公开(公告)号：US4739159A

公开(公告)日：1988-04-19

申请号：US865858

申请日：1986-05-22

Applicant: Toshiyuki Inokuchi

Inventor： Toshiyuki Inokuchi

IPC: G02B27/00 ,  G02B27/18 ,  G06T1/00 ,  H04N1/028 ,  H04N1/031 ,  H04N1/19 ,  H01J3/16

CPC classification number: H04N1/0315 ,  H04N1/0311

Abstract: A document readout device reads out a document by forming an image of a linear area of the document on an unmagnification sensor through an image-forming optical system. The document readout device has a roof mirror array, a lens array, an optical-path separator, one or two mirror members, a housing, an unmagnification sensor, and one or two line illuminating devices. The housing has a pair of slits, one of which is covered by the unmagnification sensor, with the other slit being positioned for introducing light into the housing. The roof mirror array, the lens array, the optical-path separator, and the mirror member or members are retained in the housing in certain mutual positional relationship. The unmagnification sensor and the line illuminating unit or units are integrally mounted on the housing. The roof mirror array, the lens array, and the optical-path separator jointly constitute the image-forming optical system. An image-forming light ray from the image-forming optical system is guided by the mirror member or members toward the unmagnification sensor.

Abstract translation: 文件读出装置通过图像形成光学系统在非放大传感器上形成文件的线性区域的图像来读出文件。 文件读出装置具有屋顶反射镜阵列，透镜阵列，光路分离器，一个或两个反射镜部件，壳体，非放大传感器以及一条或两条线照明装置。 壳体具有一对狭缝，其中一个狭缝被非放大传感器覆盖，另一个狭缝被定位成将光引入壳体。 屋顶反射镜阵列，透镜阵列，光路分离器和镜构件以特定的相互位置关系保持在壳体中。 该非静电传感器和线路照明单元一体地安装在壳体上。 屋顶反射镜阵列，透镜阵列和光路分离器共同构成图像形成光学系统。 来自图像形成光学系统的图像形成光线被反射镜部件朝向非放大传感器引导。

公开(公告)号：US4712002A

公开(公告)日：1987-12-08

申请号：US917332

申请日：1986-10-09

Applicant: Tuan-Kay Lim

Inventor： Tuan-Kay Lim

IPC: G03B27/54 ,  H04N1/028 ,  H01J3/16

CPC classification number: H04N1/0286 ,  G03B27/542 ,  H04N1/02815 ,  H04N1/02885

Abstract: An imaging system employing an apparatus for evenly illuminating objects to be scanned. The apparatus includes first and second elliptical cylindrical sections which comprise an elliptical cylindrical mirror having first and second focal lines. A linear-type lamp is located at the first focal line and the scanning line of the imaging system is located at the second focal line. First and second planar mirrors are positioned in parallel relationship to each other at the top and bottom of the scanning line, and a non-reflecting surface on the second elliptical cylindrical section combines with the first elliptical section to provide an even distribution of light at the scanning line. The optical axis of the imaging system passes between the first and second elliptical cylindrical sections.

Abstract translation: 一种使用用于均匀照射要扫描的物体的装置的成像系统。 该装置包括第一和第二椭圆柱形部分，其包括具有第一和第二焦线的椭圆柱形反射镜。 直线型灯位于第一焦线，成像系统的扫描线位于第二焦线。 第一和第二平面镜在扫描线的顶部和底部彼此平行地定位，并且第二椭圆柱形部分上的非反射表面与第一椭圆形部分组合以提供均匀的光分布 扫描线。 成像系统的光轴在第一和第二椭圆柱形部分之间通过。

公开(公告)号：US4568833A

公开(公告)日：1986-02-04

申请号：US740308

申请日：1985-06-03

Applicant: Bernardus J. G. M. Roelofs

Inventor： Bernardus J. G. M. Roelofs

IPC: H01J37/22 ,  H01J37/30 ,  H01J37/317 ,  H01L21/027 ,  H01J3/16 ,  H01J29/60 ,  H01J37/302

CPC classification number: H01J37/317 ,  H01J37/3007

Abstract: For forming an array or series of elementary beams of charged particles, a beam exposure device includes a mirror system having a matrix of sub-mirrors. Using such a composite mirror, a multiple beam image is formed in a location which deviates from the position of the cross-over of principal rays of the elementary beams. Consequently, the elementary beams, which may alternatively be ion beams, can be separated modulated and controlled. For suitable imaging, such as the writing of patterns for a micro-electronic circuit element, the images and the cross-over of the principal rays of the elementary beams are combined. For this purpose, use is made of a second mirror whose sub-mirrors have an optical effect which opposes that of the first mirror.

