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公开(公告)号：KR1020140060113A
公开(公告)日：2014-05-19
申请号：KR1020120126805
申请日：2012-11-09
Applicant: (주) 인텍플러스
CPC classification number: G01N21/8806 , G01B11/30 , G01N21/9501 , G01N21/956 , G06T7/0004
Abstract: The present invention relates to a substrate inspection apparatus which adjusts focus depending on fields of view (FOV) and then performs vision inspection while storing a substrate in a tray, and comprises: an imaging unit disposed on the upper part of the tray and acquiring images of the substrate stored in the tray; a measurement unit disposed on the upper part of the tray and measuring a distance from the substrate stored in the tray; and a focus adjustment unit adjusting focus of the image unit based on distance information of the substrate measured through the measurement unit.
Abstract translation: 本发明涉及一种基于视场（FOV）调整焦点的基板检查装置，然后在将基板存放在托盘中的同时执行视觉检查，并且包括：成像单元，设置在托盘的上部并获取图像 的基板; 测量单元，设置在所述托盘的上部并测量与所述托盘中存储的所述基板的距离; 以及焦点调整单元，其基于通过测量单元测量的基板的距离信息来调整图像单元的焦点。
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公开(公告)号：KR1020140031687A
公开(公告)日：2014-03-13
申请号：KR1020120098308
申请日：2012-09-05
Applicant: (주) 인텍플러스
CPC classification number: G01N21/9501 , G01N21/8851 , G01N21/956 , G01N2021/9513 , G06T7/0004
Abstract: The present invention relates to a device and a method for inspecting abnormal conditions on an LCD or an OLED substrate and, more particularly, to an inspecting system for the surface of a substrate and an inspecting method thereof, which improve an yield rate by improving the accuracy of inspection for abnormal conditions on an LCD or an OLED substrate using an optical image measuring system. The inspecting system for the surface of a substrate is an optical inspecting system by comprising: a camera which outputs by photographing a lighting device and a substrate; a control unit which captures the image photographed by the camera and treats the captured image in order to determine a fair quality product or a defective product; and a washing device which washes the surface of the substrate. The camera comprises a first camera and an additional second camera. The washing device is an air spraying device for spraying air and is installed between the first and the second cameras. Meanwhile, the inspecting method for the surface of a substrate includes a step of photographing an image reflected by light emitted from a lighting device to a substrate, and treats and determines the photographed image. When the substrate is determined to have foreign materials in the step of treating and determining the photographed image, the inspecting method the surface of a substrate can further include a step of spraying air onto the substrate using an air spraying device as a washing device, and a step of determining again by photographing an image after spaying air.
Abstract translation: 本发明涉及一种用于检查LCD或OLED基板上的异常状况的装置和方法，更具体地，涉及用于基板表面的检查系统及其检查方法，其通过改善 使用光学图像测量系统对LCD或OLED基板上的异常状况的检查精度。 基板表面的检查系统是光学检查系统，包括：照相机，其通过拍摄照明装置和基板输出; 控制单元，其捕获由照相机拍摄的图像，并处理所拍摄的图像，以便确定公平的质量产品或有缺陷的产品; 以及洗涤基板表面的洗涤装置。 相机包括第一相机和附加的第二相机。 洗涤装置是用于喷射空气并安装在第一和第二相机之间的空气喷射装置。 同时，基板表面的检查方法包括将从照明装置发射的光反射的图像拍摄到基板的步骤，并处理并确定所拍摄的图像。 当在处理和确定拍摄图像的步骤中确定基板具有异物时，基板的表面的检查方法还可以包括使用空气喷射装置作为清洗装置将空气喷射到基板上的步骤，以及 通过在喷射空气之后拍摄图像来再次确定的步骤。
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公开(公告)号：KR1020140012340A
公开(公告)日：2014-02-03
申请号：KR1020120078931
申请日：2012-07-19
Applicant: (주) 인텍플러스
CPC classification number: G01N21/95684 , G01N2021/95638 , G01N2021/95661 , G02F2001/136254
Abstract: The present invention relates to a method for inspecting and repairing a substrate, wherein the method is for inspecting a defective position through a pattern inspection on the substrate, determining whether or not a short circuit or disconnection is in the defective position through image comparison, and then outputting a signal for restoration corresponding to the short circuit or the disconnection in order to automatically restore a defective area. The method for inspecting and repairing the substrate comprises: an inspecting step of optically inspecting a pattern defect on the substrate, and then transmitting information in which the pattern defect is recorded; a deciphering step of determining whether or not the short circuit or the disconnection is in the pattern defect based on the transmitted information for the pattern defect; and a restoring step of recognizing the short circuit or the disconnection in the pattern defect, and then repairing the pattern defect. [Reference numerals] (S100) Inspecting step; (S200) Deciphering step; (S300) Restoring step; (S400) Re-inspecting step
Abstract translation: 本发明涉及一种用于检查和修复基板的方法，其中该方法用于通过基板上的图案检查来检查缺陷位置，通过图像比较确定短路或断开是否处于缺陷位置，以及 然后输出与短路或断开相对应的恢复信号，以便自动恢复缺陷区域。 用于检查和修复基板的方法包括：光学检查基板上的图案缺陷，然后发送记录有图案缺陷的信息的检查步骤; 根据所发送的图案缺陷信息，确定短路或断线是否处于图案缺陷的解密步骤; 以及识别图案缺陷中的短路或断开的恢复步骤，然后修复图案缺陷。 （附图标记）（S100）检查步骤; （S200）解密步骤; （S300）恢复步骤; （S400）重新检查步骤
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公开(公告)号：KR1020140012338A
公开(公告)日：2014-02-03
申请号：KR1020120078929
申请日：2012-07-19
Applicant: (주) 인텍플러스
IPC: G01B11/24
Abstract: The present invention relates to a three-dimensional (3D) shape measuring apparatus using an optical triangulation method, which outputs the intensity of line beams differently according to the reflectance by sector of an object to be measured during the process of measuring the height of the object by emitting the line beams. The 3D shape measuring apparatus comprises: a table which loads a 3D shape object to be measured where multiple bumps are embedded in a printed circuit board to protrude; a projector which is placed in the upper part of the object in order to output beams to the top surface of the object; a light collecting unit which is placed in the lower part of the projector in order to receive the plane beams emitted from the projector and to collect the beams into line beams to be outputted; and an image acquiring unit which is placed in the upper part of one side of the object in order to acquire the image of the line beams that are reflected by the object after being emitted as the line beams by the light collecting unit.
