公开(公告)号：US07687762B2

公开(公告)日：2010-03-30

申请号：US12186808

申请日：2008-08-06

Applicant: Naoto Watanabe ,  Daisuke Ichii

Inventor： Naoto Watanabe ,  Daisuke Ichii

IPC: H01J3/14

CPC classification number: G01J1/32 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/0437 ,  G01J1/0455 ,  G03G15/043 ,  G03G15/0435 ,  G03G2215/0404

Abstract: A monitoring device includes a first aperture plate, a second aperture plate, and a photodiode. The first aperture is disposed in a light path of a light beam emitted by a light source and includes a first aperture arranged such that a portion of the light beam having maximum light intensity passes and a reflecting portion that reflects the light beam as a monitoring light beam. The second aperture plate is disposed in a light path of the monitoring light beam and includes a second aperture that shapes a beam diameter of the monitoring light beam. The photodiode receives the monitoring light beam.

Abstract translation: 监测装置包括第一孔板，第二孔板和光电二极管。 第一光圈设置在由光源发射的光束的光路中，并且包括布置成使得具有最大光强度的光束的一部分通过的第一孔和反射光束作为监视光的反射部分 光束。 第二光圈板设置在监视光束的光路中，并且包括形成监视光束的光束直径的第二光圈。 光电二极管接收监控光束。

公开(公告)号：US20080151221A1

公开(公告)日：2008-06-26

申请号：US11588643

申请日：2006-10-27

Applicant: Michael Sogard

Inventor： Michael Sogard

IPC: G01J3/00

CPC classification number: G01J1/429 ,  G01J1/04 ,  G01J1/0407 ,  G01J1/0455 ,  G03F7/70558 ,  G03F7/7085

Abstract: A monitoring system for an lithographic system is disclosed. In particular, the monitoring system can be utilized in an extreme ultraviolet lithographic system. In a monitoring system according to the present invention, a plurality of detectors are positioned to receive radiation from a pattern of positions on a mirror that is part of the lithographic system. In some embodiments, the plurality of detectors may be positioned on the mirror. In some embodiments, the plurality of detectors may be positioned behind the mirror and receive radiation through holes formed in the mirror. In some embodiments, radiation from the pattern of positions may be reflected by facets into the detectors.

Abstract translation: 公开了一种用于光刻系统的监视系统。 特别地，监测系统可以用于极紫外光刻系统中。 在根据本发明的监视系统中，多个检测器被定位成接收来自作为光刻系统的一部分的反射镜上的位置图案的辐射。 在一些实施例中，多个检测器可以位于反射镜上。 在一些实施例中，多个检测器可以位于反射镜后面并且接收通过形成在反射镜中的孔的辐射。 在一些实施例中，来自位置图案的辐射可以被小平面反射到检测器中。

公开(公告)号：US20060113929A1

公开(公告)日：2006-06-01

申请号：US11261352

申请日：2005-10-28

Applicant: Robert DeLange ,  Timothy Rowan

Inventor： Robert DeLange ,  Timothy Rowan

IPC: H02P1/54

CPC classification number: G02B21/16 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0429 ,  G01J1/044 ,  G01J1/0455 ,  G01J1/0462 ,  G01N21/956 ,  G02B17/06 ,  G02B17/061 ,  G02B21/04

Abstract: A method and apparatus for braking an AC motor in the higher portion of its speed range includes substantially reducing flux before applying reverse torque commands to brake the motor. A DC link bus regulator is employed to prevent increases in bus voltage and frequency.

