75.
    发明专利
    未知

    公开(公告)号:DE10156235A1

    公开(公告)日:2003-06-05

    申请号:DE10156235

    申请日:2001-11-15

    Inventor: WIDZGOWSKI BERND

    Abstract: A method for operating a positioning apparatus that moves a positioning element comprises the steps of: generating a first and at least one further reference signal, the first reference signal corresponding to a first reference position and the further reference signal to a further reference position; generating a first and at least one further estimated value for the present position of the positioning drive; transferring the first reference signal and the estimated value to the positioning apparatus; establishing the first reference position using the positioning apparatus, and measuring the present position and generating a position signal that corresponds to the measured present position; transferring the further reference signal to the positioning apparatus; generating a further estimated value of the positioning drive position; transferring the further estimated value to the positioning apparatus; establishing the further reference position, and measuring a further present position and generating a further position signal that corresponds to the measured further present position; and cyclically repeating the steps at constant time intervals.

    76.
    发明专利
    未知

    公开(公告)号:DE10144593A1

    公开(公告)日:2003-04-03

    申请号:DE10144593

    申请日:2001-09-11

    Inventor: WIDZGOWSKI BERND

    Abstract: A scanning microscope is disclosed. The scanning microscope comprises a light source which emits an illuminating light beam for illumination of a specimen, a resonant beam deflection device, for guiding the illuminating light beam over the specimen, which has a resonant frequency and a resonant frequency range, and an independent oscillator with which a drive oscillation, which has a drive frequency within the resonant frequency range can be generated which drives the beam deflection device. Furthermore a method is disclosed for controlling a scanning microscope having a resonant beam deflection.

    Phase correction of position and detection signals in scanning microscopy involves triggering analogue to digital converters to digitize position, detection signals with change signals

    公开(公告)号:DE10143855A1

    公开(公告)日:2003-04-03

    申请号:DE10143855

    申请日:2001-09-07

    Inventor: WIDZGOWSKI BERND

    Abstract: The method involves producing an analog position signal and at least one corresponding detection signal, digitizing both signals, determining at least one correction value, generating first and second change signals and delaying the first with respect to the second according to the correction value and passing the change signals to the analogue to digital converters to trigger digitization of the position and detection signals. The method involves producing an analog position signal (25) from the position of a beam deflector and at least one corresponding detection signal (21) from light emitted by the object, converting both signals to digital form, determining at least one correction value, generating first and second change signals and delaying the first with respect to the second according to the correction value and passing the change signals to the analogue to digital converters (27,29) to trigger digitization of the position and detection signals. An Independent claim is also included for a scanning microscope.

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