公开(公告)号：EP0996922A4

公开(公告)日：2001-01-17

申请号：EP98939862

申请日：1998-07-23

Applicant: XROS INC

Inventor： NEUKERMANS ARMAND P ,  DOWNING JAMES P ,  SLATER TIMOTHY G

IPC: G06T1/00 ,  H04N1/00 ,  H04N1/107 ,  H04N1/12 ,  H04N1/193 ,  G06K7/10

CPC classification number: H04N1/00689 ,  H04N1/00885 ,  H04N1/00891 ,  H04N1/0476 ,  H04N1/107 ,  H04N1/1072 ,  H04N1/1078 ,  H04N1/121 ,  H04N1/193 ,  H04N2201/0096 ,  H04N2201/0471 ,  H04N2201/04732 ,  H04N2201/04737

Abstract: A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

公开(公告)号：EP0996922A1

公开(公告)日：2000-05-03

申请号：EP98939862.3

申请日：1998-07-23

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P. ,  DOWNING, James, P. ,  SLATER, Timothy, G.

IPC: G06K7/10

CPC classification number: H04N1/00689 ,  H04N1/00885 ,  H04N1/00891 ,  H04N1/0476 ,  H04N1/107 ,  H04N1/1072 ,  H04N1/1078 ,  H04N1/121 ,  H04N1/193 ,  H04N2201/0096 ,  H04N2201/0471 ,  H04N2201/04732 ,  H04N2201/04737

Abstract: A document transport for a scanner (100) has a flexible, elongated finger (226) disposed adjacent to a document (134), and a force applied to the finger (226) urges teeth (233) on the finger (226) into contact with the document (134) which urges the document (134) along a path through the scanner (100). A piezoelectric plate (222), which applies the force to the finger (226), requires only a small amount of electrical power. To traverse the scanner (100), a document (134) may also be manually fed along a guide (272). First and second speed-sensing detectors (276a and 276b), disposed along the path traversed by the document (134), permit the scanner (100) to determine a speed at which the manually fed document (134) traverses the scanner (100). To conserve electrical energy, the scanner (100) also includes a document-presence detector (274) for activating the scanner (100) when a document (134) to be scanned is present.

公开(公告)号：EP0870212A1

公开(公告)日：1998-10-14

申请号：EP96945027.0

申请日：1996-12-24

Applicant: Xros, Inc.

Inventor： NEUKERMANS, Armand, P.

IPC: G02B26 ,  H04N1

CPC classification number: H04N1/1135 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/105 ,  H04N1/00204 ,  H04N1/00236 ,  H04N1/00238 ,  H04N1/0283 ,  H04N1/12 ,  H04N1/193 ,  H04N2201/0063

Abstract: A compact medium scanner (100) scans a surface (132) of a medium (134) with a beam of light (106). A medium transport mechanism (202, 206) advances the surface along a medium transport path through a scanning station. A light source (104) produces a collimated beam of light (106) that impinges upon a mirror plate (112) of a micromachined torsional scanner (108). A pair of coaxially aligned torsion bars (304) support the mirror plate (112) within the torsional scanner (108). A mirror-surface drive means (306, 312) rotates the mirror plate (112) about the torsion bars (304). A single reciprocation of the mirror plate (112) by the drive means (306, 312) deflects the beam of light (106) over a fan-shaped region having a virtually fixed vertex (128) on the mirror plate (112). Scanner optics (116, 122) direct the fan-shaped region beam of light (106) onto the surface (132) of the medium (134) then present in the scanning station to thereby scan across the medium (134) with the beam of light (106).

公开(公告)号：EP0868648A1

公开(公告)日：1998-10-07

申请号：EP96943712.0

申请日：1996-12-10

Applicant: Xros,Inc.

Inventor： NEUKERMANS, Armand, P. ,  SLATER, Thimothy, G.

IPC: G01B21 ,  G01B7 ,  G01Q20 ,  G01Q60 ,  G01Q70

CPC classification number: G01Q60/38 ,  G01B7/34 ,  G01Q20/04 ,  H01L41/0926 ,  H01L41/094 ,  H02N2/028

Abstract: A topographic head (100) for profilometry and AFM supports a central paddle (108) by coaxial torsion bars (104) projecting inward from an outer frame (102). A tip (118) projects from the paddle distal from the bars. The torsion bars include an integrated paddle rotation sensor (142). An XYZ stage (200) may carry the topographic head for X, Y and Z axis translation. The XYZ stage's fixed outer base (202) is coupled to an X-axis stage (204) via a plurality of flexures (206). The X-axis stage is coupled to a Y-axis stage (212) also via a plurality of flexures (214). One of each set of flexures includes a shear stress sensor (222). A Z-axis stage (238) may also be included to provide an integrated XYZ scanning stage. The topographic head's frame, bars and paddle, and the XYZ stage's stage-base, X-axis, Y-axis and Z-axis stages, and flexures are respectively monolithically fabricated by micromachining from a semiconductor wafer (252a, 252b, 262).

Abstract translation: 用于轮廓测量和AFM的地形头通过从外框向内突出的同轴扭力支撑中心桨。 尖端从杆的远端突出。 扭杆包括集成的桨式旋转传感器。 XYZ平台可以承载X，Y和Z轴平移的地形头。 XYZ平台的固定外基座经由多个弯曲部与X轴平台连接。 X轴平台也通过多个弯曲部与Y轴平台连接。 每组挠曲件之一包括剪切应力传感器。 还可以包括Z轴平台以提供集成的XYZ扫描台。 地形头的框架，杆和桨，以及XYZ平台的阶段基座，X轴，Y轴和Z轴平台以及弯曲部分别通过从半导体晶片进行微加工而单独制造。