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公开(公告)号：JP2000251627A
公开(公告)日：2000-09-14
申请号：JP4878899
申请日：1999-02-25
Applicant: CANON KK
Inventor： KIYOUGAKU MASABUMI , MARUYAMA TOMOKO , SHIBATA MASAAKI , MIYAZAKI KAZUYA
Abstract: PROBLEM TO BE SOLVED: To suppress softening of a substrate near an electron emission part and the deformation of the electron emission part thereby by constituting the surface coat layer of the substrate, having a number of electron emitting elements arranged thereon and having a pair of element electrodes and a conductive thin film having the electron emission part by use of a glass which has a softening point of a specified temperature or higher. SOLUTION: A base body 1 is inexpensive and is desirably formed of soda lime glass. A surface coat layer 9 is formed of a glass having a softening point of 750 deg.C or higher, and borosilicate glass, zinc borosilicate glass, or alumino borosilicate glass is used. A surface conductive type electron emitting element is desirably used as the electron emitting element. A deposit composed mainly of carbon or a carbon compound and a thin film mainly composed of Pd or PdO are desirably used as an electron emission part 5 and a conductive thin film 4, respectively. A plurality of electron emitting elements is arranged in parallel on a substrate, with both ends of the individual element are connected to metal wirings, and element electrodes are connected to the mutually insulated X-direction and Y-direction metal wirings.
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公开(公告)号：JP2000251622A
公开(公告)日：2000-09-14
申请号：JP4936299
申请日：1999-02-26
Applicant: CANON KK
Inventor： MARUYAMA TOMOKO , KIYOUGAKU MASABUMI , SHIBATA MASAAKI , MIYAZAKI KAZUYA
Abstract: PROBLEM TO BE SOLVED: To solve the problem of making unstable an element forming process such as a forming process caused by generation of heat in an electron emitting element. SOLUTION: This substrate has an electron emitting element with a thin conductive film which contains carbon or a carbon compound between a pair of element electrodes. In the substrate, the total amount of MgO, CaO, SrO, BaO, Sc2O3, Y2O3, lanthanoid oxide, TiO2, ZrO2, HfO2 and Al2O3 is not more than 10% of the total composition.
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公开(公告)号：JP2000243236A
公开(公告)日：2000-09-08
申请号：JP4599599
申请日：1999-02-24
Applicant: CANON KK
Inventor： SHIBATA MASAAKI , KIYOUGAKU MASABUMI , MIYAZAKI KAZUYA , MARUYAMA TOMOKO
Abstract: PROBLEM TO BE SOLVED: To realize superior electron emission characteristics and high brightness for a long time by comprising a pair of element electrodes formed on a glass base facing opposite to each another, and a conductive thin film connected to the element electrodes and including a clearance portion, and using the electron conductive glass as the glass base. SOLUTION: A surface conduction-type electron emission element comprises a base 1, element electrodes 2, 3, a conductive thin film 4 and a clearance portion (electron emission portion) 5. As the base 1, an electron conductive glass base is used, its surface resistance is preferably set equal to or larger than 1×108 Ω/(square), equal to or smaller than 1×1011 Ω/(square), and the electron conductivity of the electron conductive glass is set equal to or larger than 1×10-9 S/cm and equal to or smaller than 1×10-6 S/cm. Relative to the electron emission characteristics of the element, the elemental current is reduced as much as possible, and sufficient discharging effect can be obtained. The carriers contributing to conduction of the electron conductive glass are electrons or positive holes, and that of less movement of ions, that is, one having the lowest ion conductivity is used.
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公开(公告)号：JP2000243232A
公开(公告)日：2000-09-08
申请号：JP4552999
申请日：1999-02-23
Applicant: CANON KK
Inventor： SHIBATA MASAAKI , KIYOUGAKU MASABUMI , MIYAZAKI KAZUYA , MARUYAMA TOMOKO
Abstract: PROBLEM TO BE SOLVED: To realize satisfactory electron emission characteristic and high brightness by comprising a base, a pair of element electrodes formed on the base counterposed with one another, and a conductive thin film connected to the element electrodes and including a clearance portion, and specifying the maximum value of a secondary electron emissivity of the base below a predetermined value. SOLUTION: A surface conducting-type electron emission element is formed by a base 1, the element electrodes 2, 3, a conductive thin film 4 and a clearance portion 5. The base 1 is preferably made of a material having less than 2 for the maximum value of the secondary electron emissivity, when the potential difference is approximately above 300 V. To obtain superior electron emission characteristics, a particulate film formed by particulate is preferably used as the conductive thin film 4. The conductive material such as Ni, Au, PdO, Pd, Pt and the like is preferably formed into a film thickness to provide Rs (sheet resistance) of 102-107/(square) for the resistance value. The film thickness providing this resistance value is approximately within the range of 5-50 nm, and the film thickness of each material has a configuration of particulate film.
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公开(公告)号：JP2000243231A
公开(公告)日：2000-09-08
申请号：JP4552899
申请日：1999-02-23
Applicant: CANON KK
Inventor： SHIBATA MASAAKI , KIYOUGAKU MASABUMI , MIYAZAKI KAZUYA , MARUYAMA TOMOKO
Abstract: PROBLEM TO BE SOLVED: To provide a substrate of high performance by arranging a plurality of electron emission elements respectively composed of a pair of elemental electrodes formed on a glass base and a conductive thin film having a clearance portion, and specifying a content of sodium in the glass base below a predetermined value. SOLUTION: A surface conductive electron emission element is formed by a base 1, the element electrodes 2, 3, a conductive thin film and an electron emission portion 5. As the base 1, the glass of low content of impurity such as sodium and the like, the blue plate glass, the ceramics of alumina and the like, and the like can be used, preferably a glass base of below 2% of sodium content is preferably used. A laminate, manufactured by laminating SiO2 onto the base through sputtering method and the like may be used. As the glass base, a non-alkali glass substantially not including alkali metallic element, the glass of low content of alkali metallic element, and the glass containing many alkali elements, but having low content of sodium, and including potasium, rubidium, cesium and the like can be used.
