公开(公告)号：US07535561B2

公开(公告)日：2009-05-19

申请号：US11717651

申请日：2007-03-14

Applicant: Shuichi Chikamatsu ,  Minori Noguchi ,  Kenji Aiko

Inventor： Shuichi Chikamatsu ,  Minori Noguchi ,  Kenji Aiko

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N21/94 ,  G01N2021/8822 ,  G01N2201/1211 ,  G01N2201/1218

Abstract: A defect inspecting apparatus of the invention solves a problem that in a defect inspecting apparatus, because of improving detection sensitivity of a microscopic defect by reducing a detection pixel size, a focal depth becomes shallow, a height of imaging is varied due to environmental change and the detection sensitivity of a defect becomes unstable. This apparatus comprises an XY stage, which carries a substrate to be inspected and scans in a predetermined direction, and a mechanism having a system of irradiating a defect on the inspected substrate at a slant and detecting the defect by a detection optical system disposed on the upper side, which corrects a height of imaging in real time for change in temperature and barometric pressure in order to keep the imaging in a best condition.

Abstract translation: 本发明的缺陷检查装置解决了在缺陷检查装置中，由于通过减小检测像素尺寸来提高微观缺陷的检测灵敏度，焦点深度变浅，成像高度由于环境变化而变化， 缺陷的检测灵敏度变得不稳定。 该装置包括XY台，其承载待检查的基板和沿预定方向扫描的机构，以及具有以倾斜方式照射被检查基板上的缺陷的系统的机构，并且通过设置在该检测光学系统上的检测光学系统检测该缺陷 上部，其实时校正成像的高度以改变温度和大气压力，以便将成像保持在最佳状态。

公开(公告)号：US20080225296A1

公开(公告)日：2008-09-18

申请号：US11724665

申请日：2007-03-14

Applicant: Xiang Liu ,  Xin Zhou ,  Alfred Feitisch ,  Greg Sanger

Inventor： Xiang Liu ,  Xin Zhou ,  Alfred Feitisch ,  Greg Sanger

IPC: G01N21/00

CPC classification number: G01N21/39 ,  G01J3/433 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2021/354 ,  G01N2021/399 ,  G01N2201/1218

Abstract: A system includes a light source, a detector, at least one pressure sensor, and a control unit. The light source emits light at a wavelength substantially corresponding to an absorption line of a target gas. The detector is positioned to detect the intensity of light emitted from the light source that has passed through the target gas. The pressure sensor detects the pressure of the target gas. The control circuit is coupled to the detector and the light source to adjust the modulation amplitude of the light source based on the pressure detected by the at least one pressure sensor. Related systems, apparatus, methods, and/or articles are also described.

Abstract translation: 系统包括光源，检测器，至少一个压力传感器和控制单元。 光源以基本对应于目标气体的吸收线的波长发射光。 检测器被定位成检测从已经通过目标气体的光源发射的光的强度。 压力传感器检测目标气体的压力。 控制电路耦合到检测器和光源，以基于由至少一个压力传感器检测到的压力来调节光源的调制幅度。 还描述了相关系统，装置，方法和/或制品。

公开(公告)号：US07403283B2

公开(公告)日：2008-07-22

申请号：US11064484

申请日：2005-02-24

Applicant: Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

Inventor： Gloria Sogan ,  Julien Bounouar ,  Jean-Pierre Desbiolles ,  Isabelle Gaurand

IPC: G01J3/30

CPC classification number: G01J3/443 ,  G01N21/274 ,  G01N21/68 ,  G01N2201/121 ,  G01N2201/1218 ,  G01N2201/127

Abstract: A method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of the radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of the sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

Abstract translation: 一种通过光谱仪（8）通过发光光谱检测混合物中的少数气态物质的方法和装置，其中使用由用于分析的气体混合物中存在的等离子体（4）发射的辐射，并且在 放射线的光谱确定出大多数气态物质，其呈现对少数物种的存在敏感的振幅，关于少数气态物质的浓度的信息从敏感线的幅度推导出 （s）。 这使得可以实时监测少数气态物质。