公开(公告)号：US20050237511A1

公开(公告)日：2005-10-27

申请号：US11065103

申请日：2005-02-25

Applicant: Koichi Takahashi ,  Yoshinori Arimoto

Inventor： Koichi Takahashi ,  Yoshinori Arimoto

IPC: G01B11/26 ,  G01J1/00 ,  G01J1/06 ,  G01S3/782 ,  G01S3/784 ,  G02B26/10 ,  G02B27/14

CPC classification number: G02B27/108 ,  G01J1/0266 ,  G01J1/0414 ,  G01J1/0451 ,  G01J1/0455 ,  G01S3/784 ,  G02B26/101 ,  G02B27/126 ,  G02B27/143

Abstract: The present invention relates to an optical beam detection device for detecting deviation in the optical axis of light beams from a reference optical axis, the optical beam detection device provided with a converging member for converging the light beams; a light receiving surface that is disposed near the position where light beams that have an optical axis that coincides with the reference optical axis are converged by the converging member; an optical path deflector for deflecting light beams that have an optical axis that deviates from the reference optical axis, after they have passed through the converging member; and a light detecting element for detecting the light beams that have been deflected by the optical path deflector.

Abstract translation: 光束检测装置技术领域本发明涉及一种光束检测装置，其用于检测来自基准光轴的光束的光轴的偏离，所述光束检测装置设置有用于会聚该光束的会聚部件; 设置在与基准光轴一致的光轴的位置附近的受光面被会聚部件会聚; 用于偏转光束的光路偏转器，其具有偏离参考光轴的光轴，在它们已经通过会聚构件之后; 以及光检测元件，用于检测由光路偏转器偏转的光束。

公开(公告)号：US06534768B1

公开(公告)日：2003-03-18

申请号：US09699702

申请日：2000-10-30

Applicant: Emil W. Ciurczak ,  Kevin C. Bynum

Inventor： Emil W. Ciurczak ,  Kevin C. Bynum

IPC: G01J528

CPC classification number: G01N21/35 ,  G01J1/0455 ,  G01J1/4228 ,  G01J3/0243 ,  G01J3/10 ,  G01J3/12 ,  G01J3/1256 ,  G01J3/2803 ,  G01J2003/123 ,  G01J2003/1243 ,  G01J2003/1828 ,  G01J2003/2866 ,  G01N21/359 ,  G01N21/59

Abstract: A hemispherical detector comprising a plurality of photodetectors arranged in a substantially contiguous array, the array being substantially in the shape of a half-sphere, the half-sphere defining a closed end and an open end, the open end defining a substantially circular face. Also provided is a method for constructing a hemispherical detector comprising the steps of making a press mold of the desired shape of the hemispherical detector, pouring a material into the press mold to form a cast, finishing the cast to remove any defects, coating the cast with a coating material, and attaching a plurality of photodetectors to the cast.

Abstract translation: 一种半球形检测器，包括以基本上邻接的阵列布置的多个光电检测器，所述阵列基本上为半球形，所述半球限定封闭端和开口端，所述开口端限定基本圆形的面。 还提供了一种用于构造半球形检测器的方法，包括以下步骤：制造半球形检测器所需形状的压模，将材料注入压模中以形成铸件，精加工铸件以除去任何缺陷，涂覆铸件 涂覆材料，并将多个光电检测器附接到铸件上。

公开(公告)号：US5430540A

公开(公告)日：1995-07-04

申请号：US149046

申请日：1993-11-08

Applicant: Kazuaki Ohkubo

Inventor： Kazuaki Ohkubo

IPC: G01J1/02 ,  G01J1/04 ,  G01J1/42

CPC classification number: G01J1/04 ,  G01J1/0455 ,  G01J2001/0481 ,  G01J2001/4247

Abstract: A luminous flux measuring apparatus includes an integrating hemisphere which has a hemisphere shape and an inner wall. The inner wall has a light diffusing material applied thereto. A flat mirror is installed to cover the first opening of integrating hemisphere. A second opening is located at the center of the flat mirror and the window has the same configuration of longitudinal cross section of the illuminant to be measured. A light detector which has a light-intercepting window is located inside the integrating hemisphere. Finally, the flux measuring apparatus includes a means for holding the illuminant in the window of the mirror at the center of curvature of the integrating hemisphere.

