Abstract:
An electron beam drawing apparatus performs drawing on a substrate with an electron beam emitted by an electron gun. The apparatus includes a conditioning chamber configured to perform conditioning of a spare electrode that is a spare for an electrode which constitutes the electron gun, and a driving mechanism configured to remove a used electrode from the electron gun, and to install, into the electron gun, the spare electrode having been subjected to the conditioning, wherein the conditioning includes supplying of electric power to the spare electrode.
Abstract:
The present invention provides a new extractor for a micro-column and an alignment method of the aperture of the extractor and an electron emitter for a micro-column. Further, the present invention provides a measuring system, a method for measuring, and an alignment method using the principle of the alignment.
Abstract:
In accordance with the invention, an electron beam source for exposing selected portions of a surface to electrons comprises a plurality of nanoscale electron emitters and, associated with each electron emitter, a directional control element to direct the emitter toward a selected portion of the surface. In a preferred embodiment, the emitters are nanotubes or nanowires mounted on electrostatically controlled MEMS directional control elements. An alternative embodiment uses electrode directional control elements.
Abstract:
An electron gun also has a cathode for emitting electrons, a heater cap which contains a heater for applying the cathode with thermal energy for emitting electrons, a retainer for securing the cathode on the heater cap by clamping the peripheral edge of the cathode onto the heater cap, and a cylindrical Wehnelt supporter. The cylindrical Wehnelt supporter has a Wehnelt electrode for focusing an electron beam that is formed in such a shape that an average angle of the surface thereof with respect to an outermost shell of the electron beam matches a Pierce angle, and three or more heater cap supporters for securely supporting the heater cap at a position at which an electron emitting surface of the cathode and an opening formed through the Wehnelt electrode satisfy a predetermined perveance.
Abstract:
For eliminating a high-tension cable in order to improve the handling, the open type X-ray generating apparatus (1) in accordance with the present invention employs a mold power unit in which a high-voltage generating part, a grid connecting line, and a filament connecting line which attain a high voltage are molded with a resin, whereas the mold power unit is secured to the proximal end side of a tubular portion (2), whereby an apparatus of a type integrated with a power supply is realized. Since the high-voltage generating part, grid connecting line, and filament connecting line are confined within the resin mold as such, the degree of freedom in structure of the high-voltage generating part and the degree of freedom in bending the lines improve remarkably.
Abstract:
An electron gun which can be easily disassembled to replace a defective cathode assembly and which can be easily and quickly reassembled and realigned.
Abstract:
An electron gun apparatus comprises a cathode subassembly which is movably mounted relative to a fixedly mounted and registered grid/anode subassembly to permit mechanical adjustment of the cathode with respect to the grid/anode subassembly. An evacuated chamber, including resilient bellows interconnecting the movably mounted cathode assembly to the fixedly mounted grid/anode subassembly for permitting the mechanical adjustment, houses the cathode and the grid/anode subassemblies. Means are provided for electrical energization of the cathode, the grid, and the anode. According to a further feature of the invention, the cathode comprises a line filament, and the grid and the anode are slotted for providing an elongated line image.
Abstract:
An electrically powered actuator for providing a rotational or large linear motion, which is simple and highly reliable, including a bi-metallic strip with a slot extending along its length from one end to a position near the opposite end. In a rotational actuator, the strip is bent into a spiral, with the inner turn fixed to the shaft which is to be rotated and the outer turn fixed to a support and connected to electrical leads. Current passed through the leads and through the slotted strip heats it to make it uncoil or to make it coil further, the several rotations of the strip resulting in a large rotation of the shaft.