公开(公告)号：US06710347B1

公开(公告)日：2004-03-23

申请号：US10096227

申请日：2002-03-12

Applicant: Gideon Eden

Inventor： Gideon Eden

IPC: G01J502

CPC classification number: G01N21/3504 ,  G01N21/33 ,  G01N2021/3177 ,  G01N2201/0692 ,  G01N2201/1211 ,  G01N2201/1218

Abstract: An apparatus and method for detecting at least one component gas in a sample includes a radiation source for providing radiation along an optical path in a pre-selected spectral band having at least one absorption line of the component gas to be detected and an optical detector for detecting radiation at the optical path. A sample chamber is positioned in the optical path between the source and the optical detector to contain a quantity of a sample gas. At least one gas cell enclosing an amount of the gas to be detected is fixedly positioned in the optical path in series with the gas chamber. A mathematical relationship is determined between the detected radiation and the concentration of a sample gas filling the sample chamber.

Abstract translation: 用于检测样品中的至少一种组分气体的装置和方法包括：辐射源，用于沿预先选择的光谱带沿着光路提供辐射，所述光谱带具有待检测的成分气体的至少一个吸收线;以及光学检测器， 检测光路上的辐射。 样品室位于源和光学检测器之间的光路中，以容纳一定量的样品气体。 包围待检测气体量的至少一个气室牢固地定位在与气室串联的光路中。 在检测到的辐射与填充样品室的样品气体的浓度之间确定数学关系。

公开(公告)号：US20040042079A1

公开(公告)日：2004-03-04

申请号：US10233940

申请日：2002-09-03

Inventor： John Phillip Ertel ,  William Richard Trutna JR.

IPC: G02B005/18 ,  G02B027/42 ,  G02B027/44

CPC classification number: G02B7/003 ,  G01N21/45 ,  G01N2021/4106 ,  G01N2201/1211 ,  G01N2201/1214 ,  G01N2201/1218 ,  G01S7/497 ,  Y10S359/90

Abstract: Optical systems are provided. One such optical system includes an optical source that propagates a source beam of light. A diffracting component is optically coupled to the optical source and is operative to receive the source beam and produce a diffracted beam. A target is located to receive the diffracted beam. Additionally, a compensating system repositions at least one of the optical source, the diffracting component, and the target in response to a detected change in refractive index of a medium through which the diffracted beam propagates so that the diffracted beam continues to be received by the target. Methods and other systems also are provided.

Abstract translation: 提供光学系统。 一种这样的光学系统包括传播源光束的光源。 衍射组件光耦合到光源并且可操作地接收源光束并产生衍射光束。 目标位于接收衍射光束。 另外，补偿系统响应于所检测到的衍射光束传播的介质的折射率变化，重新定位光源，衍射部件和靶中的至少一个，使得衍射光束继续被 目标。 还提供了方法和其它系统。

公开(公告)号：US4881183A

公开(公告)日：1989-11-14

申请号：US173419

申请日：1988-03-25

Applicant: David E. Groe

Inventor： David E. Groe

IPC: G01N21/35

CPC classification number: G01N21/3504 ,  G01N2201/1218 ,  G01N2201/12753

Abstract: A computerized emissions tester determines concentrations of HC, CO, and CO2 in exhaust emissions. An IR test bench assembly develops an analog voltage representative of the concentration of a particular gas in a sample gas of known concentration. Data related to calibration pressure, voltage offset and voltage gain are stored in non-volatile memory EEPROM. Algorithms relating voltage and concentration of the particular gases are included in software. The pressure of an exhaust emission is compared with the calibration pressure data in memory and a correction is applied to the tester output. The data relating to the voltage offset and gain factor are also used to compensate the tester output.