Abstract translation: 光通量测量装置包括具有半球形状和内壁的积分半球。 内壁具有施加于其上的光漫射材料。 安装平面镜来覆盖集成半球的第一个开口。 第二开口位于平面镜的中心，并且窗口具有与被测量的发光体的纵向截面相同的构造。 具有遮光窗的光检测器位于积分半球内。 最后，通量测量装置包括用于将照明器保持在集成半球的曲率中心处的反射镜窗口中的装置。

公开(公告)号：US4601576A

公开(公告)日：1986-07-22

申请号：US559909

申请日：1983-12-09

Applicant: Lee K. Galbraith

Inventor： Lee K. Galbraith

IPC: G01N21/88 ,  G01J1/02 ,  G01N21/84 ,  G01N21/894 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G01N21/00

CPC classification number: G01J1/04 ,  G01J1/0422 ,  G01J1/0455 ,  G01N21/894 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/474 ,  G01N2201/064 ,  G01N2201/112

Abstract: A two-stage light collector, including a first stage which admits a scanning beam and a second stage which is optically connected to the first stage and has a light detector therein. The first stage has a shape which re-images diffusely scattered radiation from a target on which the radiation impinges. The first stage directs light toward an entrance aperture in the second stage which indirectly reflects light toward the detector associated with the second stage.

Abstract translation: 两级光收集器，包括允许扫描光束的第一级和与第一级光学连接且在其中具有光检测器的第二级。 第一阶段具有从放射线照射的靶的重散射散射的形状。 第一阶段将光引导到第二阶段中的入口孔，其将光朝向与第二阶段相关联的检测器间接反射。

公开(公告)号：US3804527A

公开(公告)日：1974-04-16

申请号：US5982970

申请日：1970-06-22

Applicant: ITEK CORP

Inventor： BAUGHN J ,  MONROE G ,  RONSSE A

IPC: G01J1/00 ,  G01J5/00 ,  G01B11/28 ,  G01B9/08 ,  G01B11/24

CPC classification number: G01J5/04 ,  G01J1/02 ,  G01J1/0271 ,  G01J1/04 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0455 ,  G01J5/08 ,  G01J5/0806 ,  G01J5/0809 ,  G01J5/085 ,  G02B27/32

Abstract: Method of and apparatus for measuring thermal radiation geometric configuration factors - any such factor being that fraction of the total radiant energy emitted from an energyradiating surface which is incident on an energy-receiving surface. The method includes the steps of forming an image of the projected area of an energy-radiating surface at a selected location along an energy-receiving surface, making a photographic reproduction of such image, repeating the image-forming and image-reproduction steps at a plurality of selected locations along such energy-receiving surface, providing a configuration factor grid for subdividing any such image into weighted areas equivalent to known thermal radiation geometric configuration factors, and inspecting each photographic reproduction with such grid to measure the area of the image thereon in terms of its radiation configuration factor, thereby enabling all such factors to be averaged to derive a value for the entire energy-receiving surface. The apparatus includes an image-forming assembly comprising primary and secondary mirrors of hemispherical configuration for collecting and forming an image of the energyradiating surface as the area thereof is projected onto the primary mirror, and further comprising an intermediate optical system for receiving such formed image as redirected thereto by the secondary mirror and for transmitting to and focusing such image at an image plane for photographic reproduction.

Abstract translation: 用于测量热辐射几何构造因子的方法和装置 - 任何这样的因素是从入射在能量接收表面上的能量辐射表面发射的总辐射能的一部分。

公开(公告)号：US3799680A

公开(公告)日：1974-03-26

申请号：US21458772

申请日：1972-01-03

Applicant: KOLLMORGEN CORP

Inventor： WEISNER R

IPC: G01J1/04 ,  G01J1/42

CPC classification number: G01J1/04 ,  G01J1/0271 ,  G01J1/0411 ,  G01J1/0414 ,  G01J1/0437 ,  G01J1/0455 ,  G01J1/42

Abstract: An optical instrument including means for selecting one of several magnifications of an image being viewed, the selective magnification means being positioned in a collimated light path between an objective lens and a viewing lens and without change of conjugate distances therebetween; also an aperture stop located at one conjugate plane of a relay lens, the other conjugate plane being the nodal plane of the objective lens, which serves as a light-attenuating means without interference with the viewing optical system or without affecting the field being measured.

