公开(公告)号：JPH0225477A

公开(公告)日：1990-01-26

申请号：JP17366288

申请日：1988-07-14

Applicant: IMAI YOSHIO ,  SONKIYON IND LTD

Inventor： IMAI YOSHIO ,  KAKIMOTO MASAAKI ,  OISHI YOSHIYUKI ,  TEI KAZUSHIZU

IPC: C07D307/52 ,  C08G69/28

公开(公告)号：JPH0125045B2

公开(公告)日：1989-05-16

申请号：JP18484983

申请日：1983-10-03

Applicant: IMAI YOSHIO

Inventor： SHONO HIROO ,  INUZUKA TADAO

IPC: H04B10/00 ,  G02B6/00 ,  G02B17/02 ,  H04N7/22

公开(公告)号：JPS62217153A

公开(公告)日：1987-09-24

申请号：JP5908786

申请日：1986-03-19

Applicant: IMAI YOSHIO ,  ASAGA AKIO

Inventor： NABETA YOICHI ,  SUZUKI KAZUHIRO ,  INUZUKA TADAO

IPC: G01N27/22

Abstract: PURPOSE:To obtain a humidity sensor which has extremely superior humidity sensitivity and linearity by forming a thin film of an amorphous carbon compound. CONSTITUTION:The thin film 14 of the amorphous carbon compound is formed on a substrate 10 where lower electrodes 12 and 12 are formed to an about 1-2mum length independently of the substrate. Further, metal which is moisture- permeable and chemically stable, e.g., gold film or palladium film is vapor- deposited on the surface 16 of the thin film 14 to a 200-250Angstrom thickness, thus obtaining an upper electrode 18. Consequently, the humidity sensor is obtained which has extremely superior mechanical strength and extremely excellent response.

公开(公告)号：JPS5139283A

公开(公告)日：1976-04-01

申请号：JP10914974

申请日：1974-09-21

Applicant: IMAI YOSHIO

Inventor： IMAI YOSHIO

IPC: A23N17/00 ,  C12M1/00