公开(公告)号：JP2005311238A

公开(公告)日：2005-11-04

申请号：JP2004129632

申请日：2004-04-26

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： SAKAI TADASHI ,  ONO TOMIO ,  SAKUMA HISASHI ,  YOSHIDA HIROAKI ,  SUZUKI MARIKO

IPC: H01L21/28 ,  H01L29/861 ,  H01L33/34 ,  H01L33/40 ,  H01L33/00

Abstract: PROBLEM TO BE SOLVED: To provide a diamond semiconductor element capable of its practical application/commercializing by overcoming the difficulty in conductivity control by doping. SOLUTION: The diamond semiconductor element has a first conductivity type diamond layer 1, a second conductivity type diamond layer 2 having a pn-junction formed between it and the first conductivity type diamond layer 1, a first current applying electrode 3 for the first conductivity type diamond layer 1, a second current applying electrode 4 for the second conductivity type diamond layer 2, and a preliminarily heating electrode 5 for forming the path of a preliminarily heating current between it and the first electrode 3. The resistance of the diamond semiconductor element is reduced by heating by the preliminarily heating electrode 5 to overcome the difficulty in conductivity control by doping and as to be able to provide the diamond semiconductor element capable of practical application/commercializing. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种能够通过克服通过掺杂导电性控制的困难而实际应用/商业化的金刚石半导体元件。 解决方案：金刚石半导体元件具有第一导电型金刚石层1，在其与第一导电型金刚石层1之间形成有pn结的第二导电型金刚石层2，第一导电型金刚石层2 第一导电型金刚石层1，第二导电型金刚石层2的第二施加电极4和用于形成其与第一电极3之间的预热加热电流的路径的预热电极5。金刚石的电阻 通过预热电极5的加热来减少半导体元件，以克服通过掺杂导电性控制的难度，并且能够提供能够实际应用/商业化的金刚石半导体元件。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005072021A

公开(公告)日：2005-03-17

申请号：JP2004355652

申请日：2004-12-08

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： SAKAI TADASHI ,  ONO TOMIO ,  SAKUMA HISASHI ,  SUZUKI MARIKO

IPC: H01J61/06 ,  H01J65/00

Abstract: PROBLEM TO BE SOLVED: To provide a barrier type cold cathode discharge lamp capable of obtaining high luminous efficiency.
SOLUTION: The barrier type cold cathode discharge lamp 1 is characterized in that it is provided with a hollow body 2 having a light transmission part and an opening and holding rare gas, a first electrode 3a provided with a first conductor 4a and a diamond insulation part 5a interposed between the first conductor and a space in the hollow body and blocking the opening, a second electrode 3b provided with a second conductor 4b facing the first conductor 4a via at least the diamond insulation part 5a, and a phosphor film 6 formed in the inner surface of the hollow body 2. The diamond insulation part 5a is a diamond film covering one principal plane of the first conductor 4a, and the principal plane covered by the diamond insulation part 5a of the first conductor 4a is recessed.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 解决的问题：提供能够获得高发光效率的阻挡型冷阴极放电灯。 解决方案：屏障型冷阴极放电灯1的特征在于，其设置有具有透光部分和开口并保持稀有气体的中空体2，设置有第一导体4a和 金刚石绝缘部分5a插入在第一导体和中空体中的空间之间并阻塞开口;第二电极3b，设置有至少通过金刚石绝缘部分5a面向第一导体4a的第二导体4b，以及荧光膜6 形成在中空体2的内表面上。金刚石绝缘部5a是覆盖第一导体4a的一个主面的金刚石膜，并且由第一导体4a的金刚石绝缘部5a覆盖的主面凹陷。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005044590A

公开(公告)日：2005-02-17

申请号：JP2003202124

申请日：2003-07-25

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： ONO TOMIO ,  SAKAI TADASHI ,  SAKUMA HISASHI ,  SUZUKI MARIKO

IPC: H01J61/067 ,  H01J61/72 ,  H01J65/00

Abstract: PROBLEM TO BE SOLVED: To realize a cold cathode discharge lamp which maintains its secondary electron emitting performance and has a practical long life, and is highly efficient, in a discharge lamp using for its cold cathode a diamond which has a large secondary electron emitting efficiency and a small sputtering rate.
SOLUTION: The discharge lamp is equipped with an enclosure 1 filled with a discharge gas, a fluorescent membrane 4 composed of a phosphor and provided on the inner wall of the enclosure 1, and electrodes 12a, 12b for generating discharge in the enclosure 1, and diamond members 14a, 14b are provided on the surface of the electrodes 12a, 12b, and oxygen 11 is contained in the discharge gas 0.002% or more and 12.5% or less. By making contain a minute amount of oxygen in the discharge gas, a thin film layer containing a non-diamond content due to re-deposition on the surface of the diamond members 14a, 14b is removed selectively, and luminous efficiency and the life are improved.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：为了实现一种冷阴极放电灯，其保持其二次电子发射性能并且具有实用的长寿命并且是高效的，在用于其冷阴极的放电灯中，具有大二次的金刚石 电子发射效率和小的溅射速率。

