公开(公告)号：US06972406B2

公开(公告)日：2005-12-06

申请号：US10503516

申请日：2003-01-27

Applicant: Richard Syms

Inventor： Richard Syms

IPC: H01J49/10 ,  H01J49/00

CPC classification number: H01J49/147 ,  H01J49/0018 ,  H01J49/08 ,  H01J49/4215

Abstract: A method of fabricating miniature quadrupole electrostatic mass filter has been previously described. The electrodes are metallised cylinders, mounted in grooves etched in oxidised silicon substrates, which are held apart at the correct spacing by cylindrical spacer rods. This invention concerns an ion source mounted on extensions of the spacer rods, which project beyond the mass filter. The ion source consists of a cold-cathode electron emitter, which emits electrons with energies sufficient to cause impact ionisation, and electrostatic optics suitable for coupling the ion flux into the mass filter. Methods of constructing a single self-aligned electron source and a similar dual source are described. Arrangements for mounting the electron source and the ion coupling lens so that the electron and ion beams travel at right angles to one another for efficient separation are described. A method of fabricating a self-aligned one-dimensional einzel electrostatic lens from metallised cylinders mounted in the silicon substrates using etched grooves is described. A method of fabricating a-self-aligned two-dimensional einzel lens from metal plates is also described.

Abstract translation: 以前已经描述了制造微型四极静电质量过滤器的方法。 电极是金属化的气缸，安装在蚀刻在氧化硅衬底中的槽中，它们通过圆柱形间隔棒以正确的间隔分开。 本发明涉及一种安装在间隔棒的延伸部上的离子源，其突出超过质量过滤器。 离子源由冷阴极电子发射器组成，其发射能量足以引起冲击电离的电子，以及适于将离子通量耦合到质量过滤器中的静电光学器件。 描述了构建单个自对准电子源和类似双源的方法。 描述了用于安装电子源和离子耦合透镜以使电子和离子束彼此成直角行进以进行有效分离的布置。 描述了使用蚀刻槽从安装在硅衬底中的金属化气缸制造自对准的一维立体静电透镜的方法。 还描述了从金属板制造自对准二维单面透镜的方法。

公开(公告)号：US06545269B1

公开(公告)日：2003-04-08

申请号：US09550171

申请日：2000-04-14

Applicant: Didier Pierrejean ,  Bruno Galland

Inventor： Didier Pierrejean ,  Bruno Galland

IPC: H01J4900

CPC classification number: H01J27/04 ,  H01J43/246 ,  H01J49/08 ,  H01J49/147

Abstract: In accordance with the invention, the ion source of a time-of-flight mass spectrometer includes an electron gun having an electron source and at least one electrode for conditioning the flow of electrons, followed by at least one microchannel wafer for generating a pulsed secondary electron beam containing a greater number of electrons from a pulsed primary electron beam. The secondary electron beam enters a gas ionization area of an ion gun which produces a flow of ions which is then passed through the flight tube in order to be analyzed by an ion detector. This provides a high-performance ion source which is compact, sensitive and easy to integrate.

Abstract translation: 根据本发明，飞行时间质谱仪的离子源包括具有电子源的电子枪和用于调节电子流的至少一个电极，随后是用于产生脉冲次级的至少一个微通道晶片 电子束包含来自脉冲一次电子束的更多数量的电子。 二次电子束进入离子枪的气体离子化区域，其产生离子流，然后将其流过飞行管，以便通过离子检测器进行分析。 这提供了一种高性能的离子源，它是紧凑，灵敏和容易集成的。

公开(公告)号：US4752685A

公开(公告)日：1988-06-21

申请号：US871739

申请日：1986-06-09

Applicant: Yoshiro Shiokawa ,  Kiyoshi Hoshino

Inventor： Yoshiro Shiokawa ,  Kiyoshi Hoshino

IPC: G01Q60/04 ,  H01J37/252 ,  H01J49/08 ,  H01J49/48

CPC classification number: H01J49/482 ,  H01J37/252 ,  H01J49/08

Abstract: A photoelectron spectrometer includes a target, an electron gun, a crystal plate, a spectrum-analyzer and a detector. The target and the sample to be inspected are aligned with a reference line. The electron gun is positioned on the coaxially line with respect to the reference axis. The crystal plate is arranged in a circular region with respect to the reference axis, so that X-ray beams emitted from the target are omnidirectionally irradiated to the sample surface in an electron shower form. The sensitivity of the photoelectron spectrometer is increased.

