Abstract:
PROBLEM TO BE SOLVED: To provide a structure that is improved in a microfabrication member connected by a torsion flexure hinge and relatively rotated.SOLUTION: A reference frame 56 is connected to a dynamic plate 58, and a frame 56 is connected to the plate 58 with a folding torsion flexure hinge 96 and not with a torsion bar. Then, the folding torsion flexure hinge 96 supports the plate 58 from the side of the frame 56 and comprises three basic hinge elements 102a, 102b, 102c. The direction of a longitudinal axis 98 of each of the basic hinge elements 102a, 102b, 102c is not perpendicular to a rotational axis 62 of the plate 58. An intermediate part 104 of the folding torsion flexure hinge 96 connects a direct adjacent end 106 of the basic hinge elements 102a, 102b, 102c with each other. The basic hinge element 102b includes a torsion sensor 108 for measuring an angular rotation of the plate 58 centering on the axis 62 to the frame 56.
Abstract:
PROBLEM TO BE SOLVED: To provide an improved structure of a micromachined member coupled with a torsional flexure hinge and relatively rotating.SOLUTION: A reference frame is coupled to a dynamic plate 58, and the frame is coupled to the plate 58 by not a torsion bar but a folded torsional flexure hinge 96. The folded torsional flexure hinge 96 for supporting the plate 58 from the frame side includes three basic hinge segments 102a, 102b, and 102c. Each of basic hinge segments 102a, 102b, and 102c has a longitudinal axis 98 which is not oriented perpendicular to the rotation axis 62 of the plate 58. An intermediate region 104 of the folded torsional flexure hinge 96 together immediately adjacent ends 106 of the basic hinge segments 102a, 102b, and 102c to one another. The basic hinge segment 102b includes a torsion sensor 108 for measuring the angular rotation of the plate 58 about the axis 62 with respect to the frame.
Abstract:
PROBLEM TO BE SOLVED: To provide an improved structure of a micromachined member coupled for relative rotation by a torsional flexure hinge. SOLUTION: A reference frame is coupled to a dynamic plate 58, and the frame is coupled to the plate by not a torsion bar but a folded torsional flexure hinge 96. The folded torsional flexure hinge 96 for supporting the plate 58 from the frame side comprises three basic hinge segments 102a, 102b, and 102c. Each of basic hinge segments 102a, 102b, and 102c has a longitudinal axis 98 which is not oriented perpendicular to the rotation axis 62 of the plate 58. An intermediate region 104 of the folded torsional flexure hinge 96 couples together immediately adjacent ends 106 of the basic hinge segments 102a, 102b, and 102c. The basic hinge segment 102b includes a torsion sensor 108 for measuring angular rotation of the plate 58 about the axis 62 with respect to the frame. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
A monolithically fabricated micromachined structure (52) couples a reference frame (56) to a dynamic plate (58) or second frame for rotation of the plate (58) or second frame with respect to the reference frame (56). Performance of torsional oscillators or scanners (52) benefits greatly by coupling the frame (56) to the plate (58) or second frame with torsional flexure hinges (56) rather than torsion bars (54). Appendages (122), tethers (142) or an improved drive circuit enhance electrostatic drive stability of torsional oscillators (52). Wide and thin torsional flexure hinges (96) and isotopically pure silicon enhance thermal conductivity between the plate (58) and the frame (56). Dampening material bridging slots (232) adjacent to torsional flexure hinges (96) drastically reduce the dynamic member's Q. A widened section (252) of narrow torsional flexure hinges (96) permit inclusion of a torsion sensor (108). A dynamic member (58) that includes an actuator portion (302) performs light beam switching. Reflective coatings (76), wire grid polarizers (362), photo-detectors (372) and Fresnel lenses (376) enhance optical performance of the torsional scanners (58).
Abstract:
PROBLEM TO BE SOLVED: To provide a very compact 1×2 optical fiber switch structure by alternately arranging the switches. SOLUTION: The optical fiber switch structure includes three collimators, one collimator acts as a launching collimator (84a) and the other collimators act as exiting collimators (84b, 84c). The optical switch structure further includes a latch type switch element (82) having a first position and a second position. When the latch type switch element stays at the first position, a light beam emitted from the launching collimator is directly guided to the first exiting collimator among the exiting collimators. When the latch type switch stays at the second position, a light beam emitted from the launching collimator is deflected to the second exiting collimator among the exiting collimators by the latch type switch element. COPYRIGHT: (C)2011,JPO&INPIT
Abstract:
A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.
Abstract:
A micro-mirror strip assembly having a plurality of two-dimensional micro-mirror structures with improved deflection and other characteristics is presented. In the micro-mirror structures, electrodes for electrostatic deflection are disposed on conical or quasi-conical entities that are machined, attached or molded into a substrate. The electrodes are quartered approximately parallel to or offset by 45 degrees from rotational axes to form quadrants. Torsion sensors are provided along the axes of rotation to control deflection of the quadrant deflection electrodes.