解决方案：放电灯配备有填充有放电气体的外壳1，由荧光体构成的荧光膜4并且设置在外壳1的内壁上，以及用于在外壳中产生放电的电极12a，12b 如图1所示，在电极12a，12b的表面上设置金刚石构件14a，14b，在放电气体中含有氧11为0.002％以上且12.5％以下。 通过在放电气体中含有微量的氧气，选择性地除去由于在金刚石构件14a，14b的表面上重新沉积而含有非金刚石含量的薄膜层，并且提高了发光效率和寿命 。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004296146A

公开(公告)日：2004-10-21

申请号：JP2003083829

申请日：2003-03-25

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： SAKAI TADASHI ,  YOSHIDA HIROAKI ,  ONO TOMIO ,  SAKUMA HISASHI ,  SUZUKI MARIKO

IPC: B41J2/045 ,  B41J2/055 ,  G01N37/00 ,  H05B3/10 ,  H05B3/14 ,  H05B3/20

CPC classification number: H05B2214/04

Abstract: PROBLEM TO BE SOLVED: To provide a heater structure excellent in a response property of heating/cooling, temperature uniformity and reliability and precisely controlling a temperature, and also to provide a variety of functional devices using the heater structure. SOLUTION: The heater structure comprises a crystal diamond layer 12, an amorphous resistive layer 13 composed of a non-crystal diamond area thermally contacting to the diamond layer 12, and a pair of electrodes 21a, 21b electrically connected to the resistive layer 13, and each of the functional device has a flow path (micro flow path) 25 of energy flows in contact with the diamond layer 12. Here, 'the flow of energy' is a flow of molecules in the micro flow path 25, that is, a flow of a fluid. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供加热/冷却的响应特性，温度均匀性和可靠性以及精确控制温度方面优异的加热器结构，并且还提供使用加热器结构的各种功能装置。 解决方案：加热器结构包括晶体金刚石层12，由与金刚石层12热接触的非结晶金刚石区域构成的非晶电阻层13和电连接到电阻层的一对电极21a，21b 13，并且每个功能装置具有与金刚石层12接触的能量流的流路（微流路）25。这里，“能量流”是微流路25中的分子流，该 是流体的流动。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2003281991A

公开(公告)日：2003-10-03

申请号：JP2002080068

申请日：2002-03-22

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： SAKUMA HISASHI ,  ONO TOMIO ,  SAKAI TADASHI ,  SUZUKI MARIKO

IPC: H01J1/15 ,  H01J61/067 ,  H01J61/16

Abstract: PROBLEM TO BE SOLVED: To improve manufacturing yield and durability of a hot cathode discharge apparatus by preventing a diamond from peeling off an electrode. SOLUTION: The discharge apparatus comprises an enclosure 10 in which a discharge gas is sealed up, and hot cathodes 11a and 11b disposed in the enclosure 10. The hot cathodes 11a and 11b comprise an electrode, a first member which is provided on the surface of an electrode of the electrode and comprises a carbon containing SP2 hybrid orbital coupling, and a second member which is provided on the surface of the first member and comprises diamond. COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：通过防止金刚石从电极剥离来提高热阴极放电装置的制造成品率和耐久性。 解决方案：放电装置包括封闭件10，其中放电气体被密封，并且设置在外壳10中的热阴极11a和11b。热阴极11a和11b包括电极，第一构件设置在 电极的电极的表面，并且包括含碳的SP2混合轨道耦合器，以及设置在第一构件的表面上并且包括金刚石的第二构件。 版权所有（C）2004，JPO

公开(公告)号：JP2003132850A

公开(公告)日：2003-05-09

申请号：JP2001323997

申请日：2001-10-22

Applicant: TOSHIBA CORP

Inventor： SAKAI TADASHI ,  ONO TOMIO ,  SAKUMA HISASHI ,  SUZUKI MARIKO

IPC: H01J65/00

Abstract: PROBLEM TO BE SOLVED: To provide a barrier-type cold cathode discharge lamp capable of exhibiting enhanced light emission efficiency. SOLUTION: The barrier-type cold cathode discharge lamp 1 comprises a hollow body 2, having transparent part and containing rare gas, a first electrode 3 which is composed of a first conductor 4a at least partially in the hollow 2 and a first insulation film 5a coated on the part of the conductor 4a in the hollow 2, a second electrode 3b composed of a second conductor 4b facing the first conductor 4a at least across the first insulation film 5a. A phosphor film 6 is formed on the inner surface of the hollow body 2.

