公开(公告)号：WO2003067204A1

公开(公告)日：2003-08-14

申请号：PCT/EP2003/000832

申请日：2003-01-28

Applicant: GESELLSCHAFT ZUR FÖRDERUNG ANGEWANDTER OPTIK, OPTOELEKTRONIK, QUANTENELEKTRONIK UND SPEKTROSKOPIE E.V. ,  GESELLSCHAFT ZUR FÖRDERUNG DER SPEKTROCHEMIE UND ANGEWANDTEN SPEKTROSKOPIE E.V. ,  FLOREK, Stefan ,  BECKER-ROSS, Helmut ,  HEITMANN, Uwe

Inventor： FLOREK, Stefan ,  BECKER-ROSS, Helmut ,  HEITMANN, Uwe

IPC: G01J3/18

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/08 ,  G01J3/14 ,  G01J3/1809 ,  G01J3/28 ,  G01J2003/1208 ,  G01J2003/2866

Abstract: Eine Spektrometer-Anordnung (10) enthält eine Strahlungsqeulle (11) mit kontinuierlichem Spektrum, einen Vormonochromator (2) zur Erzeugung eines Spektrums mit relativ geringer Lineardispersion aus welchem ein Spektrenausschnitt selektierbar ist, dessen spektrale Bandbreite kleiner oder gleich der Bandbreite des freien Spektralbereiches derjenigen Ordnung im Echelle-Spektrum ist, in der die Mittenwellenlänge des selektierten Spektrenausschnitts mit maximaler Blazeeffektivität messbar ist, ein Echelle-Spektrometer (4) mit Mitteln zur Wellenlängenkalibrierung, einen Eintrittsspalt (21) an dem Vormonochromator (2), eine Zwischenspalt-Anordnung (3) mit einem Zwischenspalt und einen ortsauflösenden Strahlungsempfänger (5) in der Austrittsebene des Spektrometers zur Detektion von Wellenlängen-Spektren. Die Anordnung ist dadurch gekennzeichnet, daβ die Breite des Zwischenspalts (3) gröβer ist, als das durch den Vormonochromator am Ort des Zwischenspaltes entstehende monochromatische Bild des Eintrittspaltes und Mittel zur Kalibrierung des Vormonochromators vorgesehen sind, durch welche die auf den Detektor abgebildete Strahlung der Strahlungsquelle mit kontinuierlichen Spektrum auf eine Referenzposition kalibrierbar ist.

Abstract translation: 光谱仪组件10包括Strahlungsqeulle 11具有连续光谱，用于生成具有相对小的线性色散的光谱的单色仪2从该光谱间隔选择的，其光谱带宽小于或等于所述自由光谱范围的带宽的顺序在中阶梯光谱， 在所选择的谱切与最大火焰效率的中心波长是可测量的，中阶梯光谱仪4具有用于波长校正，一个入口在预单色仪2，中间狭缝组件3与在光谱仪的出射平面的中间间隙和位置敏感辐射检测器5，用于狭缝21 检测波长光谱。 该装置的特征在于在间隙3比由在入口狭缝的中间狭缝单色图像的位置处的预单色生成gröbetaer以及用于校准所述预单色设置，通过它从所述辐射源的辐射成像到检测器具有连续dabeta宽度 光谱可以被校准到参考位置。

公开(公告)号：WO2003016841A1

公开(公告)日：2003-02-27

申请号：PCT/US2002/023821

申请日：2002-07-25

Applicant: CYMER, INC. ,  HAAS, Steven ,  SANDSTROM, Richard, L. ,  HOFMANN, Thomas ,  ERSHOV, Alexander, I.

Inventor： HAAS, Steven ,  SANDSTROM, Richard, L. ,  HOFMANN, Thomas ,  ERSHOV, Alexander, I.

IPC: G01J3/18

CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/027 ,  G01J3/12 ,  G01J3/1809 ,  G01J3/22 ,  G01J3/28 ,  G01J9/02

Abstract: A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined (20). Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function (76). This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between "twice a measured laser bandwidth" and a corresponding "doubly convolved bandwidth." This method provides an excellent estimate of the true laser bandwidth because "twice the measured laser bandwidth" represents two laser bandwidths and two spectrometer slit function bandwidths and the "doubly convolved bandwidth" represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.