Abstract translation: 光电子能谱仪包括靶，电子枪，晶体板，光谱分析仪和检测器。 要检查的目标和样品与参考线对齐。 电子枪相对于参考轴线位于同轴线上。 晶体板相对于基准轴配置在圆形区域，使从靶射出的X射线束以电子喷淋状态全方位照射到样品表面。 光电子能谱仪的灵敏度提高。

公开(公告)号：US4639597A

公开(公告)日：1987-01-27

申请号：US663855

申请日：1984-10-23

Applicant: Yoshiro Shiokawa

Inventor： Yoshiro Shiokawa

IPC: G01N23/227 ,  H01J37/10 ,  H01J37/143 ,  H01J37/145 ,  H01J37/252 ,  H01J49/08 ,  H01J49/48

CPC classification number: H01J37/252 ,  H01J49/08 ,  H01J49/482

Abstract: In an Auger electron spectrometer for use in analyzing a surface of an object by the use of Auger electrons resulting from impingement of an electron beam, an electron gun comprises an electron beam source for generating the electron beam and an electron lens system for guiding the electron beam towards the surface. The electron lens system comprises a combination of a condenser lens and a permanent magnet member nearer to the surface than the condenser lens. The permanent magnet member may comprise either a plurality of permanent magnet pieces radially and azimuthally spaced apart from one another or a single permanent magnet piece. An ion gun may be disposed in the vicinity of the electron gun to generate an ion beam oblique to the electron beam and substantially concurrent with the electron beam on the surface. Magnetic pole pieces may be attached to each permanent magnet piece and bypassed to control a magnetic field generated by each permanent magnet piece. Each permanent magnet piece may be coated with a combination of a nonmagnetic film and a magnetic film. Anyway, the electron gun can be disposed in an inner cylindrical space of an inner cylindrical electrode member when the electron spectrometer is of a cylindrical mirror type.

Abstract translation: 在用于通过使用由电子束撞击产生的俄歇电子来分析物体表面的俄歇电子能谱仪中，电子枪包括用于产生电子束的电子束源和用于引导电子的电子透镜系统 朝向表面。 电子透镜系统包括聚光透镜和比聚光透镜更靠近表面的永磁体构件的组合。 永磁体构件可以包括彼此径向和方位间隔开的多个永磁体片或单个永磁体片。 离子枪可以设置在电子枪的附近，以产生与电子束倾斜的离子束，并且基本上与表面上的电子束同时存在。 磁极片可以附接到每个永磁体片上并被旁路以控制由每个永磁体片产生的磁场。 每个永磁体片可以涂覆有非磁性膜和磁性膜的组合。 无论如何，当电子光谱仪是圆柱形反射镜类型时，电子枪可以设置在内圆柱形电极部件的内圆柱形空间中。

公开(公告)号：US4476392A

公开(公告)日：1984-10-09

申请号：US334489

申请日：1981-12-28

Applicant: Robert A. Young

Inventor： Robert A. Young

IPC: H01J49/08 ,  H01J27/20 ,  H01J27/24 ,  H01J49/10 ,  H01J49/14

CPC classification number: H01J49/08

Abstract: An ionization source is disclosed for use with mass spectrometers and electron capture species detectors having an ionization light source excited so as to illuminate a fluid sample which flows past the light source whereby electrons are photoelectrically generated by a light source. Means are also provided to accelerate the photoelectrons and to extract heavy ions generated by the accelerated photoelectrons from the fluid sample. Further means are provided to focus the extracted heavy ions so that they may be detected. Also included is a means to maintain a vacuum between the light source and the sample and the detector.

Abstract translation: 公开了用于质谱仪和电子捕获物质检测器的电离源，其具有激发的电离光源，以便照射流过光源的流体样品，由此电子由光源光电产生。 还提供了用于加速光电子并从流体样品中提取由加速光电子产生的重离子的方法。 提供了进一步的手段来聚焦提取的重离子，使得它们可以被检测。 还包括在光源和样品与检测器之间保持真空的方法。

公开(公告)号：WO2014028695A1

公开(公告)日：2014-02-20

申请号：PCT/US2013/055067

申请日：2013-08-15

Applicant: THE STATE OF OREGON ACTING BY AND THROUGH THE STATE BOARD OF HIGHER EDUCATION ON BEHALF OF OREGON STATE UNIVERSITY

Inventor： BAROFSKY, Douglas, F. ,  VOINOV, Valery, G.

