Abstract:
PROBLEM TO BE SOLVED: To provide an improved structure of a micromachined member coupled for relative rotation by a torsional flexure hinge. SOLUTION: A reference frame is coupled to a dynamic plate 58, and the frame is coupled to the plate by not a torsion bar but a folded torsional flexure hinge 96. The folded torsional flexure hinge 96 for supporting the plate 58 from the frame side comprises three basic hinge segments 102a, 102b, and 102c. Each of basic hinge segments 102a, 102b, and 102c has a longitudinal axis 98 which is not oriented perpendicular to the rotation axis 62 of the plate 58. An intermediate region 104 of the folded torsional flexure hinge 96 couples together immediately adjacent ends 106 of the basic hinge segments 102a, 102b, and 102c. The basic hinge segment 102b includes a torsion sensor 108 for measuring angular rotation of the plate 58 about the axis 62 with respect to the frame. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a structure that is improved in a microfabrication member connected by a torsion flexure hinge and relatively rotated.SOLUTION: A reference frame 56 is connected to a dynamic plate 58, and a frame 56 is connected to the plate 58 with a folding torsion flexure hinge 96 and not with a torsion bar. Then, the folding torsion flexure hinge 96 supports the plate 58 from the side of the frame 56 and comprises three basic hinge elements 102a, 102b, 102c. The direction of a longitudinal axis 98 of each of the basic hinge elements 102a, 102b, 102c is not perpendicular to a rotational axis 62 of the plate 58. An intermediate part 104 of the folding torsion flexure hinge 96 connects a direct adjacent end 106 of the basic hinge elements 102a, 102b, 102c with each other. The basic hinge element 102b includes a torsion sensor 108 for measuring an angular rotation of the plate 58 centering on the axis 62 to the frame 56.
Abstract:
PROBLEM TO BE SOLVED: To provide an improved structure of a micromachined member coupled with a torsional flexure hinge and relatively rotating.SOLUTION: A reference frame is coupled to a dynamic plate 58, and the frame is coupled to the plate 58 by not a torsion bar but a folded torsional flexure hinge 96. The folded torsional flexure hinge 96 for supporting the plate 58 from the frame side includes three basic hinge segments 102a, 102b, and 102c. Each of basic hinge segments 102a, 102b, and 102c has a longitudinal axis 98 which is not oriented perpendicular to the rotation axis 62 of the plate 58. An intermediate region 104 of the folded torsional flexure hinge 96 together immediately adjacent ends 106 of the basic hinge segments 102a, 102b, and 102c to one another. The basic hinge segment 102b includes a torsion sensor 108 for measuring the angular rotation of the plate 58 about the axis 62 with respect to the frame.
Abstract:
A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
Abstract:
A fiber optic switch (400) includes a fiber optic switching module (100) tha t receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be select ed as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflecto r (172) which indicate its orientation. A portcard (406) included in the switc h (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the receive d coordinates with the orientation signals received from the deflector (172) a nd adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs of deflectors (172) coupling a beam of light (108) between optical fibers (106) .
Abstract:
A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).
Abstract:
A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).
Abstract:
A fiber optic switch (400) includes a fiber optic switching module (100) that receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) included in the switch (400) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the received coordinates with the orientation signals received from the deflector (172) and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optical alignment to precisely orient pairs of deflectors (172) coupling a beam of light (108) between optical fibers (106).
Abstract:
A micro-mirror strip assembly having a plurality of two-dimensional micro- mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to fo rm quadrants. Torsion sensors are provided along the axes of rotation to contro l deflection of the quadrant deflection electrodes.
Abstract:
A fiber optic switch (400) includes a fiber optic switching module (100) tha t receives and fixes ends (104) of optical fibers (106). The module (100) includes numerous reflective light beam deflectors (172) arranged in a V-sha pe which may be selected as pairs for coupling a beam of light (108) between a pair of optical fibers (106). The module (100) also produces orientation signals from each deflector (172) which indicate its orientation. A portcard (406) supplies drive signals to the module (100) for orienting at least one deflector (172). The portcard (406) also receives the orientation signals produced by that deflector (172) together with coordinates that specify an orientation for the deflector (172). The portcard (406) compares the receive d coordinates with the orientation signals and adjusts the drive signals supplied to the module (100) to reduce any difference between the received coordinates and the orientation signals. The switch (400) also employs optic al alignment to precisely orient pairs deflectors (172) coupling a beam of ligh t (108) between optical fibers (106).