Abstract:
A reticle defect inspection apparatus that suppresses deterioration of optical components resulting from luminescent spots generated by an integrator and can sustain a defect inspection with high precision for a long time is provided. The reticle defect inspection apparatus is a reticle defect inspection apparatus for inspecting for defects on a reticle using a pattern image obtained by irradiating the reticle on which a pattern is formed with light. And the apparatus includes an illuminating optical system for irradiating the reticle with an inspection light and a detecting optical system for detecting a pattern image of the reticle irradiated with the inspection light, wherein the illuminating optical system comprises an integrator for equalizing illumination distribution of the inspection light and a moving mechanism for enabling the integrator to slightly move in a direction perpendicular to an optical axis of the integrator.
Abstract:
An apparatus and method are provided for creating an image of a microarray. The apparatus includes at least one light source configured to direct light toward the microarray. The apparatus includes an excitation filter configured to filter the light into a first frequency band towards dichromatic mirror. The dichromatic mirror reflects light onto the microarray causing the microarray to emit electromagnetic energy. The apparatus includes emission filter configured to filter the electromagnetic energy within a second frequency band. The apparatus further includes an imaging unit having a charged coupled device (CCD), the CCD having an imaging surface masked by a pinhole blind such that when the pinhole blind receives electromagnetic energy from the emission filter, an image is created of the entire micro array.
Abstract:
The present invention discloses a biochip detection system for detecting a biochip labeled with multiple fluorophores. The biochip detection system comprises a broadband light source for generating a light beam, a stand for supporting the biochip, a light integrator positioned between the broadband light source and the biochip, a lens set for adjusting the cross-sectional area of the light beam, a first filter module positioned on the optical path of the light beam, a detector, e.g., CCD camera, photodiode array, for detecting a fluorescence beam emitted from the biochip, and a second filter module positioned on the optical path of the fluorescence beam. The light integrator can be a light tunnel, a lens array or a holographic diffuser for uniforming the intensity distribution of the light beam and changing the cross-sectional shape of the light beam into a rectangle.
Abstract:
A flow cytometry apparatus for determining one or more characteristics of particles or the like flowing in a liquid stream includes a nozzle for generating a liquid flow stream for moving particles therethrough substantially one at a time. An arc lamp provides a beam of incoherent light to illuminate the particles moving in the flow stream. A prism in the light beam modifies non-uniform incoherent light, as provided by said arc lamp, to a more uniform beam of illumination which is directed to the flowing particles. A detector is included for detecting light with respect to each moving particle and for associating the detected light with one or more characteristics of the particles.
Abstract:
본 발명은 다수의 미량 시료를 중합효소연쇄반응과 같은 핵산 증폭반응을 수행하면서 반응 중에 생성되는 반응산물의 생성을 실시간으로 모니터링 하기 위한 핵산증폭반응산물의 실시간 모니터링 장치에 관한 것이다. 구체적으로 본 발명은, 여기광과 형광의 간섭을 효율적으로 분리하기 위해 편광자(Polarizer), 편광빔분할기(Polarizing Beam Splitter), 편광변환기(Polarization Converting System) 등을 포함하는 생화학 반응의 실시간 모니터링장치에 대한 것이다. PCR, Q-PCR, 편광자, 편광빔분할기, 여기광
Abstract:
A multi-channel fluorescence measuring optical system and a multi-channel fluorescence sample analyzer using the optical system are provided. The multi-channel fluorescence measuring optical system, which irradiates light onto a plurality of sample channels and detecting fluorescence radiated from samples (m), includes: a light source (10); an integrator (20) for giving the light irradiated from the light source a uniform intensity distribution; a sample holder (30) having a plurality of sample channels on which the samples (m) are mounted, wherein the samples (m) are exited by the light emitted from the integrator (20); a beam splitter (25) between the integrator (20) and the sample holder (30) for dividing the incident light in a predetermined ratio; and a light detecting unit (40) for detecting fluorescence from the samples (m) through the beam splitter (25). Preferably, the light intensities of fluorescence images are detected using optical fiber bundles and photodiodes, the manufacturing cost can be greatly reduced, and the optical system can be miniaturized.
Abstract:
An apparatus and method are provided for creating an image of a microarray. The apparatus includes at least one light source configured to direct light toward the microarray. The apparatus includes an excitation filter configured to filter the light into a first frequency band towards dichromatic mirror. The dichromatic mirror reflects light onto the microarray causing the microarray to emit electromagnetic energy. The apparatus includes emission filter configured to filter the electromagnetic energy within a second frequency band. The apparatus further includes an imaging unit having a charged coupled device (CCD), the CC having an Imaging surface masked by a pinhole blind such that when the pinhole blind receives electromagnetic energy from the emission filter, an image is created of the entire microarray.
Abstract:
A method and system for scanning an outer surface of a three-dimensional object, the outer surface being reflective, the method comprising the following steps: (a) projecting a light pattern on the object with a relative movement between the light pattern and the object; (b) recording with cameras images of the light pattern reflected by the outer surface during the relative movement; (c) processing the recorded reflection images by identifying the outline of the light pattern and determining from the outline characteristics of the outer surface; wherein the light pattern comprises at least one homogenously illuminated strip extending transversally to a direction of the relative movement with at least one border with a non-straight profile so as to form a non-constant width of the strip; and in step (c) the speed of the relative movement is taken into account for determining a three-dimensional definition of the outer surface.
Abstract:
An inspection system and a method for analyzing defects in a product, in particular a printed circuit board product, a semiconductor wafer or the like, the inspection system includes a projection device , an optical detection device , and a processing device, the projection device having an illuminating unit and a spectrometer member configured to split white light into its spectral components and project a multichromatic light beam thus formed from monochromatic light beams onto a product at an angle of incidence β, the optical detection device having a detection unit comprising a camera and an objective , the camera being configured to detect the multichromatic light beam reflected on the product in a detection plane of the detection unit, the detection plane being perpendicular, preferably orthogonal, to a product surface of the product, the illuminating unit having at least two light-emitting diodes disposed in a row and an exit aperture extending along the row.