Suspended moving channels and channel actuators for microfluidic applications and method for making
    63.
    发明授权
    Suspended moving channels and channel actuators for microfluidic applications and method for making 失效
    用于微流控应用的悬挂移动通道和通道执行器和制造方法

    公开(公告)号:US06462391B1

    公开(公告)日:2002-10-08

    申请号:US09686885

    申请日:2000-10-12

    CPC classification number: B81C1/00587 B81B2201/051 Y10S366/03

    Abstract: A microfabrication process for making enclosed, subsurface microfluidic tunnels, cavities, channels, and the like within suspended beams includes etching a single crystal silicon wafer to produce trenches defining a beam. The trench walls are oxidized, and the interior of the beam is etched through a channel via on the top of the beam to form a hollow beam with oxide sidewalls. The beam is released, and the via is then sealed to form an enclosed released channel beam.

    Abstract translation: 用于在悬挂梁内制造封闭的,地下微流体通道,空腔,通道等的微加工方法包括蚀刻单晶硅晶片以产生限定光束的沟槽。 沟槽壁被氧化,并且光束的内部通过在光束顶部上的通道蚀刻而形成具有氧化物侧壁的中空光束。 梁被释放,然后将通孔密封以形成封闭释放的通道梁。

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