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公开(公告)号：JP6397170B2
公开(公告)日：2018-09-26
申请号：JP2013165925
申请日：2013-08-09
Inventor： ステフェン・ブレムス , パウル・メルテンス
IPC: B08B3/12 , H01L21/304
CPC classification number: H01L41/09 , B06B1/0622 , B06B1/0688 , B06B2201/20 , B06B2201/71 , B08B3/12 , H01L21/67086
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52.发明专利System for delivering ultrasonic energy to liquid and its use for cleaning of solid parts 审中-公开用于提供液体超声波能量的系统及其用于清洁固体部件
公开(公告)号：JP2014045188A
公开(公告)日：2014-03-13
申请号：JP2013165925
申请日：2013-08-09
Inventor： BREMS STEVEN , PAUL MERTENS
IPC: H01L21/304 , B08B3/12
CPC classification number: H01L41/09 , B06B1/0622 , B06B1/0688 , B06B2201/20 , B06B2201/71 , B08B3/12 , H01L21/67086
Abstract: PROBLEM TO BE SOLVED: To provide a system for delivering megasonic energy to a liquid.SOLUTION: The system comprises: one or more megasonic transducers, each transducer having a single operating frequency within an ultrasound bandwidth and comprising two or more groups of piezoelectric elements arranged in one or more rows; and megasonic generator means for driving the one or more transducers at frequencies within the ultrasound bandwidth, the generator means being adapted for changing the voltage applied to each group of piezoelectric elements so as to achieve substantially the same maximum acoustic pressure for each group of piezoelectric elements. The generator means and the transducers are constructed and arranged so as to produce ultrasound within the liquid. Such a system may be part of an apparatus for cleaning a surface of an article such as a semiconductor wafer or a medical implant.
Abstract translation: 要解决的问题：提供一种将兆声波能量传送到液体的系统。解决方案：该系统包括：一个或多个兆声传感器，每个换能器在超声波带宽内具有单个工作频率，并且包括两组或更多组排列的压电元件 在一行或多行; 以及兆声波发生器装置，用于以超声波带宽内的频率驱动所述一个或多个换能器，所述发生器装置适于改变施加到每组压电元件的电压，以便为每组压电元件实现基本相同的最大声压 。 发生器装置和换能器被构造和布置成在液体内产生超声波。 这种系统可以是用于清洁诸如半导体晶片或医疗植入物的物品的表面的设备的一部分。
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公开(公告)号：JP5000671B2
公开(公告)日：2012-08-15
申请号：JP2009019830
申请日：2009-01-30
Applicant: 株式会社カイジョー
Inventor： 桂輔 大畑
CPC classification number: B08B3/12 , B06B1/0207 , B06B2201/40 , B06B2201/71
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公开(公告)号：KR100925121B1
公开(公告)日：2009-11-04
申请号：KR1020077008511
申请日：2005-10-06
Applicant: 가부시키가이샤 히다찌 플랜트 테크놀로지 , 고쿠리츠다이가쿠호우진 도쿄다이가쿠
CPC classification number: B08B3/12 , B06B2201/71 , B08B3/02 , B08B2203/0288 , G10K11/352
Abstract: 피세정물의 표면에 부착한 더러움을 초음파를 부여한 세정액으로 초음파세정하는 초음파 세정장치에 있어서, 상기 세정액을 저장하는 세정조와, 상기 세정액 중에 상기 피세정물을 지지하는 지지대와, 주파수 1 ~ 10 MHz 의 제 1의 초음파와, 그 제 1의 초음파의 2분의 1 이하의 주파수인 제 2의 초음파를 상기 피세정물로 향하여 교대로 집속시키는 초음파 발생수단과, 상기 집속시키는 집속위치에서 상기 피세정물의 표면까지의 거리를 조정하는 집속위치 조정수단과, 상기 초음파 발생수단에 의한 초음파의 효력이 상기 피세정물의 표면 구석구석까지 골고루 미치도록 상기 초음파 발생수단 및 상기 지지대의 적어도 한쪽을 이동시키는 이동수단을 구비한 것을 특징으로 하는 초음파 세정장치이다.