Abstract translation: 为了形成带电粒子的阵列或一系列基本束，束曝光装置包括具有子反射镜矩阵的反射镜系统。 使用这种复合反射镜，在偏离基本光束的主光线的交叉位置的位置处形成多光束图像。 因此，可以分离调制和控制基本光束，其也可以是离子束。 对于合适的成像，例如写入微电子电路元件的图案，组合基本光束的图像和主光线的交叉。 为此，使用第二反射镜，其副反射镜具有与第一反射镜相反的光学效果。

公开(公告)号：US4082417A

公开(公告)日：1978-04-04

申请号：US767282

申请日：1977-02-09

Applicant: Herbert Morrison Runciman ,  Peter John Berry

Inventor： Herbert Morrison Runciman ,  Peter John Berry

IPC: G02B5/09 ,  H04N3/09 ,  G02B27/17 ,  H01J3/16

CPC classification number: H04N3/09 ,  G02B5/09

Abstract: In a radiation scanning system, scanning is achieved by rotation of two drums about parallel axes. The first drum is rotated at an angular speed s.sub.1 and has n.sub.1 reflective surfaces at a distance r.sub.1 from a first axis of rotation. The second drum is rotated at an angular speed s.sub.2 and has n.sub.2 reflective surfaces at a distance r.sub.2 from a second axis of rotation. The axes are separated by a distance d. A detector is located a distance a from the first axis. The following conditions hold:2 a(n.sub.1 /n.sub.2 -1).sup.2 + 2 d(n.sub.1 /n.sub.2).sup.2 +r.sub.2 (n.sub.1 /n.sub.2).sup.2 =r.sub.1 (2n.sub.1 /n.sub.2 -1).sup.2 , (i)n.sub.1 s.sub.1 =n.sub.2 s.sub.2. (ii)

公开(公告)号：US3553468A

公开(公告)日：1971-01-05

申请号：US3553468D

申请日：1968-03-15

Applicant: RICHARDS & CO LTD GEORGE

Inventor： DENCH MICHAEL JOHN

IPC: G01D5/347 ,  G06K7/10 ,  H01J3/16 ,  H01J5/16

CPC classification number: G06K7/10831 ,  G01D5/34715

Abstract: This invention is a reading head having a number of photo cells for cooperating with an optical grating to give a position signal. Light for illuminating the grating is also used to illuminate a part of the cells displaced from the part where the grating image appears for setting up the cells in the position of minimum illumination.

公开(公告)号：US11501943B2

公开(公告)日：2022-11-15

申请号：US17253738

申请日：2019-07-09

Applicant: HIL Applied Medical, Ltd.

Inventor： Indranuj Dey ,  Evgeny Papeer ,  Alexander Bespaly ,  Shai Tsipshtein ,  Ynon Hefets ,  Assaf Shaham

IPC: H01J27/24 ,  G21K5/10 ,  H01J3/16 ,  H01J27/02

Abstract: Disclosed are systems and methods for generating a beam of charged particles, such as an ion beam. Such a system may comprise an interaction chamber configured to support a target, one or more electromagnetic radiation sources, a sensor, and at least one processor. The one or more electromagnetic radiation sources may be configured to provide a probe beam at a first energy for determining orientation data of the target and a particle-generating beam at a second energy, which is greater than the first energy, for producing a beam of charged particles. The processor may be configured to receive feedback information from the sensor and to cause a change in a relative orientation between the particle-generating beam and the target.

公开(公告)号：US08658984B2

公开(公告)日：2014-02-25

申请号：US13375187

申请日：2010-05-27

Applicant: Alexander A. Makarov ,  Anastassios Giannakopulos

Inventor： Alexander A. Makarov ,  Anastassios Giannakopulos

IPC: H01J3/16

CPC classification number: H01J49/40 ,  H01J49/406 ,  H01J49/4245

Abstract: A method of separating charged particles using an analyzer is provided, the method comprising: causing a beam of charged particles to fly through the analyzer and undergo within the analyzer at least one full oscillation in the direction of an analyzer axis (z) of the analyzer whilst orbiting about the axis (z) along a main flight path; constraining the arcuate divergence of the beam as it flies through the analyzer; and separating the charged particles according to their flight time. An analyzer for performing the method is also provided. At least one arcuate focusing lens is preferably used to constrain the divergence, which may comprise a pair of opposed electrodes located either side of the beam. An array of arcuate focusing lenses may be used which are located at substantially the same z coordinate, the arcuate focusing lenses in the array being spaced apart in the arcuate direction and the array extending at least partially around the z axis, thereby constraining the arcuate divergence of the beam a plurality of times as it flies through the analyzer.