Abstract translation: 基于在与光谱仪的狭缝功能相比激光带宽不大的情况下，利用光谱仪获得的带宽数据，计算非常窄带激光束的带宽数据的简单，可靠，易于使用的方法。 确定光谱仪的狭缝功能（20）。 使用光谱仪测量激光束的光谱数据，以产生测量的激光束光谱，其表示激光束光谱和光谱仪狭缝功能的卷积（76）。 然后将该测量的激光光谱与光谱仪的狭缝函数进行数学卷积以产生双卷积光谱。 表示真实激光带宽的带宽值由测量的激光光谱和双卷积光谱确定。 优选地，通过确定“两次测量的激光带宽”和相应的“双卷积带宽”之间的差异来计算真实的激光器带宽。 该方法提供了真正的激光器带宽的极好估计，因为“两倍测量激光带宽”代表两个激光带宽和两个光谱仪狭缝功能带宽，“双卷积带宽”代表一个激光带宽和两个光谱仪狭缝功能带宽。 因此，不同之处在于真正的激光带宽的表示。 在优选实施例中，测量的带宽参数是全宽度半最大带宽和95％积分带宽。

公开(公告)号：WO01061292A1

公开(公告)日：2001-08-23

申请号：PCT/AU2001/000148

申请日：2001-02-15

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/28 ,  G01J3/36 ,  G01J5/62 ,  G01N21/27 ,  G01N21/31

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/0227 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/1809 ,  G01J3/2803 ,  G01J5/62 ,  G01J2003/1828 ,  G01N21/27 ,  G01N21/31

Abstract: A method and apparatus for the spectrochemical analysis of a sample in which a solid state array detector (82) is used to detect radiation (62) of spectrochemical interest. The invention involves the use of a shutter (72) adjacent the entrance aperture (70) of a polychromator (74-80) to expose the detector (82) to the radiation (62) for varying lengths of time whereby for short duration exposure times charge accumulation in elements (i.e. pixels) of the detector (82) due to high intensity components of the radiation is limited and for longer exposure times charge accumulation in elements (pixels) of the detector (82) due to feeble intesity components of radiation (62) is increased. This ensures that each reading of the detector (82) includes at least one exposure in which the amount of charge accumulated at each wavelength of interest is neither too little or too great. The problems of feeble radiation components not being accurately measurable and of high intensity radiation components exceeding the charge carrying capacity of elements (pixels) of the detector (82) are thereby able to be avoided. An attenuator (90) may be placed between the radiation source (60) and the detector (82) to permit longer exposure times to be used for very high intensity radiation.

Abstract translation: 用于对样品进行光谱化学分析的方法和装置，其中固态阵列检测器（82）用于检测分光光度的辐射（62）。 本发明涉及使用与多色调剂（74-80）的入口孔（70）相邻的快门（72）将检测器（82）暴露于辐射（62）以改变长度的时间，从而短时间曝光时间 由于辐射的高强度分量，检测器（82）的元件（即，像素）中的电荷累积受到限制，并且由于辐射的微弱的肥胖分量，对于更长的曝光时间来检测器（82）的元件（像素）中的电荷累积 62）增加。 这确保了检测器（82）的每次读取包括至少一次曝光，其中在每个感兴趣波长处累积的电荷量既不太小也不太大。 因此能够避免无法精确测量的微弱辐射成分和超过检测器（82）的元件（像素）的电荷承载能力的高强度辐射成分的问题。 衰减器（90）可以放置在辐射源（60）和检测器（82）之间，以允许更长的曝光时间用于非常高强度的辐射。

公开(公告)号：US20230160746A1

公开(公告)日：2023-05-25

申请号：US17920864

申请日：2021-04-27

Applicant: Heriot-Watt University

Inventor： Marius RUTKAUSKAS ,  Derryck REID ,  Yoann ALTMANN

IPC: G01J3/18 ,  G01J3/02

CPC classification number: G01J3/1809 ,  G01J3/0229

Abstract: An apparatus and a method for shaping a light spectrum are presented. The apparatus includes a spatial light modulator (140) provided for shaping the spectrum of a primary beam. The spatial light modulator (140) includes an array of cells in which each cell is operable in a first state and a second state. The apparatus also includes a controller (160) configured to change the state of a subset of cells iteratively, based on a stochastic process, to shape the spectrum.

公开(公告)号：US20170016767A1

公开(公告)日：2017-01-19

申请号：US15104755

申请日：2014-12-16

Applicant: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO

Inventor： James Peter Robert DAY ,  Kees MODDEMEIJER ,  Daniel PEREZ CALERO ,  Tom DUIVENVOORDE ,  Marijn SANDTKE

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0291 ,  G01J3/18 ,  G01J3/1809

Abstract: The present disclosure concerns a spectrometer (10) and method for generating a two dimensional spectrum (S). The spectrometer (10) comprises a main grating (3) and cross dispersion element (2). An imaging mirror (4) is arranged for reflecting and focussing dispersed radiation (R3) from the main grating (3) towards an image plane (IP) for imaging the two dimensional spectrum (S) onto an image plane (IP) of the spectrometer (10). A correction lens (6) is arranged for correcting optical aberrations in the imaging of the two dimensional spectrum (S) in the image plane (IP). The imaging mirror (4) and correction lens (6) have a coinciding axis of cylindrical symmetry (AS).

