification number: H01H59/0009

Abstract: A dual micro-electromechanical actuator for providing dual actuation to a micromachine. The actuator includes a first substrate upon which a first actuating electrode is formed. A second substrate located proximate to but spaced from the first substrate supports a second actuating electrode. A micromachine device, such as a thin membrane, plate or cantilever, is disposed between the actuating electrodes. When one of the actuating electrodes is selectively activated by applying a voltage thereto, an electrostatic attraction force is produced which causes movement of the micromachine in the direction of the activated actuating electrode.

Abstract translation: 一种用于向微机械提供双重致动的双微机电致动器。 致动器包括形成有第一致动电极的第一基板。 位于第一基板附近但与第一基板隔开的第二基板支撑第二致动电极。 诸如薄膜，板或悬臂的微机械装置设置在致动电极之间。 当通过向其施加电压来选择性地激活其中一个致动电极时，产生静电吸引力，引起微机械器在激活的致动电极的方向上移动。

公开(公告)号：EP1093003A2

公开(公告)日：2001-04-18

申请号：EP00307182.6

申请日：2000-08-21

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bishop, David John

IPC: G02B26/08

CPC classification number: G02B26/0866 ,  B81B3/004 ,  B81B3/0062 ,  B81B7/0003 ,  B81B2201/042 ,  G02B26/0841

Abstract: A method for pivoting an optical device about one or more axes thereof is disclosed. Springs couple the optical device to the micro-electro-mechanical structure. A portion of the springs are fastened on the micro-electro-mechanical structure. Fastening the portion of each spring on the electro-mechanical structure prevents the springs from moving the optical device in a translational direction when such optical device pivots about the one or more axes.

Abstract translation: 公开了一种用于围绕其一个或多个轴枢转光学装置的方法。 弹簧将光学器件耦合到微电子机械结构。 一部分弹簧固定在微电子机械结构上。 当这种光学装置围绕所述一个或多个轴线枢转时，将所述每个弹簧的所述部分紧固在所述机电结构上防止所述弹簧沿平移方向移动所述光学装置。

公开(公告)号：EP1091613A2

公开(公告)日：2001-04-11

申请号：EP00308686.5

申请日：2000-10-03

Applicant: Lucent Technologies Inc.

Inventor： Bishop, David John ,  Giles, Randy Clinton ,  Neilson, David Thomas

IPC: H04Q11/00

CPC classification number: H04Q11/0005 ,  H04Q2011/0026 ,  H04Q2011/0043 ,  H04Q2011/0083

Abstract: An optical crossconnect (OXC) fabric including an array of tiltable mirrors, a reflector and a plurality of optical fibers controls the position of the mirrors to optimize the transfer of a signal between an input optical fiber and an output optical fiber by monitoring the optical signal at an optical translation unit in each of the input optical fiber and the output optical fiber. The optical translation units are operable for regenerating the optical signals transmitted through the fibers.

Abstract translation: 包括可倾斜反射镜阵列，反射器和多个光纤的光学交叉连接（OXC）结构控制反射镜的位置，以通过监视光信号来优化输入光纤与输出光纤之间的信号传输 在每个输入光纤和输出光纤中的光学平移单元处。 光学平移单元可操作用于再生通过光纤传输的光信号。

公开(公告)号：EP0961150A2

公开(公告)日：1999-12-01

申请号：EP99304071.6

申请日：1999-05-26

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Barber, Bradley Paul ,  Bishop, David John ,  Gammel, Peter Ledel ,  Giles, Randy Clinton

IPC: G02B26/02

CPC classification number: G02B6/353 ,  G02B6/3552 ,  G02B6/3566 ,  G02B6/3572 ,  G02B6/423 ,  G02B6/4232

Abstract: A micro-opto-electromechanical systems (MOEMS) device comprises a micro-electromechanical systems (MEMS) device and a silicon optical-bench (SiOB) device or system. The MEMS device interacts with the SiOB mechanically or electromagnetically. In one embodiment, the MEMS device is operable to provide a switching function for the SiOB device. The MEMS device comprises an actuator that is mechanically linked to an optical interruptor that prevents at least a portion of an optical signal incident thereon from propagating therethrough. In an actuated state, the actuator causes the optical interruptor to move into an optical path of an optical signal traveling through an SiOB device. The signal is at least partially reflected or absorbed such that only a portion of the signal propagates beyond the point of contact with the optical interruptor. Since SiOB processing is typically incompatible with MEMS device processing, the MEMS and SiOB devices are formed on separate supports and then attached, such as via flip-chip bonding methods.

Abstract translation: 微光机电系统（MOEMS）装置包括微机电系统（MEMS）装置和硅光学台（SiOB）装置或系统。 MEMS器件机械地或电磁地与SiOB相互作用。 在一个实施例中，MEMS器件可操作以提供用于SiOB器件的切换功能。 MEMS器件包括机械地连接到光学断路器的致动器，其防止入射到其上的光信号的至少一部分通过其传播。 在致动状态下，致动器使光学中断器移动到穿过SiOB器件的光信号的光路中。 该信号至少部分地被反射或吸收，使得只有一部分信号传播超出与光学断开器的接触点。 由于SiOB处理通常与MEMS器件处理不兼容，所以MEMS和SiOB器件形成在单独的支撑件上，然后被连接，例如通过倒装芯片接合方法。

公开(公告)号：EP0924763A2

公开(公告)日：1999-06-23

申请号：EP98310061.1

申请日：1998-12-08

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bishop, David John

IPC: H01L25/00 ,  H01L23/13 ,  H01L21/98 ,  G02B26/00

CPC classification number: B81B3/0062 ,  B81B3/004 ,  B81B7/0003 ,  B81B2201/042 ,  G02B26/0866

