Abstract:
A method of generating ozone by applying a silent discharge to oxygen as a first raw material gas, and an oxide compound gas, as a second raw material gas, in which excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, dissociates the oxide compound gas, or excites the oxide compound gas, accelerating dissociation of the oxygen and generation of ozone. In this way, ozone generation efficiency is raised.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An ozone generating system and an ozone generating method producing ozone at a high concentration and operating at high efficiency, in which a raw material gas with no nitrogen added and mainly containing oxygen is used. The amount of generation of NOX by-product is null. A raw material gas not containing nitrogen and mainly containing oxygen is supplied to an ozone generator, an AC voltage is applied to produce discharge light having wavelength of 428 nm to 620 nm, a catalytic material containing a photocatalytic material with a band gap energy of 2.0 eV to 2.9 eV is provided on an electrode or a dielectric in a discharge region, gas pressure is kept at 0.1 MPa to 0.4 MPa, and ozone is generated.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
A recirculating loop method for producing and/or using ozone is disclosed. The method comprises the steps of: supplying a gas mixture comprising oxygen and a catalyst, generating ozone from the gas mixture, and recirculating the gas mixture. In a preferred method, the method comprises the additional steps of: reacting the ozone with a chemically reactive species and adding sufficient oxygen to the oxygen and noble gas mixture to maintain the specific oxygen to noble gas ratio. Preferably, the ozone is generated by electrical discharge from oxygen and noble gas mixtures of a volume ratio of not greater than 9 to 1 oxygen to catalyst gas. The closed loop apparatus for generating ozone gas comprises: an electrical discharge chamber, a means for supplying oxygen to said electrical discharge chamber, a means for supplying a catalyst to said electrical discharge chamber, an application chamber connected to said electrical chamber, a means for supplying a chemically reactive species to said application chamber, a means for removing said chemically reactive species from said application chamber, a means for returning oxygen and the catalyst to said electrical discharge chamber.
Abstract:
There is provided a highly efficient and compact ozone generating apparatus in which a very short air gap of about 0.2 mm is formed at high accuracy. Non-discharge portions are dispersed and disposed to cover an entire discharge space, or a spacer is provided to form the non-discharge portion. Further, an elastic body is mounted on a back face of an electrode, thereby enhancing an air gap accuracy of the discharge space.
Abstract:
A system and method for generating high concentration ozone by introducing a high purity oxygen (99.995% or greater purity) into a silent discharge type ozone generator. Another high purity gas (99.99% or greater), is mixed with the oxygen before the gas is introduced into the ozone generator. By this process, high concentration ozone is generated such that the ozone concentration does not decrease with time. The highest ozone concentrations are maintained when the non-oxygen gas makes up between 1% and 10% of the volume content of the gas mixture introduced in the ozone generator.
Abstract:
An ozone generating method for increasing the quantity of ozone produced by a silent discharge in high purity oxygen includes mixing nitrogen with the high purity oxygen in a predetermined ratio. The nitrogen gas is a catalyst for stable and highly efficient ozone generation from a high purity oxygen source.
Abstract:
A continuous ozone generation and recovery system is provided including a source of oxygen-rich gas; at least one high-throughput corona generator; means for passing the oxygen-rich gas through an electrical corona at a high ratio of gas volume:electrode area to synthesize ozone in a concentration not greater than 1 wt% in the gas stream; means for cooling the generator and maintaining the ozone-containing oxygen stream below decomposition temperature; means for cooling the ozone-containing oxygen gas stream; means for contacting the cooled gas stream with silica gel to adsorb the ozone and recover an oxygen-rich gas stream; means for recycling the recovered oxygen-rich gas stream for ozone synthesis; and means for recovering the adsorbed ozone from the silica gel.Recycle of unconverted oxygen has strong economic value. Dry nitrogen-rich gas stream from an air separation unit which also provides the oxygen source may be used advantageously as an inert carrier gas for desorbing the ozone.