中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

138 records (took 0.024 seconds)

    DEFECT INSPECTION METHOD AND DEVICE FOR SAME
    72.
    发明申请
    DEFECT INSPECTION METHOD AND DEVICE FOR SAME 审中-公开
    缺陷检查方法及其设备

    公开(公告)号：US20160109382A1

    公开(公告)日：2016-04-21

    申请号：US14978372

    申请日：2015-12-22

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Toshifumi Honda ,  Yuta Urano ,  Hisashi Hatano

    IPC: G01N21/95 ,  G01N21/956 ,  G01N21/88

    CPC classification number: G01N21/9501 ,  G01N21/8851 ,  G01N21/956 ,  G01N2201/06

    Abstract: In defect scanning carried out in a process of manufacturing a semiconductor or the like, a light detection optical system comprising a plurality of photosensors is used for detecting scattered light reflected from a sample. The photosensors used for detecting the quantity of weak background scattered light include a photon counting type photosensor having few pixels whereas the photosensors used for detecting the quantity of strong background scattered light include a photon counting type photosensor having many pixels or an analog photosensor. In addition, nonlinearity caused by the use of the photon counting type photosensor as nonlinearity of detection strength of defect scattered light is corrected in order to correct a detection signal of the defect scattered light.

    Abstract translation: 在制造半导体等的过程中进行的缺陷扫描中，使用包含多个光电传感器的光检测光学系统来检测从样品反射的散射光。 用于检测弱背景散射光量的光传感器包括具有少量像素的光子计数型光电传感器，而用于检测强背景散射光量的光电传感器包括具有许多像素的光子计数型光电传感器或模拟光电传感器。 此外，为了校正缺陷散射光的检测信号，对使用光子计数型光电传感器作为非线性的缺陷散射光的检测强度引起的非线性进行了修正。

    SYSTEMS AND METHODS FOR MONITORING CHEMICAL PROCESSES
    73.
    发明申请
    SYSTEMS AND METHODS FOR MONITORING CHEMICAL PROCESSES 有权
    用于监测化学过程的系统和方法

    公开(公告)号：US20150293013A1

    公开(公告)日：2015-10-15

    申请号：US14726806

    申请日：2015-06-01

    Applicant: Halliburton Energy Services, Inc.

    Inventor： Ola Tunheim ,  Robert P. Freese ,  Alexis Wachtel ,  James Robert MacLennan

    IPC: G01N21/27

    CPC classification number: G01N21/272 ,  G01N21/31 ,  G01N21/75 ,  G01N2021/755 ,  G01N2021/757 ,  G01N2201/06

    Abstract: A method of monitoring a fluid includes containing the fluid within a flow path, the fluid having a chemical reaction occurring therein. At least one integrated computational element is optically interacted with the fluid, thereby generating optically interacted light. An output signal is then produced based on the optically interacted light that corresponds to a characteristic of the chemical reaction.

    Abstract translation: 监测流体的方法包括在流动路径内容纳流体，其中发生化学反应的流体。 至少一个集成的计算元件与流体光学相互作用，从而产生光学相互作用的光。 然后基于对应于化学反应的特性的光学相互作用的光产生输出信号。

    Uniform epi-illumination of planar samples
    75.
    发明授权
    Uniform epi-illumination of planar samples 有权
    平面样品的均匀外照射

    公开(公告)号：US08985808B2

    公开(公告)日：2015-03-24

    申请号：US13740590

    申请日：2013-01-14

    Applicant: Bio-Rad Laboratories, Inc.

    Inventor： James W. Hillendahl ,  Evelio Perez

    IPC: F21S4/00 ,  F21V21/005 ,  F21V9/08 ,  F21V13/02 ,  G01N21/64

    CPC classification number: F21V21/005 ,  F21V9/083 ,  F21V13/02 ,  G01N21/255 ,  G01N21/6452 ,  G01N21/6456 ,  G01N27/447 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2201/06 ,  G01N2201/0626 ,  G01N2201/0635

    Abstract: A planar sample, particularly of the type used in biological laboratories for detection and sometimes analysis of two-dimensional arrays of proteins, nucleic acids, or other biological species, is illuminated by epi-illumination using optically filtered line lights that are arranged along opposing parallel sides of a rectangle in which the sample array resides, with two coaxial line lights on each side of the rectangle, and the two on any given side being separated by a gap whose optimal width depends on the wavelength band transmitted by the optical filter. Surprisingly, the gap eliminates the peak in intensity at the center of the sample area and the decrease that occurs from the center outward that would otherwise occur with a single continuous filtered line light, producing instead a substantially uniform intensity along the direction parallel to the line lights.

