公开(公告)号：US09989489B2

公开(公告)日：2018-06-05

申请号：US15427047

申请日：2017-02-07

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Jonathan Rothberg ,  Wolfgang Hinz ,  Kim Johnson ,  James Bustillo

IPC: G01N27/403 ,  G01N27/414 ,  C12Q1/68 ,  G01N33/543 ,  H01L29/423

CPC classification number: G01N27/4148 ,  C12Q1/6818 ,  C12Q1/6874 ,  G01N27/4145 ,  G01N33/54373 ,  G01N33/5438 ,  H01L27/088 ,  H01L29/42324 ,  H01L29/78 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01015 ,  H01L2924/01073 ,  H01L2924/14 ,  H01L2924/1433 ,  Y10T436/22 ,  C12Q2565/607 ,  C12Q2565/301 ,  C12Q2533/101

Abstract: Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.

公开(公告)号：US09823217B2

公开(公告)日：2017-11-21

申请号：US15014802

申请日：2016-02-03

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. Fife ,  Jordan Owens ,  Shifeng Li ,  James Bustillo

IPC: G01N27/414 ,  B01L3/00

CPC classification number: G01N27/414 ,  B01L3/502761 ,  B01L2200/0668 ,  B01L2300/0636 ,  B01L2300/0877 ,  G01N27/4145 ,  G01N27/4148

Abstract: In one implementation, a chemical device is described. The sensor includes a chemically-sensitive field effect transistor including a floating gate structure having a plurality of floating gate conductors electrically coupled to one another. A conductive element overlies and is in communication with an uppermost floating gate conductor in the plurality of floating gate conductors. The conductive element is wider and thinner than the uppermost floating gate conductor. A dielectric material defines an opening extending to an upper surface of the conductive element.

公开(公告)号：US20170146484A1

公开(公告)日：2017-05-25

申请号：US15344081

申请日：2016-11-04

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Mark Milgrew ,  Jonathan Rothberg ,  James Bustillo

IPC: G01N27/414 ,  C12Q1/68 ,  G01N27/27

CPC classification number: G01N27/4145 ,  C12Q1/6869 ,  C12Q1/6874 ,  G01N27/27 ,  G01N27/414 ,  Y10T29/49002

Abstract: Methods and apparatus relating to FET arrays for monitoring chemical and/or biological reactions such as nucleic acid sequencing-by-synthesis reactions. Some methods provided herein relate to improving signal (and also signal to noise ratio) from released hydrogen ions during nucleic acid sequencing reactions.

公开(公告)号：US09458502B2

公开(公告)日：2016-10-04

申请号：US13966184

申请日：2013-08-13

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Jonathan M. Rothberg ,  Wolfgang Hinz ,  Kim L. Johnson ,  James Bustillo ,  John Leamon ,  Jonathan Schultz

IPC: G01N27/414 ,  C12Q1/68 ,  B01L3/00

CPC classification number: C12Q1/6874 ,  B01L3/502761 ,  B01L2300/046 ,  B01L2300/0663 ,  B01L2300/0851 ,  B01L2400/086 ,  C12Q1/6869 ,  G01N27/4145 ,  G01N27/4148 ,  C12Q2565/607 ,  C12Q2565/301 ,  C12Q2565/629

Abstract: Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in the concentration of inorganic pyrophosphate (PPi), hydrogen ions, and nucleotide triphosphates.

公开(公告)号：US09404887B2

公开(公告)日：2016-08-02

申请号：US14139647

申请日：2013-12-23

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Wolfgang Hinz ,  John M. Mauro ,  Shifeng Li ,  James Bustillo

IPC: G01N27/414 ,  G01N27/26 ,  C12Q1/68 ,  H01L29/78

CPC classification number: G01N27/4148 ,  C12Q1/6874 ,  G01N27/26 ,  G01N27/414 ,  G01N27/4145 ,  H01L29/78 ,  Y10T436/143333

Abstract: The described embodiments may provide a method of fabricating a chemical detection device. The method may comprise forming a microwell above a CMOS device. The microwell may comprise a bottom surface and sidewalls. The method may further comprise applying a first chemical to be selectively attached to the bottom surface of the microwell, forming a metal oxide layer on the sidewalls of the microwell, and applying a second chemical to be selectively attached to the sidewalls of the microwell. The second chemical may lack an affinity to the first chemical.

Abstract translation: 所描述的实施例可以提供一种制造化学检测装置的方法。 该方法可以包括在CMOS器件上形成微孔。 微孔可以包括底表面和侧壁。 该方法可以进一步包括施加第一化学物质以选择性地连接到微孔的底表面，在微孔的侧壁上形成金属氧化物层，以及施加第二化学物质以选择性地连接到微孔的侧壁。 第二种化学物质可能与第一种化学物质不具有亲和力。

公开(公告)号：US08963216B2

公开(公告)日：2015-02-24

申请号：US13801002

申请日：2013-03-13

Applicant: Life Technologies Corporation

Inventor： Keith Fife ,  James Bustillo ,  Jordan Owens

IPC: G01N27/414

CPC classification number: G01N27/414 ,  G01N27/4145

Abstract: In one implementation, a chemical sensor is described. The chemical sensor includes chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material defines an opening extending to the upper surface of the floating gate conductor. A conductive sidewall spacer is on a sidewall of the opening and contacts the upper surface of the floating gate conductor.

Abstract translation: 在一个实施方式中，描述了化学传感器。 化学传感器包括具有上表面的浮栅导体的化学敏感场效应晶体管。 介电材料限定了延伸到浮动栅极导体的上表面的开口。 导电侧壁间隔物位于开口的侧壁上并与浮栅导体的上表面接触。

公开(公告)号：US20140273324A1

公开(公告)日：2014-09-18

申请号：US13801186

申请日：2013-03-13

Applicant: LIFE TECHNOLOGIES CORPORATION

Inventor： Keith G. Fife ,  James Bustillo ,  Jordan Owens

IPC: G01N27/414 ,  H01L29/66

CPC classification number: G01N27/4145

Abstract: In one implementation, a method for manufacturing a chemical sensor is described. The method includes forming a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface. A dielectric material is formed defining an opening extending to the upper surface of the floating gate conductor. A conductive material is formed within the opening and on an upper surface of the dielectric material. A fill material is formed on the conductive material. The fill material is used as a protect mask to remove the conductive material on the upper surface of the dielectric material. The fill material is then removed to expose remaining conductive material on a sidewall of the opening.

Abstract translation: 在一个实施方式中，描述了用于制造化学传感器的方法。 该方法包括形成包括具有上表面的浮栅导体的化学敏感场效应晶体管。 形成介电材料，限定了延伸到浮动栅极导体的上表面的开口。 导电材料形成在电介质材料的开口内和上表面上。 在导电材料上形成填充材料。 填充材料用作保护掩模以去除介电材料的上表面上的导电材料。 然后去除填充材料以在开口的侧壁上露出剩余的导电材料。