Abstract translation: 本公开涉及一种用于产生二维光谱（S）的光谱仪（10）和方法。 光谱仪（10）包括主光栅（3）和交叉色散元件（2）。 成像镜（4）被布置用于将分散的辐射（R3）从主光栅（3）反射并聚焦到图像平面（IP），用于将二维光谱（S）成像到光谱仪的图像平面（IP）上 （10）。 校正透镜（6）被布置用于校正图像平面（IP）中的二维光谱（S）的成像中的光学像差。 成像镜（4）和校正透镜（6）具有圆柱对称（AS）的重合轴。

公开(公告)号：US20120062889A1

公开(公告)日：2012-03-15

申请号：US13086233

申请日：2011-04-13

Applicant: Michael P. Chrisp ,  Joel M. Bowers

Inventor： Michael P. Chrisp ,  Joel M. Bowers

IPC: G01J3/28

CPC classification number: G01J3/0208 ,  G01J3/0256 ,  G01J3/0286 ,  G01J3/1809

Abstract: A cryogenically cooled imaging spectrometer that includes a spectrometer housing having a first side and a second side opposite the first side. An entrance slit is on the first side of the spectrometer housing and directs light to a cross-disperser grating. An echelle immersions grating and a catadioptric lens are positioned in the housing to receive the light. A cryogenically cooled detector is located in the housing on the second side of the spectrometer housing. Light from the entrance slit is directed to the cross-disperser grating. The light is directed from the cross-disperser grating to the echelle immersions grating. The light is directed from the echelle immersions grating to the cryogenically cooled detector on the second side of the spectrometer housing.

Abstract translation: 一种低温冷却成像光谱仪，其包括具有第一侧和与第一侧相对的第二侧的光谱仪外壳。 入口狭缝位于光谱仪外壳的第一侧，并将光引导到交叉分散光栅。 折叠式沉没光栅和反射折射透镜位于外壳中以接收光。 低温冷却检测器位于光谱仪外壳第二侧的外壳内。 来自入口狭缝的光被引导到交叉分散光栅。 光从交叉分散器光栅引导到梯子沉浸光栅。 灯从梯子沉浸光栅引导到光谱仪外壳第二侧的低温冷却检测器。

公开(公告)号：US07876435B2

公开(公告)日：2011-01-25

申请号：US11985798

申请日：2008-01-14

Applicant: Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

IPC: G01J3/28

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/06 ,  G01J3/1809 ,  G01J3/28 ,  G01J2003/2866

Abstract: A method to determine and correct broadband background in complex spectra in a simple and automatized manner includes carrying out a background correction with respect to broadband background before a calibration step. The background correction may involve recording a spectral graph and smoothing the recorded spectral graph, determining all values in the initially recorded graph having a value higher than the value of the smoothed graph and reducing such values to the value of the smoothed graph, and repeating these two steps. The background graph obtained is then subtracted from the initial graph. The smoothing of the graph is carried out by moving average, where each intensity value I at the position x in the spectrum is replaced by an average value. The characteristics of the found peaks can be stored in a file so that the calibration can be used at any time.

Abstract translation: 以简单且自动化的方式确定和校正复谱中的宽带背景的方法包括在校准步骤之前对宽带背景执行背景校正。 背景校正可以包括记录光谱图并平滑所记录的光谱图，确定初始记录的图中具有高于平滑图的值的值的所有值，并将这些值减小为平滑图的值，并重复这些 两步。 然后从初始图中减去所获得的背景图。 通过移动平均来进行曲线的平滑处理，其中频谱中位置x处的每个强度值I被平均值代替。 找到的峰值的特征可以存储在文件中，以便可以随时使用校准。

公开(公告)号：US07389027B2

公开(公告)日：2008-06-17

申请号：US11782481

申请日：2007-07-24

Applicant: Andrew D. Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Patrick Masterson

Inventor： Andrew D. Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Patrick Masterson

IPC: G02B6/26

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0289 ,  G01J3/0297 ,  G01J3/108 ,  G01J3/1809 ,  G01J5/601 ,  G01J2003/104 ,  G01J2003/423 ,  G01N21/359 ,  G01N21/39 ,  G01N2021/399 ,  G02B6/14

Abstract: A pitch side optical system for use in diode laser spectroscopy consisting of more than one diode laser having select lasing frequencies with each diode laser being coupled to an end of a distinct input optical fiber. The pitch side optical system further consists of a multiplexer optically coupled to the other end of less than all of the input optical fibers with the multiplexer outputting multiplexed laser light to a pitch side optical fiber. The pitch side optical system further consists of a coupler optically coupled to the far end of the pitch side optical fiber and the far end of an unmultiplexed input optical fiber with the coupler combining the multiplexed laser light and the unmultiplexed laser light and outputting the combined light to a transmission optical fiber. Typically, the coupler is located near the combustion process. The pitch side optical system further consists of a pitch optic coupled to the transmission optical fiber. Typically, all optical fibers used in the pitch side optical system are single mode optical fibers.