Abstract: A self-assembling micron-sized mechanical device is described. The device comprises hinged plates attached to a support. A beam having a first end free to move in an upwardly-directed arc is associated with each hinged plate comprising the device. The beam has a first engagement member, including a first angled edge, disposed at its freely-movable first end. Each hinged plate includes a second engagement member, including a second angled edge. In the unassembled state, at least a portion of the first engagement member lies beneath the second engagement member on the support. Actuation force is applied to the beam by an actuator, the force causing the first end of the beam to lift. As it does so, the first and second angled edges slide over another, and the hinged plate is rotated upwardly about its hinges away from the support. The mechanical advantage provided by the angled edges allows a hinged plate to be rotated fully ninety degrees away from the support.

Abstract translation: 描述了自组装微米尺寸的机械装置。 该装置包括连接到支撑件的铰接板。 具有自由在向上指向的弧中移动的第一端的梁与包括该装置的每个铰接板相关联。 梁具有第一接合构件，其包括设置在其可自由移动的第一端处的第一成角度的边缘。 每个铰接板包括第二接合构件，其包括第二倾斜边缘。 在未组装状态下，第一接合构件的至少一部分位于支撑件上的第二接合构件的下方。 激励力由致动器施加到梁上，导致梁的第一端抬起的力。 如此，第一和第二倾斜的边缘滑过另一个，并且铰接板围绕其铰链远离支撑件向上旋转。 由倾斜边缘提供的机械优点允许铰链板从支撑件旋转完全九十度。

公开(公告)号：EP0903606A2

公开(公告)日：1999-03-24

申请号：EP98307237.2

申请日：1998-09-08

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Bishop, David John ,  Gammel, Peter Ledel

IPC: G02B21/00

CPC classification number: G01Q10/04 ,  H01H2001/0068 ,  H02N1/008 ,  Y10S977/872

Abstract: A micromachined xyz stage, and microscopes utilizing such a stage, are disclosed. The xyz stage includes co-planar x- and y-drive means linked to a sample stage. Such x- and y- drive means are operable to position the sample stage in an x-y plane. The xyz stage further includes z-drive means operable to moves the sample stage out of the x-y plane. The z-drive means can be implemented by suspending a flat-plate electrode over the sample stage using hinged plate supports. As a voltage is applied across the plate electrode and the sample stage, an electrostatic force is generated, causing the sample stage to move towards the plate electrode. The hinged plate supports facilitate assembly of the z-drive means, in addition to providing support for it in its assembled configuration. By incorporating an optical fiber, the aperture of which has be drawn down to submicron size, a near-field scanning optical microscope can be formed. By forming a micromachined tip on the xyz stage, a scanning tunneling microscope or an atomic force microscope can be formed.

Abstract translation: 公开了一种微加工xyz级，以及使用这种级的显微镜。 xyz级包括连接到样品台的共平面x和y驱动装置。 这种x和y驱动装置可操作以将样品台定位在x-y平面中。 xyz平台还包括可驱动样本台离开x-y平面的z驱动装置。 Z驱动装置可以通过使用铰接板支撑件将平板电极悬挂在样品台上来实现。 当跨越平板电极和样品台施加电压时，产生静电力，导致样品台向板极移动。 除了在其组装构型中为其提供支撑之外，铰接板支撑件有助于z驱动装置的组装。 通过结合其孔径被拉伸至亚微米尺寸的光纤，可以形成近场扫描光学显微镜。 通过在xyz平台上形成微加工尖端，可以形成扫描隧道显微镜或原子力显微镜。

公开(公告)号：EP0880145A1

公开(公告)日：1998-11-25

申请号：EP98303698.9

申请日：1998-05-12

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Bishop, David John ,  Isaacs, Eric D. ,  Gammel, Peter Ledel ,  Platzman, Philip Moss

IPC: G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/068

Abstract: The specification describes a refractive lens for focusing cold neutrons. It comprises a plurality of concave lens elements made from materials with low neutron absorption.

Abstract translation: 本说明书描述了用于聚焦冷中子的折射透镜。 它包括由具有低中子吸收的材料制成的多个凹透镜元件。

公开(公告)号：EP0880040A2

公开(公告)日：1998-11-25

申请号：EP98303498.4

申请日：1998-05-05

Applicant: LUCENT TECHNOLOGIES INC.

Inventor： Aksyuk, Vladimir Anatolyevich ,  Gammel, Peter Ledel ,  Bishop, David John

IPC: G02B6/26

CPC classification number: G02B6/357 ,  G02B6/3514 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/3552 ,  G02B6/3594

Abstract: Optical switches utilizing electrostatically-driven actuators formed from micro machined plates are disclosed. Under an applied voltage, a movable plate moves toward a fixed plate or a conductive region of an underlying support. The switches further include a mechanical linkage from the actuator to an optical device. The displacement of the movable plate generated at the actuator is transferred, via the mechanical linkage, to the optical device. The optical device, which is positioned in close proximity to optically-aligned spaced optical fibers, is movable into and out of an optical path defined by the optical cores of the optical fibers by the action of the actuator. An "in-plane" optical switch includes an actuator having two vertically-oriented electrodes, which generates a substantially horizontally-directed displacement of the movable plate and the linked optical device. An "out-of-plane" optical switch includes an actuator having at least one horizontally-disposed suspended above a conductive region of an underlying support. The actuator generates a substantially vertically-directed displacement of the movable plate and the linked optical device.