MULTI-FOCAL-PLANE SCANNING USING TIME DELAY INTEGRATION IMAGING

    公开(公告)号:US20240044863A1

    公开(公告)日:2024-02-08

    申请号:US18365867

    申请日:2023-08-04

    CPC classification number: G01N33/4833 G01N21/17 G01N2021/1787 G01N2201/1087

    Abstract: An imaging system for capturing spatial images of biological tissue samples may include an imaging chamber configured to hold a biological tissue sample placed in the imaging system; a light source configured to illuminate the biological tissue sample to activate one or more fluorophores in the biological tissue sample; a Time Delay and Integration (TDI) imager comprising a plurality of partitions, where the plurality of partitions may be configured to capture images at a plurality of different depths in the biological tissue sample simultaneously during a scan by the TDI imager; and a controller configured to cause the TDI imager to scan the biological tissue sample.

    MEASURING INSTRUMENT USING LIGHT BEAM
    75.
    发明申请
    MEASURING INSTRUMENT USING LIGHT BEAM 有权
    使用光束测量仪器

    公开(公告)号:US20150355016A1

    公开(公告)日:2015-12-10

    申请号:US14730762

    申请日:2015-06-04

    Applicant: SAMCO INC.

    Abstract: The present invention provides a light beam measuring instrument that can securely receive light reflected by a sample. The light beam measuring instrument 1 includes an optical axis tilting mechanism 13 that includes a first tilting mechanism 131 and a second tilting mechanism 132. From the optical axis A1 of irradiation light beam emitted from a light beam source 112, the first tilting mechanism 131 tilts the optical axis A1 about the first tilting axis T1. The second tilting mechanism 132 tilts the optical axis A1 about the second tilting axis T2. The light beam measuring instrument 1 can receive the light reflected by the semiconductor chip C by means of operation of the optical axis tilting mechanism 13 even if the light reflected by the semiconductor chip C is tilted. Accordingly, this apparatus can securely perform measurement or inspection using the light beam.

    Abstract translation: 本发明提供了一种可以安全地接收由样品反射的光的光束测量仪器。 光束测量仪1包括光轴倾斜机构13,其包括第一倾斜机构131和第二倾斜机构132.从光束源112发射的照射光束的光轴A1,第一倾斜机构131倾斜 围绕第一倾斜轴线T1的光轴A1。 第二倾斜机构132围绕第二倾斜轴T2倾斜光轴A1。 即使由半导体芯片C反射的光倾斜,光束测量仪器1也可以通过光轴倾斜机构13的操作来接收由半导体芯片C反射的光。 因此,该装置可以可靠地执行使用光束的测量或检查。

    DEVICE AND METHODS OF DETECTION OF AIRBORNE AGENTS
    78.
    发明申请
    DEVICE AND METHODS OF DETECTION OF AIRBORNE AGENTS 有权
    检测飞机代理的装置和方法

    公开(公告)号:US20120148451A1

    公开(公告)日:2012-06-14

    申请号:US13217616

    申请日:2011-08-25

    Abstract: Provided are methods, devices and systems that utilize free-surface fluidics and SERS for analyte detection with high sensitivity and specificity. The molecules can be airborne agents, including but not limited to explosives, narcotics, hazardous chemicals, or other chemical species. The free-surface fluidic architecture is created using an open microchannel, and exhibits a large surface to volume ratio. The free-surface fluidic interface can filter interferent molecules, while concentrating airborne analyte molecules. The microchannel flow enables controlled aggregation of SERS-active probe particles in the flow, thereby enhancing the detector's sensitivity.

    Abstract translation: 提供了利用自由表面流体学和SERS用于具有高灵敏度和特异性的分析物检测的方法,装置和系统。 分子可以是空气传播剂,包括但不限于爆炸物,麻醉剂,危险化学品或其他化学物质。 自由表面流体结构使用开放的微通道产生,并且表现出大的表面与体积比。 自由表面流体界面可以过滤干扰分子,同时浓缩空气中的分析物。 微通道流动使SERS活性探针颗粒在流动中受控聚集,从而提高检测器的灵敏度。

    Apparatus and method for inspecting a substrate
    80.
    发明申请
    Apparatus and method for inspecting a substrate 有权
    用于检查基板的装置和方法

    公开(公告)号:US20040086171A1

    公开(公告)日:2004-05-06

    申请号:US10661633

    申请日:2003-09-15

    Abstract: An automated and integrated substrate inspecting apparatus for performing an EBR/EEW inspection, a defect inspection of patterns and reticle error inspection of a substrate includes a first stage for supporting a substrate; a first image acquisition unit for acquiring a first image of a peripheral portion of the substrate supported by the first stage; a second stage for supporting the substrate; a second image acquisition unit for acquiring a second image of the substrate supported by the second stage; a transfer robot for transferring the substrate between the first stage and the second stage; and a data processing unit, connected to the first image acquisition unit and the second image acquisition unit, for inspecting results of an edge bead removal process and an edge exposure process performed on the substrate using the first image, and for inspecting for defects of patterns formed on the substrate using the second image.

    Abstract translation: 用于执行EBR / EEW检查的自动化和一体化的基板检查装置,对基板的图案和掩模版错误检查的缺陷检查包括用于支撑基板的第一阶段; 第一图像获取单元,用于获取由所述第一平台支撑的所述基板的周边部分的第一图像; 用于支撑衬底的第二阶段; 第二图像获取单元,用于获取由第二平台支撑的基板的第二图像; 用于在第一阶段和第二阶段之间转移衬底的传送机器人; 以及数据处理单元,连接到第一图像获取单元和第二图像获取单元,用于检查使用第一图像在基板上执行的边缘珠去除处理和边缘曝光处理的结果,并且用于检查图案的缺陷 使用第二图像在基板上形成。

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