IPC: H01J49/08 ,  H01J49/26

CPC classification number: H01J49/147 ,  H01J49/0054 ,  H01J49/062 ,  H01J49/08 ,  H01J49/26

Abstract: An electron source for electron-induced dissociation in an RF-free electromagnetostatic cell for use installation in a tandem mass spectrometer is provided. An electromagnetostatic electron-induced dissociation cell may include at least one magnet having an opening disposed therein and having a longitudinal axis extending through the opening, the magnet having magnetic flux lines associated therewith, and an electron emitter having an electron emissive surface comprising a sheet, the emitter disposed about the axis at a location relative to the magnet where the electron emissive surface is substantially perpendicular to the magnetic flux lines at the electron emissive surface.

Abstract translation: 提供了一种用于无串联电磁静电电池中电子诱导解离的电子源，用于串联质谱仪中的安装。 电磁静电电子诱导解离单元可以包括至少一个具有设置在其中的开口的磁体，并且具有延伸穿过该开口的纵向轴线，该磁体具有与之相关联的磁通线，以及具有包括片材的电子发射表面的电子发射体， 所述发射极围绕所述轴设置在相对于所述磁体的位置处，其中所述电子发射表面基本上垂直于所述电子发射表面处的磁通线。

公开(公告)号：WO2013075203A1

公开(公告)日：2013-05-30

申请号：PCT/CA2011/001300

申请日：2011-11-24

Applicant: AL MOUSSALAMI, Samir

Inventor： AL MOUSSALAMI, Samir

IPC: H01J49/08

CPC classification number: H01J49/08 ,  B82Y15/00 ,  H01J3/021 ,  H01J2237/082

Abstract: The present relates to a high brightness electron gun for mass spectrometry and spectroscopy. The electron gun comprises a nano emission ionization (NEI) electron source, an electrostatic lens system and a control system. The nano emission ionization (NEI) electron source comprises a cathode having a substrate on which are mounted nano-components and an anode. The control system controls the high brightness electron gun, the beam regime and the beam physical proprieties.

Abstract translation: 本发明涉及用于质谱和光谱学的高亮度电子枪。 电子枪包括纳米发射电离（NEI）电子源，静电透镜系统和控制系统。 纳米发射电离（NEI）电子源包括具有衬底的阴极，其上安装有纳米组分和阳极。 控制系统控制高亮度电子枪，光束状态和光束物理特性。

公开(公告)号：WO2013042830A1

公开(公告)日：2013-03-28

申请号：PCT/KR2011/009749

申请日：2011-12-16

Applicant: 한국기초과학지원연구원 ,  양모 ,  김승용 ,  김현식

Inventor： 양모 ,  김승용 ,  김현식

IPC: H01J49/26 ,  G01N27/62

CPC classification number: H01J49/10 ,  H01J49/0022 ,  H01J49/08 ,  H01J49/424

Abstract: 본 발명은 자외선 다이오드와 CEM모듈을 이용한 질량분석기의 이온화원 획득장치에 관한 것으로, CEM모듈을 사용하되 자외선 다이오드에서 방출하는 자외선 광자를 CEM모듈 입구에 조사하여 초기 전자방출을 유도함으로서, 출구에는 증폭된 대량의 전자빔을 획득하고, 저온 저전력으로 방출시간이 정확히 조절되는 전자빔을 생산하도록 하는데 그 목적이 있다. 본 발명은 자외선 다이오드와 CEM모듈을 이용한 질량분석기의 이온화원 획득장치에 있어서, 공급된 전원에 의해 자외선을 방출하는 자외선 다이오드; 자외선 다이오드로부터 자외선 광자들의 초기 전자방출을 유도 및 증폭하여 출구에서 대량 전자빔을 획득하는 전자증배관; 전자증배관을 통해 증폭된 전자빔을 집적하는 전자 집적렌즈; 전자 집적렌즈를 통해 주입된 전자빔에 의해 기체시료 분자들을 이온화하는 이온트랩 질량분리기; 및 상기 이온트랩 질량분리기로부터 분리된 이온을 질량스펙트럼에 의해 검출하는 이온검출기;를 포함하여 이루어지되, 전자증배관은 CEM모듈인 것을 특징으로 한다.

