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    Ionization gauge for high pressure operation
    65.
    发明授权
    Ionization gauge for high pressure operation 有权
    用于高压操作的电离计

    公开(公告)号：US09593996B2

    公开(公告)日：2017-03-14

    申请号：US14377449

    申请日：2013-02-07

    Applicant: MKS Instruments, Inc.

    Inventor： Gerardo A. Brucker

    IPC: H01J27/02 ,  B01D59/44 ,  G01L19/06 ,  G01L21/32 ,  H01J41/04 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02

    CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

    Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

    Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

    SYSTEM AND METHOD FOR IDENTIFYING OPERATING TEMPERATURES AND MODIFYING OF INTEGRATED CIRCUITS
    66.
    发明申请
    SYSTEM AND METHOD FOR IDENTIFYING OPERATING TEMPERATURES AND MODIFYING OF INTEGRATED CIRCUITS 有权
    识别操作温度的系统和方法以及整合电路的修改

    公开(公告)号：US20160240479A1

    公开(公告)日：2016-08-18

    申请号：US14624907

    申请日：2015-02-18

    Applicant: GLOBALFOUNDRIES INC.

    Inventor： Jeanne P. Bickford ,  Nazmul Habib ,  Baozhen Li ,  Tad J. Wilder

    IPC: H01L23/525 ,  G01K7/16 ,  H01L23/532 ,  G01N25/00

    CPC classification number: G01K7/16 ,  G01L21/30 ,  G01N17/00 ,  G01N27/62 ,  G01N27/64 ,  G01R31/00 ,  H01J41/00 ,  H01J41/02 ,  H01L23/34

    Abstract: Aspects of the present disclosure include a computer-implemented method for identifying an operating temperature of an integrated circuit (IC), the method including using a computing device for: applying a test voltage to a test circuit embedded within the IC, the test circuit including a phase shift memory (PSM) element therein, wherein the PSM element crystallizes at a crystallization temperature from an amorphous phase having a first electrical resistance into a crystalline phase having a second electrical resistance, the second electrical resistance being less than the first electrical resistance; and identifying the IC as having operated above the crystallization temperature in response to a resistance of the test circuit at the test voltage being outside of the target operating range.

    Abstract translation: 本公开的方面包括用于识别集成电路（IC）的工作温度的计算机实现的方法，所述方法包括使用计算设备：将测试电压施加到嵌入在所述IC内的测试电路，所述测试电路包括 在其中的相移存储器（PSM）元件，其中所述PSM元件在结晶温度下从具有第一电阻的非晶相结晶成具有第二电阻的晶相，所述第二电阻小于所述第一电阻; 以及响应于所述测试电压在所述测试电压处于目标工作范围之外的电阻而将所述IC识别为高于所述结晶温度的IC。

    Ultrasensitive Ion Detector Using Carbon Nanotubes or Graphene
    68.
    发明申请
    Ultrasensitive Ion Detector Using Carbon Nanotubes or Graphene 审中-公开
    使用碳纳米管或石墨烯的超灵敏离子检测器

    公开(公告)号：US20150276677A1

    公开(公告)日：2015-10-01

    申请号：US14441218

    申请日：2013-11-12

    Applicant: NORTEASTERN UNIVERSITY

    Inventor： Bo Li ,  Ji Hao ,  Hyun Young Jung ,  Yung Joon Jung ,  Swastik Kar

    IPC: G01N27/70

    CPC classification number: G01N27/70 ,  G01N27/62 ,  H01J41/02 ,  H01J47/02 ,  H01J49/025

    Abstract: An ion detection device has a strip of carbon-based nanomaterial (CNM) film and a chamber enclosing the CNM film. A low bias voltage is applied at the ends of the CNM film strip, and ions present in the chamber are detected by a change in the magnitude of current flowing through the CNM film under the bias. Also provided are methods for fabricating the device, methods for measuring pressure of a gas, and methods for monitoring or quantifying an ionizing radiation using the device.

    Abstract translation: 离子检测装置具有碳带纳米材料（CNM）带和包围CNM膜的室。 在CNM膜条的端部施加低偏压，并且通过在偏压下流过CNM膜的电流的大小的变化来检测存在于室中的离子。 还提供了用于制造装置的方法，用于测量气体压力的方法，以及使用该装置监测或定量电离辐射的方法。

    IONIZATION GAUGE WITH OPERATIONAL PARAMETERS AND GEOMETRY DESIGNED FOR HIGH PRESSURE OPERATION
    69.
    发明申请
    IONIZATION GAUGE WITH OPERATIONAL PARAMETERS AND GEOMETRY DESIGNED FOR HIGH PRESSURE OPERATION 有权
    具有运行参数和几何设计用于高压运行的离子化测量

    公开(公告)号：US20140152320A1

    公开(公告)日：2014-06-05

    申请号：US14174386

    申请日：2014-02-06

    Applicant: Brooks Automation, Inc.

    Inventor： Gerardo A. Brucker

    IPC: G01L21/30

    CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

    Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

    Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

    MOLECULAR SHIELD FOR AN IONIZATON VACUUM GAUGE
    70.
    发明申请
    MOLECULAR SHIELD FOR AN IONIZATON VACUUM GAUGE 失效
    一种离子真空计的分子筛

    公开(公告)号：US20100090703A1

    公开(公告)日：2010-04-15

    申请号：US12250785

    申请日：2008-10-14

    Applicant: BENJAMIN AARON BOARDWINE ,  DERRICK LAMONT JOURNIETTE

    Inventor： BENJAMIN AARON BOARDWINE ,  DERRICK LAMONT JOURNIETTE

    IPC: G01N27/62

    CPC classification number: G01N27/62 ,  H01J41/02

    Abstract: A system for measuring gas density in a vacuum includes a gauge, a housing for containing the gauge, and a magnet secured to an exterior surface of the housing. The magnet is a flexible magnetic strips, and positioned around the exterior surface of the housing. The gauge includes grid insulator posts extending longitudinally along a tubular section of the housing, and the magnet is secured to the exterior surface of the housing adjacent to the grid insulator posts, and oriented transversely to the grid insulator posts. The magnet is a flexible magnetic strip, and a clamp secures the magnet to the exterior surface of the housing.

    Abstract translation: 用于测量真空中气体密度的系统包括测量计，用于容纳测量计的壳体和固定到壳体的外表面的磁体。 磁体是柔性磁条，并且围绕壳体的外表面定位。 该测量仪包括沿壳体的管状部分纵向延伸的栅格绝缘体柱，并且磁体固定到壳体的与栅格绝缘体柱相邻的外表面，并横向于栅格绝缘体柱。 磁体是柔性磁条，夹具将磁体固定在外壳的外表面上。

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