Abstract translation: 一种光学仪器，包括用于选择正在观看的图像的几个放大倍数中的一个的装置，所述选择性放大装置被定位在物镜和观察透镜之间的准直光路中，并且不改变其间的共轭距离; 位于中继透镜的一个共轭平面处的孔径光阑，另一个共轭平面是物镜的节点平面，用作光衰减装置，而不会影响观察光学系统或不影响被测场。

公开(公告)号：US3775620A

公开(公告)日：1973-11-27

申请号：US3775620D

申请日：1972-08-24

Applicant: MC DONNELL DOUGLAS CORP

Inventor： MEIER R

IPC: G01J1/08 ,  G01T1/16

CPC classification number: G01J1/08 ,  G01J1/0414 ,  G01J1/0455 ,  G01J5/522

Abstract: Advanced sensor evaluation and test apparatus comprises a vacuum chamber with an inner cryoshroud, housing an on-axis optical parabolic collimator, a radiant energy source assembly having an output aperture located in the focal plane of the collimator, a calibration monitor consisting of a Cassegrainian type radiometer that occupies one portion of the collimated radiant energy beam and which forms an image of the source on a bolometer, and a pair of scanning mirrors directing energy from another portion of the collimated beam into the entrance aperture of the optical sensor under test. In addition, a background radiant energy generator can direct radiant energy simulating elevated radiation background to the sensor under test which, in turn, forms an enlarged image of the background source in its own detector plane. One version of the source assembly includes at least one blackbody radiation source of variable aperture and temperature with a chopper operating to provide modulated radiation which is projected into an integrating sphere coupled with a source projector. An adjustable dual reflector with one specularly and one diffusely reflecting surface is mounted inside the integrating sphere and can be rotated to predetermined orientations to function in either a specularly reflecting mode or diffusely reflecting mode. In a third mode of operation, the mirror is rotated into an inactive orientation in which it does not intercept the beam entering the integrating sphere. This is the integrating sphere mode of operation. Another version of the source assembly includes at least one blackbody radiation source providing radiation to an integrating sphere coupled with a radiation guide (pipe). The radiation guide can be either a single or dual guide (pipe) and is cooperatively structured to operate with selected transmission patterns (transparent portions) on a movable disc sector positioned at the end of the guide.

Abstract translation: 高级传感器评估和测试装置包括具有内部冷冻导管的真空室，容纳轴上光学抛物线准直仪，辐射能源组件，其具有位于准直仪焦点平面中的输出孔;由Cassegrainian型 辐射计占据准直辐射能量束的一部分并且在测辐射热计上形成光源的图像;以及一对扫描镜，其将来自准直光束的另一部分的能量引导到被测光学传感器的入射孔。 此外，背景辐射能发生器可以将辐射能量模拟到被测传感器的辐射能量，这又反过来在其自身检测器平面中形成背景光源的放大图像。 源组件的一个版本包括具有可变孔径和温度的至少一个黑体辐射源，其中斩波器操作以提供调制的辐射，其被投影到与源投影仪耦合的积分球中。 具有一个镜面和一个漫反射表面的可调双反射器安装在积分球内部，并且可以旋转到预定取向以在镜面反射模式或漫反射模式中起作用。 在第三种操作模式中，反射镜被转动成不活动的方向，其中它不会拦截进入积分球的光束。 这是集成球的操作模式。 源组件的另一版本包括至少一个黑体辐射源，其向与辐射导管（管）耦合的积分球提供辐射。 辐射引导件可以是单引导件或双引导件（管），并且协同地构造成在位于引导件的端部的可移动的盘扇区上与选定的传输图案（透明部分）一起操作。