Abstract translation: 本发明涉及一种使用紫外二极管和CEM模块获得质谱仪的离子源的装置，其目的是使用CEM模块诱发初始电子发射，并将从紫外线二极管发射的紫外光子辐射到入口 的CEM模块，以从出口获得大量的放大电子束，并产生其发射时间在低温和低功率下精确控制的电子束。 本发明的特征在于一种用于使用紫外二极管和CEM模块获得质谱仪的离子源的装置，该装置基本上由以下部分组成：紫外线二极管，通过供电供给紫外线; 电子倍增器，从紫外二极管感应并放大紫外光子的初始电子发射，并从出口获得大量的电子束; 电子聚光透镜，聚合由电子倍增器放大的电子束; 离子阱质量分离器通过电子聚焦透镜注入的电子束离子化气体样品分子; 以及离子检测器，通过质谱检测离子阱质量分离器分离的离子，其中电子倍增器是CEM模块。

公开(公告)号：WO2007070500A3

公开(公告)日：2008-04-17

申请号：PCT/US2006047342

申请日：2006-12-12

Applicant: VARIAN INC ,  WELLS GREGORY J ,  MARQUETTE EDWARD G

Inventor： WELLS GREGORY J ,  MARQUETTE EDWARD G

IPC: H01J49/14 ,  H01J3/02 ,  H01J49/08

CPC classification number: H01J49/14 ,  H01J3/024 ,  H01J49/08

Abstract: An electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a guard electrode interposed between and electrically isolated from the first electrode and the second electrode. The thermionic element and the guard electrode may be at substantially the same voltage. Another electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a thermal expansion component interposed between and electrically isolated from the first electrode and the second electrode. The thermal expansion component may be heated to cause expansion. The heating may be cycled to cause alternating expansion and contraction.

Abstract translation: 电子源包括插入在第一电极和第二电极之间并且与第一电极和第二电极电绝缘的第一电极，第二电极和热电离元件，以及插入在第一电极和第二电极之间并与之电隔离的保护电极。 热离子元件和保护电极可以处于基本上相同的电压。 另一个电子源包括介于第一电极和第二电极之间并与之电绝缘的第一电极，第二电极和热电离元件，以及介于第一电极和第二电极之间并与之电隔离的热膨胀组件。 热膨胀部件可能被加热以引起膨胀。 可以循环加热以引起交替的膨胀和收缩。

公开(公告)号：WO2007014019A3

公开(公告)日：2007-11-01

申请号：PCT/US2006028339

申请日：2006-07-20

Applicant: UNIV NORTH DAKOTA ,  SWENSON ORVEN F ,  HONG FENG

Inventor： SWENSON ORVEN F ,  HONG FENG

IPC: H01J49/40 ,  H01J49/16

CPC classification number: H01J49/08 ,  G01N27/622

Abstract: A photoemissive ion mobility spectrometer is disclosed for of chlorinated hydrocarbons and nitro-organic materials. Backside illumination of a thin gold film by pulsed laser radiation, pulsed ultraviolet xenon flashlamp, or like UV source, is used to produce bursts of low energy photo-emitted electrons. These swarms of thermalized electrons are directly attached by electronegative analytes or by reactant molecules, followed by charge transfer to the more electronegative analyte. Total internal reflection is incorporated for the backside illumination using optical elements such as a fused silica prism. The spectrometer allows for the direct vaporization of adsorbed explosive molecules from surfaces followed by direct injection into the photoemissive ion mobility spectrometer through a heated inlet.

Abstract translation: 公开了一种用于氯代烃和硝基有机材料的光电离子迁移谱仪。 通过脉冲激光辐射，脉冲紫外氙闪光灯或类似紫外光源对薄金膜的背面照射用于产生低能量光发射电子脉冲。 这些热化电子群被电负性分析物或反应物分子直接连接，然后电荷转移到更负电的分析物上。 使用诸如熔融石英棱镜之类的光学元件为背面照明引入全内反射。 光谱仪允许从表面直接汽化吸附的爆炸分子，然后通过加热的入口直接注入光电离子迁移谱仪。