公开(公告)号：EP3179502A1

公开(公告)日：2017-06-14

申请号：EP16002630.8

申请日：2016-12-09

Applicant: Horiba Stec, Co., Ltd.

Inventor： Sasai, Kohei ,  Ikeyama, Toshihiro ,  Sakai, Toshiaki

IPC: H01J49/08

CPC classification number: H01J1/146 ,  H01J9/042 ,  H01J49/08 ,  H01J49/4215

Abstract: In order to provide a thermionic emission filament capable of ensuring a long life and improving an analysis accuracy of a mass spectrometer using the thermionic emission filament, in the thermionic emission filament (211) including a core member (211A) through which electric current flows and an electron emitting layer (211B) which is formed so as to cover a surface of the core member (211A), the electron emitting layer (211B) is configured to have denseness for substantial gas-tight integrity.

Abstract translation: 为了提供能够确保长寿命的热离子发射灯丝，并提高使用热离子发射丝的质谱仪的分析精度，在包含电流流动的芯部件（211A）的热离子发射丝（211）中， 形成为覆盖芯体（211A）的表面的电子发射层（211B），电子发射层（211B）被构造成具有基本上气密完整性的致密性。

公开(公告)号：EP2375438B1

公开(公告)日：2013-05-29

申请号：EP09831885.0

申请日：2009-12-08

Applicant: A.L.M.T. Corp.

Inventor： NAKABAYASHI, Seiji ,  KATOH, Masahiro ,  YAMAMOTO, Yoshiharu ,  YOSHIDA, Toshihiko ,  HASEGAWA, Norihiko

IPC: H01J9/42 ,  H01J61/073 ,  H01J1/146

CPC classification number: H01J1/146 ,  H01B1/08 ,  H01J9/42 ,  H01J61/0735 ,  H01J61/0737

公开(公告)号：EP2375438A1

公开(公告)日：2011-10-12

申请号：EP09831885.0

申请日：2009-12-08

Applicant: A.L.M.T. Corp.

Inventor： NAKABAYASHI, Seiji ,  KATOH, Masahiro ,  YAMAMOTO, Yoshiharu ,  YOSHIDA, Toshihiko ,  HASEGAWA, Norihiko

IPC: H01J61/06 ,  H01J9/42

CPC classification number: H01J1/146 ,  H01B1/08 ,  H01J9/42 ,  H01J61/0735 ,  H01J61/0737

Abstract: Provided is a tungsten electrode material that can improve the life of an electrode than conventional by the use of a material in place of thorium oxide. The tungsten electrode material includes a tungsten base alloy and oxide particles dispersed in the tungsten base alloy, wherein the oxide particle is an oxide solid solution in which a Zr oxide and/or a Hf oxide and an oxide of at least one or more kinds of rare earth elements selected from Sc, Y, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu are solid-dissolved.

Abstract translation: 提供了一种钨电极材料，其可以通过使用代替氧化钍的材料来改善电极的寿命。 所述钨电极材料包含钨基合金和分散在所述钨基合金中的氧化物粒子，其中，所述氧化物粒子是氧化物固溶体，其中，Zr氧化物和/或Hf氧化物和至少一种以上的氧化物 选自Sc，Y，La，Ce，Pr，Nd，Sm，Eu，Gd，Tb，Dy，Ho，Er，Tm，Yb和Lu的稀土元素是固溶的。

公开(公告)号：EP1596418B1

公开(公告)日：2011-07-27

申请号：EP04711692.6

申请日：2004-02-17

Applicant: DENKI KAGAKU KOGYO KABUSHIKI KAISHA

Inventor： TERUI, Yoshinori c/o Denki Kagaku Kogyo K.K. ,  NONOGAKI, Ryozo c/o Denki Kagaku Kogyo K.K. ,  SAKAWA, Seiichi c/o Denki Kagaku Kogyo K.K.

IPC: H01J37/073 ,  H01J9/04 ,  H01J1/16 ,  H01J37/063 ,  H01J37/075

CPC classification number: H01J1/16 ,  H01J1/146 ,  H01J1/20 ,  H01J9/04 ,  H01J9/042 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/25 ,  H01J2237/28 ,  H01J2237/3175

Abstract: An electron source suitable for an electron beam exposure system, an Auger electronic spectrometer or the like, and provides a small total emission current amount even during a high-angular-current-density operation. An electron gun provided with a cathode (1) consisting of tungsten or molybdenum single crystal and provided on the surface thereof with a coating layer consisting of oxygen and at least one kind of metal element selected from a group consisting of 2A group, 3A group and 4A group, characterized in that the end of the cathode (1) has a conical trapezoid shape, a total conical angle of a conical trapezoid portion (8) is between 25° and 95°, and the diameter of the top face (9) is 5μm through 200μm.