Abstract translation: 电脑排放测试仪确定废气排放中HC，CO和CO2的浓度。 IR测试台组件开发代表已知浓度的样品气体中特定气体的浓度的模拟电压。 与校准压力，电压偏移和电压增益相关的数据存储在非易失性存储器EEPROM中。 涉及特定气体的电压和浓度的算法包括在软件中。 将废气排放的压力与存储器中的校准压力数据进行比较，并将校正应用于测试仪输出。 与电压偏移和增益因子相关的数据也用于补偿测试仪输出。

公开(公告)号：WO2013142737A1

公开(公告)日：2013-09-26

申请号：PCT/US2013/033383

申请日：2013-03-21

Applicant: SPECTRASENSORS, INC.

Inventor： FEITISCH, Alfred ,  LIU, Xiang ,  HUANG, Hsu-hung ,  JI, Wenhai ,  CLINE, Richard, L.

IPC: G01N21/35

CPC classification number: G01J3/0297 ,  G01J3/42 ,  G01N21/05 ,  G01N21/274 ,  G01N21/3504 ,  G01N21/39 ,  G01N2021/0314 ,  G01N2021/399 ,  G01N2201/1211 ,  G01N2201/1218 ,  G01N2201/127

Abstract: Validation verification data quantifying an intensity of light reaching a detector of a spectrometer from a light source of the spectrometer after the light passes through a validation gas across a known path length can be collected or received. The validation gas can include an amount of an analyte compound and an undisturbed background composition that is representative of a sample gas background composition of a sample gas to be analyzed using a spectrometer. The sample gas background composition can include one or more background components. The validation verification data can be compared with stored calibration data for the spectrometer to calculate a concentration adjustment factor, and sample measurement data collected with the spectrometer can be modified using this adjustment factor to compensate for collisional broadening of a spectral peak of the analyte compound by the background components. Related methods, articles of manufacture, systems, and the like are described.

Abstract translation: 验证验证数据可以收集或接收在光通过已知路径长度的验证气体之后，量化从光谱仪的光源到达光谱仪的检测器的光强度。 验证气体可以包括一定量的分析物化合物和未受干扰的背景组合物，其代表使用光谱仪分析的样品气体的样品气体背景组成。 样品气体背景组合物可以包括一种或多种背景组分。 验证验证数据可以与存储的光谱仪的校准数据进行比较，以计算浓度调节因子，并且可以使用该调整因子修改用光谱仪收集的样品测量数据，以补偿分析物化合物的光谱峰的碰撞展宽 背景组件。 描述了相关方法，制品，系统等。

公开(公告)号：WO2012040695A2

公开(公告)日：2012-03-29

申请号：PCT/US2011053229

申请日：2011-09-26

Applicant: LAGUNA RES INC ,  FORSYTH DAVID ,  MILLER WAYNE KENNETH

Inventor： FORSYTH DAVID ,  MILLER WAYNE KENNETH

IPC: G01N21/35

CPC classification number: G01N21/3504 ,  G01N21/274 ,  G01N21/61 ,  G01N2201/1218 ,  G01N2201/1248

Abstract: Non-dispersive infrared (NDIR) sensing systems employ a NDIR sensor coupled to a microprocessor to determine gas concentrations by employing slope-based methodologies that compensate for pressure variations, temperature variations, or both, which may compare NDIR signals with calibrated data. NDIR sensor systems may employ means for limiting the system peak current demand, providing for the portability and scalability of the system. In NDIR sensor systems calculating gas concentrations using calibration data, the phase of the change in the NDIR output signal in response to a change in the infrared source emitter level may be measured as part of the calibration process.