公开(公告)号：JP2003109493A

公开(公告)日：2003-04-11

申请号：JP2001304570

申请日：2001-09-28

Applicant: TOSHIBA CORP ,  NAT INST OF ADV IND & TECHNOL ,  JAPAN SCIENCE & TECH CORP

Inventor： YOSHIDA HIROAKI ,  SAKAI TADASHI ,  SAKUMA HISASHI ,  OGUSHI HIDEYO ,  WATANABE KOSHI

IPC: H01J9/02 ,  H01J1/304 ,  H01J29/04

Abstract: PROBLEM TO BE SOLVED: To provide an electron emission element having superior stability and reliability and to provide its manufacturing method. SOLUTION: This manufacturing method is provided with a process for preparing a substrate including diamonds 12 and 13, a process for disposing a mask plate 14 having an opening 14a on the substrate, a process for forming a metal film 15 on a region corresponding to the opening on the substrate and its surrounding region by piling metal materials on the substrate through the mask plate, and a process for forming an emitter group composed on a plurality of acute diamond emitters 13a which emit electrons by etching the diamond using the metal film as a mask.

公开(公告)号：JP2002100958A

公开(公告)日：2002-04-05

申请号：JP2000291796

申请日：2000-09-26

Applicant: TOSHIBA CORP

Inventor： ONO TOMIO ,  SAKAI TADASHI ,  SAKUMA HISASHI ,  CHO TOSHI ,  FUNAKI HIDEYUKI

IPC: H03H9/25 ,  H03H3/08

Abstract: PROBLEM TO BE SOLVED: To provide a surface acoustic wave element which has a frequency characteristic over a wideband and which is low-cost by a method where a piezoelectric material having a large electromechanical coupling coefficient is used and a diamond polishing process is omitted in the surface acoustic wave element, in which a diamond is used for a propagation medium, and to provide its manufacturing method. SOLUTION: The surface acoustic wave element is provided with a piezoelectric substance layer 16, which comprises a first main face and a second main face as the rear with reference to the first main face, an electromechanical conversion electrode 19 which is formed on the first main face of the layer 16, which converts an electric signal into surface acoustic waves and which converts the surface acoustic waves into the electrical signal, a silicone layer 12 which is formed on the second main face of the layer 16, a diamond layer 13 which is formed on the silicone layer 12 and, in which the surface acoustic waves are propagated and a support substrate 14 which is bonded to the diamond layer 13 via an adhesive 15.

公开(公告)号：JP2002094355A

公开(公告)日：2002-03-29

申请号：JP2000278443

申请日：2000-09-13

Applicant: TOSHIBA CORP

Inventor： SAKAI TADASHI ,  ONO TOMIO ,  SAKUMA HISASHI ,  CHO TOSHI ,  FUNAKI HIDEYUKI

IPC: H03H9/25 ,  H03H3/08

Abstract: PROBLEM TO BE SOLVED: To provide a surface acoustic wave element having a superior piezoelectric layer without the step of polishing of diamond layer, and to provide its manufacturing method. SOLUTION: This element provides a surface acoustic wave element that is provided with a piezoelectric bulk layer 20 having a front side and a rear side, an electromechanical conversion electrode 5 that is formed on the front side of the piezoelectric bulk layer 20, a diamond growing layer 1 formed on the rear side of the piezoelectric bulk layer 20, and a support substrate 3 that is adhered to the diamond growing layer 1 via an adhesive material 4.

公开(公告)号：JPH10261361A

公开(公告)日：1998-09-29

申请号：JP6564297

申请日：1997-03-19

Applicant: TOSHIBA CORP

Inventor： SAKUMA HISASHI ,  SAKAI TADASHI ,  ONO TOMIO

IPC: H01J9/02 ,  H01J1/30 ,  H01J1/304 ,  H01J19/24 ,  H01J29/04 ,  H01J31/12

Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a vacuum micro element using diamond on its emitter. SOLUTION: A silicon board 102 is coated on its surface with an oxide film serving as a gate insulating layer 101 and further a molybdenum(Mo) film serving as a gate electrode layer 103 is formed. The insulating layer 101 and the electrode layer 103 is partly etched to form an opening, in which diamond is grown. The diamond is raised there into the shape of a circular cone so as to gradually close the opening. The diamond depositing on the Mo layer 103 is finally peeled off to finish a vacuum micro element.