公开(公告)号：EP1596418A4

公开(公告)日：2010-01-06

申请号：EP04711692

申请日：2004-02-17

Applicant: DENKI KAGAKU KOGYO KK

Inventor： TERUI YOSHINORI ,  NONOGAKI RYOZO ,  SAKAWA SEIICHI

IPC: H01J1/146 ,  H01J1/16 ,  H01J9/04 ,  H01J37/073

CPC classification number: H01J1/16 ,  H01J1/146 ,  H01J1/20 ,  H01J9/04 ,  H01J9/042 ,  H01J37/065 ,  H01J2237/06316 ,  H01J2237/25 ,  H01J2237/28 ,  H01J2237/3175

公开(公告)号：US12014894B2

公开(公告)日：2024-06-18

申请号：US18258461

申请日：2021-12-20

Applicant: Denka Company Limited

Inventor： Hiromitsu Chatani

IPC: H01J1/146 ,  H01J1/16 ,  H01J37/065

CPC classification number: H01J1/146 ,  H01J1/16 ,  H01J37/065 ,  H01J2237/06308

Abstract: A method for manufacturing an electron source includes steps of sandwiching a welding object in which a tip of an electron emission material and a tungsten filament overlap in direct contact between a pair of welding electrodes, and welding the tip and the tungsten filament by causing a current to flow while pressing forces are applied to the welding object by the pair of welding electrodes. A thickness of the welding object is within a range of 50 to 500 μm.

公开(公告)号：US11984291B2

公开(公告)日：2024-05-14

申请号：US18258461

申请日：2021-12-20

Applicant: Denka Company Limited

Inventor： Hiromitsu Chatani

IPC: H01J1/146 ,  H01J1/16 ,  H01J37/065

CPC classification number: H01J1/146 ,  H01J1/16 ,  H01J37/065 ,  H01J2237/06308

Abstract: A method for manufacturing an electron source includes steps of sandwiching a welding object in which a tip of an electron emission material and a tungsten filament overlap in direct contact between a pair of welding electrodes, and welding the tip and the tungsten filament by causing a current to flow while pressing forces are applied to the welding object by the pair of welding electrodes. A thickness of the welding object is within a range of 50 to 500 μm.

公开(公告)号：US20160300684A1

公开(公告)日：2016-10-13

申请号：US15093853

申请日：2016-04-08

Applicant: The Government of the United States of America, as represented by the Secretary of the Navy

Inventor： Boris N. Feigelson ,  James A. Wollmershauser ,  Kedar Manandhar

IPC: H01J9/04 ,  B22F9/22 ,  H01J1/144 ,  B22F3/14 ,  B22F5/00 ,  H01J1/146 ,  B22F1/02 ,  B22F1/00

CPC classification number: H01J9/042 ,  B22F1/02 ,  B22F3/26 ,  B22F2998/10 ,  B22F2999/00 ,  H01J1/142 ,  H01J1/144 ,  H01J1/146 ,  H01J1/28 ,  B22F3/14 ,  B22F1/0088 ,  B22F2201/013 ,  B22F1/0085 ,  B22F3/02 ,  B22F3/11

Abstract: A thermionic dispenser cathode having a refractory metal matrix with scandium and barium compounds in contact with the metal matrix and methods for forming the same. The invention utilizes atomic layer deposition (ALD) to form a nanoscale, uniform, conformal distribution of a scandium compound on tungsten surfaces and further utilizes in situ high pressure consolidation/impregnation to enhance impregnation of a BaO-CaO-Al2O3 based emissive mixture into the scandate-coated tungsten matrix or to sinter a tungsten/scandate/barium composite structure. The result is a tungsten-scandate thermionic cathode having improved emission.