Abstract translation: 非色散红外（NDIR）传感系统采用耦合到微处理器的NDIR传感器，通过采用基于斜率的方法来补偿压力变化，温度变化或两者，从而可以将NDIR信号与校准数据进行比较来确定气体浓度。 NDIR传感器系统可采用用于限制系统峰值电流需求的装置，提供系统的可移植性和可扩展性。 在使用校准数据计算气体浓度的NDIR传感器系统中，作为校准过程的一部分，可以测量响应于红外源发射器水平的变化的NDIR输出信号的变化的相位。

公开(公告)号：WO2011130320A2

公开(公告)日：2011-10-20

申请号：PCT/US2011032180

申请日：2011-04-12

Applicant: LI COR INC ,  BURBA GEORGE ,  MCDERMITT DAYLE ,  KOMISSAROV ANATOLY ,  ANDERSON TYLER G ,  XU LIUKANG ,  RIENSCHE BRADLEY A

Inventor： BURBA GEORGE ,  MCDERMITT DAYLE ,  KOMISSAROV ANATOLY ,  ANDERSON TYLER G ,  XU LIUKANG ,  RIENSCHE BRADLEY A

IPC: G01D21/02 ,  G01N27/12 ,  G06F19/00

CPC classification number: G01N21/3504 ,  G01N21/39 ,  G01N2201/1211 ,  G01N2201/1214 ,  G01N2201/1218

Abstract: Disclosed embodiments of the present invention provide means to obtain correct gas density and flux measurements using (i) gas analyzer (open-path, or closed-path gas analyzers with short intake tube, for example 1 m long, or any combination of the two); (ii) fast temperature or sensible heat flux measurement device (such as, fine-wire thermocouple, sonic anemometer, or any other device providing fast accurate gas temperature measurements); (iii) fast air water content or latent heat flux measurement device (such as, hygrometer, NDIR analyzer, any other device providing fast accurate gas water content measurements); (iv) vertical wind or sampling device (such as sonic anemometer, scintillometer, or fast solenoid valve, etc.) and (v) algorithms in accordance with the present invention to compute the corrected gas flux, compensated for T-P effects. In case when water factor in T-P effects is negligible, the fast air water content or latent heat flux measurement device (item iii in last paragraph) can be excluded.

Abstract translation: 本发明的公开的实施例提供了使用（i）气体分析仪（具有短进气管的开放路径或闭路气体分析器，例如1米长，或两者的任何组合）获得正确的气体密度和通量测量的方法 ）; （ii）快速温度或显热通量测量装置（例如细线热电偶，声波风速计或提供快速精确气体温度测量的任何其他装置）; （iii）快速空气含水量或潜热通量测量装置（如湿度计，NDIR分析仪，任何其他提供快速准确气体含水量测量的装置）; （iv）垂直风或取样装置（例如声波风速计，闪烁仪或快速电磁阀等）和（v）根据本发明的计算校正气体通量的算法，补偿T-P效应。 在T-P效应中的水分因子可忽略的情况下，可以排除快速空气含水量或潜热通量测量装置（最后一项中的项目iii）。

公开(公告)号：WO1994003794A1

公开(公告)日：1994-02-17

申请号：PCT/US1993007042

申请日：1993-07-27

Applicant: BOC HEALTH CARE, INC.

Inventor： BOC HEALTH CARE, INC. ,  MITCHELL, John, R. ,  CARTER, Joseph, W. ,  GREGONIS, Donald, E.

IPC: G01N21/65

CPC classification number: G01N21/15 ,  G01N21/05 ,  G01N21/65 ,  G01N2021/151 ,  G01N2021/391 ,  G01N2021/651 ,  G01N2021/8578 ,  G01N2201/1218

Abstract: A gas analysis cell having a pressure control system eliminates pressure variations in the gas cell regardless of changes in restriction, gas viscosity and barometric pressure. Since optical alignement through the gas cell is sensitive to gas pressure, maintaining a constant pressure in the gas cell makes the system more stable.

Abstract translation: 具有压力控制系统的气体分析单元消除了气室中的压力变化，而不管限制，气体粘度和大气压力的变化。 由于通过气室的光学对准对气体压力敏感，因此在气室中保持恒定的压力使得系统更加稳定。