公开(公告)号：US10462580B2

公开(公告)日：2019-10-29

申请号：US15928821

申请日：2018-03-22

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Yauheni Belahurau ,  Manuel Dorfmeister ,  Christoph Glacer ,  Manfred Kaltenbacher ,  Ulrich Schmid ,  Michael Schneider ,  David Tumpold

IPC: H04R19/02 ,  H04R1/00 ,  H04R17/00

Abstract: A microelectromechanical loudspeaker may include: a plurality of elementary loudspeakers each including a drive unit and a diaphragm deflectable by the drive unit, and a controller configured to respectively supply control signals to the drive units. The drive units may be respectively configured to deflect the corresponding diaphragms according to the respective control signals supplied by the controller to generate acoustic waves. The control signal supplied to at least one control unit may have at least one local extremum and a global extremum of a curvature of the control signal with a highest absolute value of the curvature may be located at a position of the control signal preceding a position of the at least one local extremum of the control signal.

公开(公告)号：US20190323947A1

公开(公告)日：2019-10-24

申请号：US16456361

申请日：2019-06-28

Applicant: Infineon Technologies AG ,  Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V.

Inventor： Stefan Kolb ,  Alfons Dehe ,  Jochen Huber ,  Franz Jost ,  Horst Theuss ,  Wilhelm Wiedmeier ,  Juergen Woellenstein

IPC: G01N21/17 ,  G01N29/02 ,  G01N29/30 ,  G01N29/24

Abstract: Shown is a wafer arrangement for a gas sensor including a first substrate and a sescond substrate. The first substrate includes a MEMS membrane associated with a sensor element and an emitter element configured to emit electromagnetic radiation. The second substrate is arranged on top of the first substrate and defines at least a portion of a chamber disposed adjacent to the MEMS membrane.

公开(公告)号：US10393658B2

公开(公告)日：2019-08-27

申请号：US15854848

申请日：2017-12-27

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Christoph Glacer ,  David Tumpold

IPC: G01N21/63 ,  G01N21/17

Abstract: An analysis apparatus includes a gas chamber for receiving a gas to be analyzed, a source to emit radiation into the chamber. The radiation is to selectively excite molecules of the gas. The apparatus further includes a sensor to detect a physical variable which contains information about a degree of interaction between the radiation and the gas. The source includes a heatable planar radiation element to emit radiation and a housing with a first wall and a second wall which, therebetween, define and immediately delimit a radiation element receptacle chamber that is separated in a fluid-tight manner from the surroundings of the source. At least one of the first or second housing wall is transparent to the electromagnetic radiation that is emittable by the radiation element.

公开(公告)号：US10336607B2

公开(公告)日：2019-07-02

申请号：US15885401

申请日：2018-01-31

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe

IPC: H01L29/82 ,  B81C1/00 ,  B81B3/00 ,  H04R19/04 ,  H04R7/10

Abstract: A membrane component comprises a membrane structure comprising an electrically conductive membrane layer. The electrically conductive membrane layer has a suspension region and a membrane region. In addition, the suspension region of the electrically conductive membrane layer is arranged on an insulation layer. Furthermore, the insulation layer is arranged on a carrier substrate. Moreover, the membrane component comprises a counterelectrode structure. A cavity is arranged vertically between the counterelectrode structure and the membrane region of the electrically conductive membrane layer. In addition, an edge of the electrically conductive membrane layer projects laterally beyond an edge of the insulation layer by more than half of a vertical distance between the electrically conductive membrane layer and the counterelectrode structure.

公开(公告)号：US20190185315A1

公开(公告)日：2019-06-20

申请号：US16281866

申请日：2019-02-21

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe

IPC: B81B3/00 ,  B81C1/00

CPC classification number: B81B3/0005 ,  B81B3/001 ,  B81B2201/0257 ,  B81B2203/0136 ,  B81C1/0015 ,  B81C1/00968 ,  B81C2201/112

Abstract: A MEMS device and a method to manufacture a MEMS device are disclosed. An embodiment includes forming trenches in a first main surface of a substrate, forming conductive fingers by forming a conductive material in the trenches and forming an opening from a second main surface of the substrate thereby exposing the conductive fingers, the second main surface opposite the first main surface.