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Patent Agency Ranking
公开(公告)号：JP2000243229A
公开(公告)日：2000-09-08
申请号：JP4501599
申请日：1999-02-23
Applicant: CANON KK
Inventor： SHIBATA MASAAKI
Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive and highly efficient electron source substrate to obtain a flat image forming device with a large screen, capable of keeping satisfactory images for a long time. SOLUTION: This electron source base has a pair of element electrodes 2, 3 of metal formed on a glass base body 1, containing sodium with a sodium diffusion preventing layer 9 intervened and an electron emitting element of a conductive thin film 4 having an electron emitting part 5, and also has metal wirings 6, 7 to be connected to the element electrodes 2, 3 while being brought into contact with the glass base body 1.
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公开(公告)号：JP2000231872A
公开(公告)日：2000-08-22
申请号：JP31929099
申请日：1999-11-10
Applicant: CANON KK
Inventor： SHIBATA MASAAKI , MOTOI YASUKO , AEBA TOSHIAKI , NAKAMURA HISAMI , UENO RIE , YAMANOBE MASATO
Abstract: PROBLEM TO BE SOLVED: To provide excellent electron emitting characteristics and highly bright display for a long time by disposing the narrowest part of an interval between a first carbon film and a second carbon film in a first interval above the substrate surface and by providing a recessed part on a substrate at least in the first interval. SOLUTION: Conductive films 4a and 4b consist of a pair of conductive films opposed each other sandwiching a second interval 7 formed by a forming process. Carbon films 21a and 21b are disposed on a substrate 1 in a first interval 8 and on the conductive films 4a and 4b. The carbon films 21a and 21b are connected to an electrode through the conductive films 4a and 4b. In this case, the surface of the conductive films 4a and 4b is covered with the carbon films 21a and 21b. The first interval 8 separating the carbon films 21a and 21b has a narrower part above the substrate surface and above the conductive film surface in the normal direction with respect to the substrate surface. The substrate surface has a recessed shape.
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公开(公告)号：JPH11288661A
公开(公告)日：1999-10-19
申请号：JP6508899
申请日：1999-03-11
Applicant: CANON KK
Inventor： HASEGAWA MITSUTOSHI , SHIBATA MASAAKI
Abstract: PROBLEM TO BE SOLVED: To provide a display panel which uses surface conduction type electron emission elements of simple constitution and a method for easily manufacturing the same at low cost. SOLUTION: A display panel has an electron source substrate, on which a plurality of electron emission elements, each having a pair of element electrodes 2, 3 placed at an interval to each other and a thin film member placed in the interval and made to emit electrons by the electric field applied between the pair of element electrodes, are placed along plural rows and lines, and a faceplate provided with a phosphor film, and produces a display by applying to the phosphor film the electrons emitted by the electron emission elements. Each of the plurality of electron emission elements arranged along the plural rows and lines has a thin film 4 as the thin film member, which is obtained by applying droplets 7 of a liquid containing components constituting the thin film onto the substrate 1 located in the interval, and forming a film whose thickness is smaller than those of the pair of element electrodes.
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公开(公告)号：JPH11144605A
公开(公告)日：1999-05-28
申请号：JP24960898
申请日：1998-09-03
Applicant: CANON KK
Inventor： SHIBATA MASAAKI
Abstract: PROBLEM TO BE SOLVED: To provide an electron emitting element with small changes in the electron emission characteristics. SOLUTION: A conductive film 4 is connected to a couple of electrodes on a substrate 1 and has a gap 10 in a part thereof. A member 21 which is mainly made of carbon and is installed in the gap to be connected to the conductive film is provided, and a metal oxide 6 containing at least one element of nickel, iron, and cobalt is provided between the member 21 and the substrate 1.
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80.发明专利
公开(公告)号：JPH09265900A
公开(公告)日：1997-10-07
申请号：JP7802496
申请日：1996-03-29
Applicant: CANON KK
Inventor： IWASAKI TATSUYA , TSUKAMOTO TAKEO , SHIBATA MASAAKI
Abstract: PROBLEM TO BE SOLVED: To ensure longer service life and high efficiency by laminating reactive products in the vicinity of an electron emission part by means of forming CVC processing introducing a specific reactive gas. SOLUTION: Element electrodes 2 and 3 and patterns being a gap between the electrodes are formed on a glass substrate 1 by means of photo resist. To and Pt are laminated in order, the patterns are melded, a laminated films are lifted off, and the element electrodes 2 and 3 of 300 micrometers in a width W and 3 micrometers in a length L between the element electrodes are formed, The, the element electron top is masked, Cr films are laminated and patterned, an organic Pd is applied, heated, and baked, and a conductive thin film 4 of 2×10 Ω/square in the sheet resistance value of formed. Then, a specified reactive gas is introduced into a vacuum professor, voltages are applied to the element electrodes 12 and 13, and reactive products whose main components is W (film thickness of 50nm or less) are laminated by means of forming CVC processing, whereby a particular nature of an electron emission part is formed as a conductive thin film material. Thereby, electron emission characteristics of longer service life, high efficiency or the like can be improved.
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