Abstract translation: 用于二极管激光光谱的俯仰侧光学系统，其由具有选择的激光频率的多于一个的二极管激光器组成，每个二极管激光器耦合到不同的输入光纤的端部。 音调侧光学系统还包括多路复用器，其光耦合到少于所有输入光纤的另一端，多路复用器将多路复用的激光输出到音调侧光纤。 俯仰侧光学系统还包括光耦合到俯仰侧光纤的远端的耦合器和未复用输入光纤的远端，耦合器组合复用的激光和未复用的激光，并输出组合的光 传输光纤。 通常，耦合器位于燃烧过程附近。 俯仰侧光学系统还包括耦合到传输光纤的俯仰光学器件。 通常，在俯仰侧光学系统中使用的所有光纤都是单模光纤。

公开(公告)号：US20080106735A1

公开(公告)日：2008-05-08

申请号：US11985798

申请日：2008-01-14

Applicant: Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

IPC: G01J3/28 ,  G06F19/00

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/06 ,  G01J3/1809 ,  G01J3/28 ,  G01J2003/2866

Abstract: A method to determine and correct broadband background in complex spectra in a simple and automatized manner includes carrying out a background correction with respect to broadband background before a calibration step. The background correction may involve recording a spectral graph and smoothing the recorded spectral graph, determining all values in the initially recorded graph having a value higher than the value of the smoothed graph and reducing such values to the value of the smoothed graph, and repeating these two steps. The background graph obtained is then subtracted from the initial graph. The smoothing of the graph is carried out by moving average, where each intensity value I at the position x in the spectrum is replaced by an average value. The characteristics of the found peaks can be stored in a file so that the calibration can be used at any time.

Abstract translation: 以简单且自动化的方式确定和校正复谱中的宽带背景的方法包括在校准步骤之前对宽带背景执行背景校正。 背景校正可以包括记录光谱图并平滑所记录的光谱图，确定初始记录的图中具有高于平滑图的值的值的所有值，并将这些值减小为平滑图的值，并重复这些 两步。 然后从初始图中减去所获得的背景图。 通过移动平均来进行曲线的平滑处理，其中频谱中位置x处的每个强度值I被平均值代替。 找到的峰值的特征可以存储在文件中，以便可以随时使用校准。

公开(公告)号：US07248755B2

公开(公告)日：2007-07-24

申请号：US10543288

申请日：2004-03-31

Applicant: Andrew D Sappey ,  James Howell ,  Henrick Hofvander ,  Bernard Patrick Masterson

Inventor： Andrew D Sappey ,  James Howell ,  Henrick Hofvander ,  Bernard Patrick Masterson

IPC: G02B6/00

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0289 ,  G01J3/0297 ,  G01J3/108 ,  G01J3/1809 ,  G01J5/601 ,  G01J2003/104 ,  G01J2003/423 ,  G01N21/359 ,  G01N21/39 ,  G01N2021/399 ,  G02B6/14

Abstract: A sensing apparatus consisting of more than one diode laser having select lasing frequencies, a multiplexer optically coupled to the outputs of the diode lasers with the multiplexer being further optically coupled to a pitch side optical fiber. Multiplexed laser light is transmitted through the pitch side optical fiber to a pitch optic operatively associated with a process chamber which may be a combustion chamber or the boiler of a coal or gas fired power plant. The pitch optic is oriented to project multiplexed laser output through the process chamber. Also operatively oriented with the process chamber is a catch optic in optical communication with the pitch optic to receive the multiplexed laser output projected through the process chamber. The catch optic is optically coupled to an optical fiber which transmits the multiplexed laser output to a demultiplexer. The demultiplexer demultiplexes the laser light and optically couples the select lasing frequencies of light to a detector with the detector being sensitive to one of the select lasing frequencies.

Abstract translation: 由多于一个具有选择的激光频率的二极管激光器组成的感测装置，多路复用器光学耦合到二极管激光器的输出端，多路复用器进一步光耦合到俯仰侧光纤。 多路复用激光通过俯仰侧光纤传输到与可以是燃烧室或煤或燃气发电厂的锅炉的处理室可操作地连接的俯仰光学器件。 俯仰光学器件定向成投影通过处理室的多路复用激光输出。 还与操作室一起操作地定向的是与俯仰光学器件光学通信的接收光学器件，以接收通过处理室投射的多路复用的激光输出。 捕捉光学器件光耦合到将多路复用的激光输出传输到解复用器的光纤。 解复用器解复用激光并将选择的激光频率光耦合到检测器，检测器对选择的激光频率之一敏感。