    Abstract translation: 平面样品，特别是用于生物实验室中用于检测和有时分析蛋白质，核酸或其他生物物种的二维阵列的类型的样品，通过使用沿着相对的平行排列的光学滤波的线光照射外照射 样品阵列所在的矩形的边，在矩形的每一侧上具有两根同轴线灯，并且任意给定侧上的两根被间隔开，该间隙的最佳宽度取决于由滤光器传输的波长带。 令人惊奇的是，间隙消除了样品区域中心处的强度峰值以及从中心向外发生的减少，否则会出现与单个连续过滤线条光线相反的方向，沿着平行于该线条的方向产生基本均匀的强度 灯光

    OPTICAL SAMPLE DETECTION SYSTEM AND SAMPLE ANALYSIS DEVICE
    76.
    发明申请
    OPTICAL SAMPLE DETECTION SYSTEM AND SAMPLE ANALYSIS DEVICE 有权
    光学样本检测系统和样品分析装置

    公开(公告)号：US20110255086A1

    公开(公告)日：2011-10-20

    申请号：US13085343

    申请日：2011-04-12

    Applicant: Yang Zhou ,  Zefei Jiang ,  Jinhong Qiu

    Inventor： Yang Zhou ,  Zefei Jiang ,  Jinhong Qiu

    IPC: G01J3/28

    CPC classification number: G01N21/01 ,  G01N21/31 ,  G01N2201/06 ,  G01N2201/0642

    Abstract: An optical sample detection system is provided, including a light source; a convergence projection component for converging light rays emitted by the light source; a sample accommodation component for accommodating a detected sample; a light beam collection component for receiving light rays carrying sample characteristic information and transmitted from the sample accommodation component; a light splitting component for splitting polychromatic lights collected by the light beam collection component into independent spectrums or spectral bands; and a photoelectric detection component for receiving optical signals of different wavelengths separated through the light splitting component.

    Abstract translation: 提供了一种光学样本检测系统，包括光源; 用于会聚由光源发射的光线的会聚投影部件; 用于容纳检测到的样本的样本容纳部件; 光束采集部件，用于接收携带样品特征信息并从样品容纳部件传输的光线; 用于将由光束收集部件收集的多色光分解成独立光谱或光谱带的光分离部件; 以及用于接收通过分光部件分离的不同波长的光信号的光电检测部件。

    Inspection device for objects with a spherical surface
    77.
    发明申请
    Inspection device for objects with a spherical surface 有权
    具有球形表面的物体的检查装置

    公开(公告)号：US20070030669A1

    公开(公告)日：2007-02-08

    申请号：US10577286

    申请日：2004-09-21

    Applicant: Robert Van Soest

    Inventor： Robert Van Soest

    IPC: F21V33/00

    CPC classification number: G01N33/025 ,  G01N21/8806 ,  G01N21/951 ,  G01N33/08 ,  G01N2201/06 ,  G01N2201/06126

    Abstract: A device (1) for inspecting objects with a substantially spherical surface, such as for example eggs or fruit, comprises optical observation means (8) for observing the objects. The device has a supporting surface (10) for supporting the objects. There is a light source for illuminating the objects. The device also comprises a box (2) with reflective walls (3a, 4b and 4a shown) which is positioned above the supporting surface (11). The light source and the observation means (8) are accommodated in the box (2). A plurality of objects can be placed next to one another on the supporting surface (10) and can be illuminated equally well.

    Abstract translation: 用于检查具有基本上球形表面的物体（例如蛋或水果）的装置（1）包括用于观察物体的光学观察装置（8）。 该装置具有用于支撑物体的支撑表面（10）。 有一个照明物体的光源。 该装置还包括一个位于支撑表面（11）上方的反射壁（3a，4b和4a）的盒子（2）。 光源和观察装置（8）容纳在盒（2）中。 多个物体可以彼此相邻地放置在支撑表面（10）上并且可以被均匀地照明。

    Sensor for measuring physical parameters of concentration of particles
    78.
    发明授权
    Sensor for measuring physical parameters of concentration of particles 失效
    用于测量颗粒浓度物理参数的传感器

    公开(公告)号：US4889690A

    公开(公告)日：1989-12-26

    申请号：US51252

    申请日：1987-05-07

    Applicant: Norbert Opitz ,  Dietrich W. Lubbers

    Inventor： Norbert Opitz ,  Dietrich W. Lubbers

    IPC: G01N21/64 ,  G01N21/77

    CPC classification number: G01N21/643 ,  G01N2021/6434 ,  G01N21/77 ,  G01N2201/06

    Abstract: A sensing arrangement for measuring physical parameters or concentration of particles is assembled of a laminar source of luminescent radiation. Fluorescent indicating particles are arranged in an indicator layer adjoining one major side of the laminar light source. The indicator layer adjoins a measuring space containing the object of measurement whose particles enter the indicator layer by diffusion. Fluorescent indicating particles are arranged in the indicator layer to emit fluorescent light when illuminated by the laminar light source. Photoelectric receiver is adjacent the opposite side of the laminar light source to measure the intensity of the fluorescent radiation. In a modification, luminescent phosphors and fluorescent particles are arranged in a common matrix.

    Abstract translation: 用于测量物理参数或颗粒浓度的感测装置由发光辐射的层流源组装。 荧光指示颗粒布置在与层状光源的一个主侧相邻的指示剂层中。 指示层与包含测量对象的测量空间相邻，测量对象的粒子通过扩散进入指示层。 荧光指示颗粒被布置在指示剂层中，以在被层状光源照射时发出荧光。 光电接收器邻近层状光源的相对侧，以测量荧光辐射的强度。 在一个修改中，发光荧光体和荧光颗粒被布置在共同的基质中。

Patent Agency Ranking