Actuator for an Automobile
    74.
    发明申请
    Actuator for an Automobile 审中-公开
    汽车执行机构

    公开(公告)号:US20090165387A1

    公开(公告)日:2009-07-02

    申请号:US12226986

    申请日:2007-04-18

    CPC classification number: H02K7/116 B60J1/14 B60J7/1642 H02K7/1166

    Abstract: An actuator adapted to actuate an element of an automobile, the actuator comprising at least one gear adapted to rotate eccentrically about a central axis during operation of the actuator.

    Abstract translation: 适于致动汽车元件的致动器,所述致动器包括适于在所述致动器的操作期间围绕中心轴线偏心旋转的至少一个齿轮。

    High reflector tunable stress coating, such as for a MEMS mirror

    公开(公告)号:US07420264B2

    公开(公告)日:2008-09-02

    申请号:US11400301

    申请日:2006-04-07

    Abstract: An optical device having a high reflector tunable stress coating includes a micro-electromechanical system (MEMS) platform, a mirror disposed on the MEMS platform, and a multiple layer coating disposed on the mirror. The multiple layer coating includes a layer of silver (Ag), a layer of silicon dioxide (SiO2) deposited on the layer of Ag, a layer of intrinsic silicon (Si) deposited on the layer of SiO2, and a layer of silicon oxynitride (SiOxNy) deposited on the layer of Si. The concentration of nitrogen is increased and/or decreased to tune the stress (e.g., tensile, none, compressive).

    Light condenser
    76.
    发明授权
    Light condenser 有权
    光冷凝器

    公开(公告)号:US07237914B2

    公开(公告)日:2007-07-03

    申请号:US10713842

    申请日:2003-11-14

    CPC classification number: G03F7/702 G03B27/42

    Abstract: A light condenser suitable for EUV lithography that includes reflective rings concentric to an optical axis. Each ring has a reflective surface to reflect light rays emanating from a light source so that the light rays converge towards a mask to produce Köhler illumination on the mask. The reflective surface has a curve segment that includes a section of a parabolic curve that is rotated relative to an optical axis and has a focal point at the light source.

    Abstract translation: 适用于EUV光刻的光聚光器,其包括与光轴同心的反射环。 每个环具有反射表面以反射从光源发出的光线,使得光线朝向掩模会聚,以在掩模上产生Köhler照明。 反射表面具有曲线段,该曲线段包括相对于光轴旋转并且在光源处具有焦点的抛物线曲线的一部分。

    Source multiplexing in lithography
    77.
    发明授权
    Source multiplexing in lithography 失效
    光刻中的光源复用

    公开(公告)号:US07183565B2

    公开(公告)日:2007-02-27

    申请号:US11196570

    申请日:2005-08-02

    CPC classification number: G03F7/7005 G03F7/201

    Abstract: An illumination system for an extreme ultraviolet (EUV) lithography system may include multiple sources of EUV light. The system may combine the light from the multiple sources when illuminating a mask.

    Abstract translation: 用于极紫外(EUV)光刻系统的照明系统可以包括多个EUV光源。 当照射面罩时,系统可以组合来自多个源的光。

    Dual hemispherical collectors
    80.
    发明申请

    公开(公告)号:US20060237668A1

    公开(公告)日:2006-10-26

    申请号:US11411971

    申请日:2006-04-25

    CPC classification number: G03F7/70175

    Abstract: A system and method for collecting radiation, which may be used in a lithography illumination system. The system comprises a first surface shaped to reflect radiation in a first hemisphere of a source to illuminate in a second hemisphere of the source; and a second surface shaped to reflect radiation in the second hemisphere of the source to an output plane.

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