초음파 세정장치, 세정액, 반도체 기판, 포토마스크용.Abstract translation: 在用于超声清洁粘附到对象的污垢超声波清洗装置将被清洁的水的表面与设置有超声波清洗槽的清洗溶液和用于存储清洗液体，具有用于支撑所述物体中的清洗液来进行清洗，在频率1〜10MHz的一个支撑 第一超声和，在超声波产生的目标物体的清洁的聚焦位置是指用于聚焦超声波第一频率的第二半的超声波比依次朝向所述对象的第一更少待清洁，以及聚焦 聚焦位置调整装置，用于调节到表面的距离的装置，以及超声波是有效的由超声波发生装置的超声波装置，以对象物均匀地清洁米奇到水的表面的每一个角落和一个移动装置，用于移动所述支撑件的至少一个 超声波清洗装置是超声波清洗装置。
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公开(公告)号：KR1020070083678A
公开(公告)日：2007-08-24
申请号：KR1020077008511
申请日：2005-10-06
Applicant: 가부시키가이샤 히다찌 플랜트 테크놀로지 , 고쿠리츠다이가쿠호우진 도쿄다이가쿠
CPC classification number: B08B3/12 , B06B2201/71 , B08B3/02 , B08B2203/0288 , G10K11/352
Abstract: There is provided an ultrasonic cleaner for ultrasonic-cleaning stains attached to a surface of an object to be cleaned by using a cleaning liquid to which ultrasonic wave is applied. The ultrasonic cleaner includes: a cleaning tab for containing the cleaning liquid; a support table for supporting the object to be cleaned in the cleaning liquid; ultrasonic wave generation means for alternately converging a first ultrasonic wave having frequency of 1 to 10 MHz and a second ultrasonic wave having frequency of 1/2 of the first ultrasonic wave or below toward the object to be cleaned; converging position adjustment means for adjusting the distance from the converging position of the conversion to the surface of the object to be cleaned; and moving means for moving at least one of the ultrasonic wave generation means and the support table so that the effect of the ultrasonic wave obtained by the ultrasonic wave generation means is applied to the entire surface of the object to be cleaned.
Abstract translation: 提供了一种用于通过使用施加超声波的清洗液附着到待清洁物体的表面上的超声波清洗污渍的超声波清洗器。 所述超声波清洗器包括：用于容纳所述清洁液体的清洁接头; 支撑台，用于支撑待清洗物体在清洗液中; 超声波产生装置，用于将具有1至10MHz的频率的第一超声波和第一超声波的频率为1/2的第二超声波交替地收敛于待清洁的物体; 会聚位置调整装置，用于调节从转换到待清洁物体表面的会聚位置的距离; 以及用于移动超声波产生装置和支撑台中的至少一个的移动装置，使得通过超声波产生装置获得的超声波的效果被施加到待清洁物体的整个表面。
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Patent Agency Ranking
公开(公告)号：KR20210033644A
公开(公告)日：2021-03-29
申请号：KR1020190115180A
申请日：2019-09-19
Applicant: 주식회사 디앤티솔루션
CPC classification number: D06F19/00 , B06B1/06 , B06B2201/71
Abstract: 본 발명은 휴대용 무선 초음파 세척기에 관한 것으로서, 특히 작은 크기에도 불구하고 구조적으로 초음파 진동자의 효율이 높아서 만족스러운 세척기능으로 널리 활용될 수 있고 휴대가 간편하며 의류나 침구 세탁기의 보조용으로 세탁물의 양이나 오염도에 따라 여러 개가 추가 투입될 수 있는 휴대용 무선 초음파 세척기에 관한 것이다.
이를 위하여, 본 발명은 중앙부를 관통하여 원통형의 결합홀이 형성되는 본체; 상기 결합홀에 장착되는 것으로서, 축 형태의 압전 소자 체결부, 상기 압전 소자 체결부보다 직경이 확장된 형태로 압전 소자 체결부 끝단에 결합되는 혼부와 외주면 후단에 삽입홈이 구성되는 탄성체, 상기 압전 소자 체결부에 디스크 형태로 결합, 적층되어 전기에 의해 진동하는 압전 소자, 및 상기 탄성체의 삽입홈에 체결되는 돌출부와 탄성체의 후면에 밀착되어 누르는 단턱을 구비하여 압전 소자를 커버하는 후방 하우징으로 이루어지는 초음파 트랜스듀서; 그리고 상기 본체의 결합홀과 탄성체 사이에 설치되는 밀폐링; 을 포함하여 구성되는 것을 특징으로 하는 휴대용 무선 초음파 세척기를 제공한다.-
公开(公告)号：JP2013135037A
公开(公告)日：2013-07-08
申请号：JP2011283338
申请日：2011-12-26
Applicant: Siltronic Ag , ジルトロニック アクチエンゲゼルシャフトSiltronic AG
Inventor： SHINBARA TERUO , TANABE ETSUKO , UCHIBE MASASHI , MORI YOSHIHIRO
IPC: H01L21/304
CPC classification number: B08B3/12 , B06B2201/71 , H01L21/02052 , H01L21/67057
Abstract: PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning method stably ensuring high particle removal rate.SOLUTION: An ultrasonic cleaning method for cleaning an object to be cleaned in a liquid into which gas is dissolved by irradiating the liquid with ultrasonic waves includes following steps. A liquid having a first dissolved gas concentration is irradiated with ultrasonic waves. While the liquid is being irradiated with ultrasonic waves, the dissolved gas concentration in the liquid is changed from the first dissolved gas concentration to a second dissolved gas concentration. While the dissolved gas concentration in the liquid is changed from the first dissolved gas concentration to the second dissolved gas concentration, sonoluminescence is generated by irradiating the liquid with ultrasonic waves.