Abstract translation: 提供了一种使用分析器分离带电粒子的方法，所述方法包括：使带电粒子束飞过分析器，并在分析器内沿分析器轴线（z）的方向进行至少一次全部振荡， 同时沿着主飞行路径围绕轴线（z）绕行驶; 约束梁在其穿过分析器时的弓形发散; 并根据飞行时间分离带电粒子。 还提供了用于执行该方法的分析器。 优选地使用至少一个弧形聚焦透镜来限制发散，其可以包括位于光束的任一侧的一对相对的电极。 可以使用位于基本上相同z坐标处的弧形聚焦透镜阵列，阵列中的弧形聚焦透镜在弧形方向上间隔开，并且阵列至少部分地围绕z轴延伸，从而约束弓形散度 的光束多次通过分析仪。

公开(公告)号：US08592776B2

公开(公告)日：2013-11-26

申请号：US12554577

申请日：2009-09-04

Applicant: Momoyo Enyama ,  Hiroya Ohta ,  Osamu Kamimura

Inventor： Momoyo Enyama ,  Hiroya Ohta ,  Osamu Kamimura

IPC: H01J3/16

CPC classification number: H01J37/153 ,  H01J37/1472 ,  H01J2237/151 ,  H01J2237/1534

Abstract: With a multi-beam type charged particle beam apparatus, and a projection charged particle beam apparatus, in the case of off-axial aberration corrector, there is the need for preparing a multitude of multipoles, and power supply sources in numbers corresponding to the number of the multipoles need be prepared. In order to solve this problem as described, a charged particle beam apparatus is provided with at least one aberration corrector wherein the number of the multipoles required in the past is decreased by about a half by disposing an electrostatic mirror in an electron optical system.

Abstract translation: 使用多光束型带电粒子束装置和投影带电粒子束装置，在离轴像差校正器的情况下，需要准备多个多极，并且与数字对应的数量的电源 的多极需要准备。 为了解决上述问题，带电粒子束装置设置有至少一个像差校正器，其中通过在电子光学系统中设置静电镜，过去所需的多极数减少约一半。

公开(公告)号：US20120199736A1

公开(公告)日：2012-08-09

申请号：US13366701

申请日：2012-02-06

Applicant: Jean-Sebastien DANEL ,  Laurent DURAFFOURG ,  Frederic PROGENT ,  Charles-Marie TASSETTI

Inventor： Jean-Sebastien DANEL ,  Laurent DURAFFOURG ,  Frederic PROGENT ,  Charles-Marie TASSETTI

IPC: H01J3/16 ,  H01J9/00 ,  H01J49/40

CPC classification number: H01J49/405 ,  B05D3/10 ,  B81C1/00119 ,  B81C2201/0133 ,  B81C2203/031 ,  H01J49/0018

Abstract: A micro-reflectron for a time-of-flight mass spectrometer including a substrate and integrated with the volume of the substrate, means for application of a potential gradient in a volume suitable for constituting a flight zone of the ions. The means of application includes at least two polarization electrodes and a wall of at least one resistive material that can be polarized between these electrodes so as to generate a continuous potential gradient, itself providing the function of reflectron, this flight zone, these electrodes and this wall being obtained by the technology of microelectromechanical systems (MEMS) and this micro-reflectron having a thickness of less than 5 millimetres while its other dimensions are less than 10 times this thickness.

Abstract translation: 用于包括衬底并与衬底的体积整合的飞行时间质谱仪的微反射器是在适于构成离子的飞行区域的体积中施加电位梯度的装置。 施加装置包括至少两个极化电极和至少一个电阻材料的壁，其可以在这些电极之间极化，以便产生连续的电势梯度，其本身提供反射器的功能，该飞行区域，这些电极和这些电极 通过微机电系统（MEMS）的技术获得壁，该微反射器的厚度小于5毫米，而其它尺寸小于该厚度的10倍。

公开(公告)号：US20120175535A1

公开(公告)日：2012-07-12

申请号：US13004024

申请日：2011-01-10

Applicant: Ye Chen ,  Ron Kaneshiro ,  Pengyue Wen

Inventor： Ye Chen ,  Ron Kaneshiro ,  Pengyue Wen

IPC: H01J3/16

CPC classification number: G02B6/43 ,  G02B6/4206 ,  G02B6/4215

Abstract: An optical backplane is provided that has at least first and second side walls that are generally parallel to one another and at least one optical relay element disposed on at least one of the parallel side walls. An optical signal is coupled into the optical backplane through an entrance facet of the backplane. The optical signal is maintained within the optical backplane by internal reflection at the parallel side walls of the backplane. The optical relay element receives the optical signal reflected off of one of the side walls and reflects and refocuses the optical signal to guide the optical signal and prevent it from diverging as it propagates through the backplane from the entrance facet to the exit facet.

Abstract translation: 提供了一种光学背板，其具有至少第一和第二侧壁，所述至少第一和第二侧壁大致彼此平行并且至少一个光学中继元件设置在至少一个平行的侧壁上。 光信号通过背板的入射面耦合到光背板中。 光信号通过在背板的平行侧壁处的内部反射保持在光学背板内。 光学继电器元件接收从一个侧壁反射的光信号，并且反射和重新聚焦光信号以引导光信号，并防止其在从入射面传播到背板到出射面时发散。