Abstract:
PURPOSE: An aluminum oxide catalyst for removing the perfluoro compounds by decomposing perfluoro compounds that is a global warming gas generated from semiconductor manufacturing industries is provided, and a method for decomposing thus removing perfluoro compounds in waste gas using the catalyst is provided. CONSTITUTION: The aluminum oxide catalyst for decomposing thus removing perfluoro compounds in waste gas is characterized in that phosphorus constituent is supported onto the surface of aluminum oxide in such a way that a mole ratio of aluminum (Al)/phosphorus (P) is 10 to 100, wherein the aluminum oxide is selected from gamma alumina (γ-Al2O3), aluminum trihydroxide, boehmite and pseudo-boehmite, wherein the phosphorus constituent is diammonium hydrophosphate ((NH3)2HPO4), ammonium dihydrophosphate (NH3H2PO4) or phosphoric acid (H3PO4), and wherein the perfluoro compounds are one or more compounds selected from CF4, CHF3, CH2F2, C2F4, C2F6, C3F6, C3F8, C4F8, C4F10, NF3 and SF6. The method for decomposing thus removing perfluoro compounds in waste gas comprises the process of passing waste gas containing perfluoro compounds through the aluminum oxide catalyst at a temperature of 400 to 800 deg.C under the existence of steam, wherein the steam contains the perfluoro compounds in such a way that a mole ratio of steam/perfluoro compounds is in the range of 1 to 100, and where oxygen along with the steam is added to the catalyst in the concentration range of 0 to 50%.
Abstract translation:目的:提供一种用于通过分解由半导体制造工业产生的全球变暖气体的全氟化合物来除去全氟化合物的氧化铝催化剂,并且提供了使用该催化剂除去废气中的全氟化合物的方法。 构成:用于分解废气中的全氟化合物的氧化铝催化剂的特征在于,将磷成分负载在氧化铝的表面上,使得铝(Al)/磷(P)的摩尔比为10〜 100,其中所述氧化铝选自γ氧化铝(γ-Al 2 O 3),三氢氧化铝,勃姆石和假勃姆石,其中所述磷成分为磷酸氢二铵((NH 3)2 HPO 4),二氢磷酸铵(NH 3 H 2 PO 4)或磷酸(H 3 PO 4 ),其中全氟化合物是一种或多种选自CF 4,CHF 3,CH 2 F 2,C 2 F 4,C 2 F 6,C 3 F 6,C 3 F 8,C 4 F 8,C 4 F 10,NF 3和SF 6的化合物。 用于分解废弃气体中的全氟化合物的方法包括在蒸汽存在下在400-800℃的温度下将含有全氟化合物的废气通过氧化铝催化剂的方法,其中蒸汽含有全氟化合物 蒸汽/全氟化合物的摩尔比在1〜100的范围内,并且在0〜50%的浓度范围内向催化剂中加入氧气和蒸汽。
Abstract:
The present invention relates to a method and an apparatus for preparing polysilicon, more specifically to a method and an apparatus for preparing polysilicon in granule form by equipping a fluidized bed reactor with a nozzle that provides an etching gas including hydrogen chloride in order to effectively prevent silicon from depositing on the outlet surfaces of the reaction gas supplying means and to be able to operate the reactor continuously in the bulk production of polysilicon granules.
Abstract:
본 발명은 수소와 산소에 의한 직접적 수산화 방향족 화합물의 제조방법에 관한 것으로서, 더욱 상세하게는 Pd, Pt, Au, Cu 등의 8B족 전이금속과 안트라퀴논 등과 같은 수소전달 유기물질 등이 함께 내포된 다공성 촉매와 Ti, V, Sn 등의 사면체 배위구조를 가지는 전이금속을 함유한 촉매로 이루어진 이원계 불균일 촉매상에서 수소와 산소를 사용하여 온화한 분위기에서 벤젠 등과 같은 방향족 탄화수소 화합물이 직접적으로 산화반응이 이루어지게 함으로써 기존의 균일 촉매에 의한 액상 산화반응이 갖는 단점을 극복하고, 고가의 과산화수소를 산화제로 사용하지 않으며, 선택성이 우수한 불균일 촉매를 사용한 직접적 수산화 방향족 화합물의 제조방법에 관한 것이다.
Abstract:
PURPOSE: A method for alkylating a hydroxylated aromatic compound is provided which shows a good selectivity and conversion rate. CONSTITUTION: In the method for alkylating a hydroxylated aromatic compound, the alkylation reaction is performed under the conditions of: (i) the molar ratio of silica(SiO2) to alumina(Al2O3) of 1-100; (ii) under porous solid acid catalyst having a pore size of 2-20 angstrom; (iii) at a temperature of 50-200°C; and (iv) under pressure of 1-20, wherein the hydroxylated aromatic compound is either a monohydroxylated aromatic compound such as phenol or a dihydroxylated aromatic compound such as catechol and an alkylating reagent of the alkylation reaction is either an olefin compound having 3-6 carbon atoms such as isobutylene or an alcohol such as tertiary butanol.