公开(公告)号：US20190148253A1

公开(公告)日：2019-05-16

申请号：US16227761

申请日：2018-12-20

Applicant: Infineon Technologies AG

Inventor： Stephan Pindl ,  Daniel Lugauer ,  Dominic Maier ,  Alfons Dehe

IPC: H01L23/31 ,  H01L23/053 ,  H01L23/538 ,  H01L23/057 ,  H01L21/762 ,  H01L21/18 ,  H01L33/00 ,  H01L21/20 ,  G01N33/00 ,  H05K1/18 ,  H01L21/56 ,  G01N27/02 ,  G01N27/12 ,  H01L23/29 ,  H01L23/00

Abstract: According to an embodiment, a sensor package includes an electrically insulating substrate including a cavity in the electrically insulating substrate, an ambient sensor, an integrated circuit die embedded in the electrically insulating substrate, and a plurality of conductive interconnect structures coupling the ambient sensor to the integrated circuit die. The ambient sensor is supported by the electrically insulating substrate and arranged adjacent the cavity.

公开(公告)号：US10259701B2

公开(公告)日：2019-04-16

申请号：US15345179

申请日：2016-11-07

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe

IPC: B81B3/00 ,  B81C1/00

Abstract: A MEMS device and a method to manufacture a MEMS device are disclosed. An embodiment includes forming trenches in a first main surface of a substrate, forming conductive fingers by forming a conductive material in the trenches and forming an opening from a second main surface of the substrate thereby exposing the conductive fingers, the second main surface opposite the first main surface.

公开(公告)号：US10241088B2

公开(公告)日：2019-03-26

申请号：US15136469

申请日：2016-04-22

Applicant: Infineon Technologies AG

Inventor： Horst Theuss ,  Gottfried Beer ,  Sebastian Beer ,  Alfons Dehe ,  Franz Jost ,  Stefan Kolb ,  Guenther Ruhl ,  Rainer Markus Schaller

IPC: G01N29/24 ,  G01N29/032

Abstract: A photo-acoustic gas sensor includes a light emitter unit having a light emitter configured to emit a beam of light pulses with a predetermined repetition frequency and a wavelength corresponding to an absorption band of a gas to be sensed, and a detector unit having a microphone. The light emitter unit is arranged so that the beam of light pulses traverses an area configured to accommodate the gas. The detector unit is arranged so that the microphone can receive a signal oscillating with the repetition frequency.

公开(公告)号：US10231061B2

公开(公告)日：2019-03-12

申请号：US15581744

申请日：2017-04-28

Applicant: Infineon Technologies AG

Inventor： Alfons Dehe ,  Ulrich Krumbein

IPC: H04R19/00 ,  H04R19/04 ,  H04R7/04 ,  B81B3/00

Abstract: A sound transducer includes a housing with a sound port and a MEMS structure disposed in an interior space of the housing. The MEMS structure and the sound port are acoustically coupled to each other. The MEMS structure separates a front volume from a back volume of the housing. At least one vent hole of the MEMS structure allows a gas exchange between the front volume and the back volume. The sound port allows a liquid to enter the front volume. Further, the MEMS structure prevents liquid from entering the back volume.

公开(公告)号：US20190041363A1

公开(公告)日：2019-02-07

申请号：US16053177

申请日：2018-08-02

Applicant: Infineon Technologies AG

Inventor： David Tumpold ,  Alfons Dehe

IPC: G01N29/24 ,  G01N29/30

Abstract: A reference chamber for a fluid sensor comprises a housing, a deflectable structure, which is arranged movably within the housing, a control device configured to drive the deflectable structure at a first point in time such that the deflectable structure assumes a defined position, and to drive the deflectable structure at a second point in time such that the deflectable structure moves out of the defined position and a movement of the deflectable structure in the housing is obtained. The reference chamber comprises an evaluation device configured to determine a movement characteristic of the movement of the deflectable structure on the basis of the moving into the defined position or on the basis of the moving out of the defined position and to determine an atmospheric property in the housing on the basis of the movement characteristic.