Methods and Apparatus for High-Throughput Formation of Nano-Scale Arrays
    62.
    发明申请
    Methods and Apparatus for High-Throughput Formation of Nano-Scale Arrays 有权
    纳米尺度阵列高通量形成的方法与装置

    公开(公告)号:US20120180676A1

    公开(公告)日:2012-07-19

    申请号:US13389113

    申请日:2010-08-05

    CPC classification number: B41M3/006 B81C1/00031 B81C2201/0184 B81C2201/0187

    Abstract: An apparatus for forming an array of deposits on a substrate is disclosed. The apparatus may include a stencil capable of releasable attached to the substrate and having an array of openings and at least one alignment mark. The apparatus may further include a high throughput deposition printer aligned with the stencil to form an array of deposits on the substrate. The array of deposits may be aligned with the array of openings through the at least one alignment mark and an optional alignment device. Methods of manufacturing the stencil and using it to generate multiplexed or combinatorial arrays are also disclosed.

    Abstract translation: 公开了一种用于在衬底上形成沉积物阵列的装置。 该装置可以包括能够可释放地附接到基底并具有开口阵列和至少一个对准标记的模版。 该装置还可以包括与模板对准的高通量沉积打印机,以在衬底上形成沉积物阵列。 沉积物阵列可以与通过至少一个对准标记的开口阵列和可选的对准装置对齐。 还公开了制造模板并将其用于生成多路复用或组合阵列的方法。

    DIGITAL LITHOGRAPHY USING REAL TIME QUALITY CONTROL
    64.
    发明申请
    DIGITAL LITHOGRAPHY USING REAL TIME QUALITY CONTROL 有权
    使用实时质量控制的数字刻印

    公开(公告)号:US20090185018A9

    公开(公告)日:2009-07-23

    申请号:US11204648

    申请日:2005-08-15

    Abstract: A digital lithography system including a droplet source (printhead) for selectively ejecting liquid droplets of a phase-change masking material, and an imaging system for capturing (generating) image data representing printed features formed by the ejected liquid droplets. The system also includes a digital control system that detects defects in the printed features, for example, by comparing the image data with stored image data. The digital control system then modifies the printed feature to correct the defect, for example, by moving the printhead over the defect and causing the printhead to eject droplets onto the defect's location. In one embodiment, a single-printhead secondary printer operates in conjunction with a multi-printhead main printer to correct defects.

    Abstract translation: 一种数字光刻系统,包括用于选择性地喷射相变掩模材料的液滴的液滴源(打印头)和用于捕获(产生)表示喷射液滴形成的打印特征的图像数据的成像系统。 该系统还包括数字控制系统,其检测打印特征中的缺陷,例如通过将图像数据与存储的图像数据进行比较。 然后,数字控制系统修改打印的特征以校正缺陷,例如通过将打印头移动到缺陷上并使打印头将液滴喷射到缺陷的位置上。 在一个实施例中,单打印头二次打印机与多打印头主打印机一起操作以校正缺陷。

    Method of producing a three-dimensional structure and fine three-dimensional structure
    65.
    发明申请
    Method of producing a three-dimensional structure and fine three-dimensional structure 有权
    制造三维结构和精细三维结构的方法

    公开(公告)号:US20060198959A1

    公开(公告)日:2006-09-07

    申请号:US10566476

    申请日:2004-07-29

    CPC classification number: B81C1/00111 B81C99/0095 B81C2201/0184

    Abstract: A method of producing a three-dimensional structure contains the steps of: arranging a substrate close to a tip of a needle-shaped fluid-ejection body having a fine diameter supplied with a solution, ejecting a fluid droplet having an ultra-fine diameter toward a surface of the substrate by applying a voltage having a prescribed waveform to the needle-shaped fluid-ejection body, making the droplet fly and land on the substrate, and solidifying the droplet after the fluid droplet is landed on the substrate; further a three-dimensional structure has a fine diameter comprises droplets having an ultra-fine particle diameter, wherein the structure is grown by solidifying the droplets and stacking the solidified droplets.

    Abstract translation: 一种制造三维结构的方法包括以下步骤:将具有细小直径的针状流体喷射体的尖端附近的基板配置在与溶液一体的状态下,将具有超细直径的液滴喷射向 通过向针状流体喷射体施加具有规定波形的电压的基板的表面,使得液滴飞溅并落在基板上,并且在液滴落在基板上之后使液滴固化; 此外,具有细小直径的三维结构包括具有超细粒径的液滴,其中通过使液滴凝固并堆积固化的液滴来生长该结构。

    METHODS AND APPARATUS FOR HIGH-THROUGHPUT FORMATION OF NANO-SCALE ARRAYS
    67.
    发明申请
    METHODS AND APPARATUS FOR HIGH-THROUGHPUT FORMATION OF NANO-SCALE ARRAYS 审中-公开
    用于高通量形成纳米尺度阵列的方法和装置

    公开(公告)号:WO2011017487A2

    公开(公告)日:2011-02-10

    申请号:PCT/US2010/044493

    申请日:2010-08-05

    CPC classification number: B41M3/006 B81C1/00031 B81C2201/0184 B81C2201/0187

    Abstract: An apparatus for forming an array of deposits on a substrate is disclosed. The apparatus may include a stencil capable of releasable attached to the substrate and having an array of openings and at least one alignment mark. The apparatus may further include a high throughput deposition printer aligned with the stencil to form an array of deposits on the substrate. The array of deposits may be aligned with the array of openings through the at least one alignment mark and an optional alignment device. Methods of manufacturing the stencil and using it to generate multiplexed or combinatorial arrays are also disclosed.

    Abstract translation: 公开了一种用于在衬底上形成沉积物阵列的装置。 该设备可以包括能够可释放地连接到基底并具有开口阵列和至少一个对准标记的模版。 该设备还可以包括与模板对准的高通量沉积打印机,以在衬底上形成沉积物阵列。 沉积物阵列可以通过至少一个对准标记和可选的对准装置与开口阵列对齐。 还公开了制造模板并将其用于生成多路复用或组合阵列的方法。

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