Abstract translation: 要解决的问题：提供一种稳定地确保高颗粒去除速率的超声波清洗方法。解决方案：通过用超声波照射液体来清洁被溶解气体的液体中的待清洁物体的超声波清洗方法包括以下步骤。 用超声波照射具有第一溶解气体浓度的液体。 当液体被超声波照射时，液体中的溶解气体浓度从第一溶解气体浓度变为第二溶解气体浓度。 当液体中的溶解气体浓度从第一溶解气体浓度变为第二溶解气体浓度时，通过用超声波照射液体来产生声致发光。
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公开(公告)号：JP4602773B2
公开(公告)日：2010-12-22
申请号：JP2004568342
申请日：2003-12-23
Applicant: ラム リサーチ コーポレーションLam Research Corporation
Inventor： アンダーソン・トーマス・ダブリュ． , クチ・アンドラス , シエ・ウィリアム , スミス・マイケル・ジー．アール． , ノップ・ロバート , ボイド・ジョン
CPC classification number: B08B3/12 , B06B1/0253 , B06B2201/71 , B08B3/10 , H01L21/67057 , H01L21/67253
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公开(公告)号：JP2010172847A
公开(公告)日：2010-08-12
申请号：JP2009019830
申请日：2009-01-30
Applicant: Kaijo Corp , 株式会社カイジョー
Inventor： OHATA KEISUKE
CPC classification number: B08B3/12 , B06B1/0207 , B06B2201/40 , B06B2201/71
Abstract: PROBLEM TO BE SOLVED: To provide an ultrasonic generator capable of detecting any of a state in which an empty washing tank without a water load is operated, an anomaly of an oscillating element or an anomaly of the washing tank.
SOLUTION: The ultrasonic generator includes a signal source 9 generating at least one of signals of frequencies f1, f2 and f3, a matching circuit 17 matching the signal(s) generated by the signal source, an oscillating element 2 into which the signal matched by the matching circuit is input, a detection circuit 10 detecting the voltage and current of the signal input into the oscillating element, an impedance calculator 11 calculating an impedance for the signal by using the voltage and current detected by the detection circuit and a deciding section 13 deciding an anomaly of the washing tank or the oscillating element by comparing the impedance for the signal calculated by the impedance calculator with a predetermined threshold for impedance anomaly detection.
COPYRIGHT: (C)2010,JPO&INPITAbstract translation: 要解决的问题：提供一种超声波发生器，其能够检测没有水负荷的空的清洗槽被操作的状态，振动元件的异常或洗涤槽的异常的状态。 解决方案：超声波发生器包括产生频率f1，f2和f3的信号中的至少一个的信号源9，与信号源产生的信号匹配的匹配电路17，振荡元件2， 由匹配电路匹配的信号被输入，检测电路10检测输入到振荡元件的信号的电压和电流;阻抗计算器11，利用由检测电路检测的电压和电流来计算信号的阻抗;以及 决定部分13通过将由阻抗计算器计算出的信号的阻抗与用于阻抗异常检测的预定阈值进行比较，来确定洗涤槽或振荡元件的异常。 版权所有（C）2010，JPO＆INPIT
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公开(公告)号：JP6365458B2
公开(公告)日：2018-08-01
申请号：JP2015155960
申请日：2015-08-06
Applicant: トヨタ自動車株式会社
IPC: B08B3/12
CPC classification number: B08B3/12 , B06B3/00 , B06B3/04 , B06B2201/71 , B08B7/028 , B08B2203/0288 , G10K11/205 , G10K11/28
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