Abstract translation: 具有与金属基体接触的钪和钡化合物的难熔金属基体的热离子分配器阴极及其形成方法。 本发明利用原子层沉积（ALD）在钨表面上形成钪化合物的纳米尺度均匀的共形分布，并进一步利用原位高压固结/浸渍以增强BaO-CaO-Al 2 O 3基发射混合物的浸渍 钪酸盐涂层的钨基体或烧结钨/钪酸盐/钡复合结构。 结果是具有改善的发射的钨 - 钪酸盐热阴极。

公开(公告)号：US20040244879A1

公开(公告)日：2004-12-09

申请号：US10491793

申请日：2004-04-06

Inventor： Takashi Tanaka ,  Motohisa Sakai ,  Yasuhiko Nakano ,  Kan Suganomata ,  Motoaki Esaki ,  Kayo Nakano

IPC: C22C027/04

CPC classification number: H01J1/146 ,  B21B1/18 ,  B21B15/0035 ,  B21B2003/006 ,  B21B2015/0028 ,  B21C1/003 ,  B21C37/045 ,  B22F5/12 ,  B22F2998/10 ,  C22C1/045 ,  C22C27/04 ,  H01J1/14 ,  H01J1/22 ,  H01J9/04 ,  H01J9/08 ,  H01J2201/2889 ,  H01K1/02 ,  H01K3/02 ,  B22F3/10 ,  B22F3/18 ,  B22F3/17 ,  B22F3/20

Abstract: A tungsten wire containing 1 to 10% by mass of rhenium has a point which indicates a 2% elongation within a quadrangle formed by joining points with straight lines, where the values of x and y are point (20, 75), point (20, 87), point (90, 75), and point (90, 58), in this order, wherein the wire diameter of the aforementioned tungsten wire is represented by x nullm, and the elongation of the tungsten wire is 2% after electrically heating with an electrical current which is a ratio of y % to the fusion current (FC) at the wire diameter x nullm, and wherein a semi-logarithmic system of coordinates is expressed by a horizontal axis using a logarithmic scale of the aforementioned wire diameter x and a vertical axis using a normal scale of ratio y to the fusion current. According to the above-described configuration, a tungsten wire having a great elongation even under conditions of high temperature can be provided, and the tungsten wire can exhibit an excellent durability when used as component material for constituting cathode heaters and so forth, and the tungsten wire can be manufactured efficiently.

Abstract translation: 含有1〜10质量％铼的钨丝具有表示在通过连接点与直线形成的四边形内的2％伸长率的点，其中x和y的值为点（20,75），点（20 ，87），点（90,75）和点（90,58），其中上述钨丝的线直径由x mum表示，并且在钨电极之后，钨丝的伸长率为2％ 以线径x mum的y％与熔融电流（FC）的比例的电流进行加热，并且其中使用上述线径的对数标度由水平轴表示坐标的半对数系统 x和垂直轴，使用与融合电流的比率y的正常刻度。 根据上述结构，能够提供即使在高温条件下具有大的伸长率的钨丝，并且当用作构成阴极加热器等的组分材料时，钨丝可以表现出优异的耐久性，钨 电线可以有效地制造。

公开(公告)号：US06800990B2

公开(公告)日：2004-10-05

申请号：US09756865

申请日：2001-01-10

Applicant: Jong-Seo Choi ,  Hyek-Bok Lee ,  Kyu-Nam Joo ,  Yoon-Chang Kim

Inventor： Jong-Seo Choi ,  Hyek-Bok Lee ,  Kyu-Nam Joo ,  Yoon-Chang Kim

IPC: H01J1906

CPC classification number: H01J1/20 ,  H01J1/146

Abstract: The present invention provides a cathode material for an electron beam device. The cathode material is characterized by the fact that it includes 0.5-9.0% by weight of a rare earth metal of the cerium group, 0.5-15.0% by weight of tungsten or rhenium or both tungsten and rhenium, 0.5-10% by weight of carbon and the remainder of iridium. The cathode material according to the invention has excellent plasticity, can be easily used for manufacturing an emitter of a small size, has high electron emission power, and has a low operation temperature, thereby having a long lifetime, and it is therefore useful for a cathode material for an electron beam device.

Abstract translation: 本发明提供了一种用于电子束装置的阴极材料。 阴极材料的特征在于它包括0.5-9.0重量％的铈基稀土金属，0.5-15.0重量％的钨或铼，钨或铼，0.5-10重量％的钨， 碳和铱的剩余部分。 根据本发明的阴极材料具有优异的可塑性，可以容易地用于制造小尺寸的发射体，具有高的电子发射功率，并且具有低的操作温度，从而具有长的使用寿命，因此可用于 用于电子束装置的阴极材料。