Abstract translation: 本发明涉及一种使用光学三角测量方法的三维（3D）形状测量装置，其在测量高度的过程中根据被测量物体的扇区的反射率而不同地输出线束的强度 物体通过发射线束。 3D形状测量装置包括：将多个凸起嵌入印刷电路板中的待测量的3D形状对象加载以突出的工作台; 投影仪，其被放置在物体的上部，以便将光束输出到物体的顶表面; 光收集单元，其被放置在投影仪的下部以便接收从投影仪发射的平面光束并将光束收集到待输出的线束中; 以及图像获取单元，其被放置在所述物体的一侧的上部，以便获取由所述光收集单元作为所述线束发射之后被所述物体反射的所述线束的图像。
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公开(公告)号：KR101306289B1
公开(公告)日：2013-09-09
申请号：KR1020110093102
申请日：2011-09-15
Applicant: (주) 인텍플러스
IPC: G01N21/956 , G01B11/30 , G02F1/13
CPC classification number: G06T7/0004 , G01N21/95 , G01N2021/9513 , G02F1/1309 , G06T2207/30121 , H04N7/18
Abstract: 평판 패널을 검사하는 방법을 개시한다. 평판 패널 검사방법은, 평판 패널과 카메라 중 적어도 어느 하나를 수평 이동시켜 카메라를 평판 패널의 측정 위치에 배치하는 단계; 측정 위치에서 평판 패널의 피측정물에 대해 카메라의 초점을 자동으로 맞추는 단계; 카메라의 초점이 맞춰진 상태에서 카메라를 현재 위치를 중심으로 설정 구간 내에서 상하 이동시켜가며 피측정물에 대해 다수의 영상을 획득하는 단계; 및 획득된 다수의 영상 중 피측정물에 대한 선명도가 가장 높은 영상을 선택한 후, 선택된 영상을 처리하여 피측정물의 불량 여부를 판별하는 단계를 포함한다.
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Patent Agency Ranking
公开(公告)号：KR1020120033131A
公开(公告)日：2012-04-06
申请号：KR1020100094734
申请日：2010-09-29
Applicant: (주) 인텍플러스
Abstract: PURPOSE: A method for transceiving video data at a high speed and a device thereof are provided to transceive an output image data from an image sensor through a coaxial cable with a plurality of transmission channels, thereby transceiving the image data at a high speed. CONSTITUTION: A buffer record controller(122) sequentially records an output image data of an image sensor(110) in one or more line buffers(123). A transmission controller(124) sequentially reads image data stored in one or more line buffers. The transmission controller sequentially outputs the image data to one or more transmission channels at a recording speed corresponding to the bandwidth of transmission channel.
Abstract translation: 目的：提供一种用于高速收发视频数据的方法及其装置，用于通过具有多个传输通道的同轴电缆从图像传感器收发输出图像数据，从而以高速收发图像数据。 构成：缓冲记录控制器（122）将图像传感器（110）的输出图像数据顺序记录在一个或多个行缓冲器（123）中。 传输控制器（124）顺序地读取存储在一个或多个行缓冲器中的图像数据。 传输控制器以对应于传输信道的带宽的记录速度将图像数据顺序地输出到一个或多个传输信道。
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公开(公告)号：KR101130553B1
公开(公告)日：2012-03-23
申请号：KR1020090117980
申请日：2009-12-01
Applicant: (주) 인텍플러스
IPC: H01L33/48
Abstract: 본 발명은 발광다이오드(LED) 칩 카운터에 관한 것으로, 특히 일반 DSLR 카메라와 면광을 사용하여 블루페이퍼상의 발광다이오드(LED) 웨이퍼에 있는 발광다이오드(LED) 칩을 카운터하는 발광다이오드(LED) 칩 카운터에 관한 것으로,
조명수단과 카메라와 컴퓨터로 이루어진 발광다이오드(LED) 칩 카운터에 있어서, 상기 카메라는 일반 DSLR 카메라이며, 상기 조명수단은 측정 대상물의 하면에 위치하며 면광임을 특징으로 한다.
칩 카운터, DSLR 카메라, 면광, 발광다이오드-
公开(公告)号：KR1020120025644A
公开(公告)日：2012-03-16
申请号：KR1020100087161
申请日：2010-09-06
Applicant: (주) 인텍플러스
Abstract: PURPOSE: An apparatus for inspecting a light emitting diode array is provided to shorten times required for measurement by simultaneously images from a main camera and a side camera. CONSTITUTION: An apparatus for inspecting a light emitting diode array includes a cassette(20), a cassette driver(30), an image obtaining module, an image obtaining module driver(40), and an image processor. A light emitting diode array is mounted at the cassette. The cassette driver transfers the cassette. The image obtaining module obtains images of the light emitting diode array. The image obtaining module driver transfers the image obtaining module. The image processor analyzes the images from the image obtaining module to inspect the light emitting diode array.
Abstract translation: 目的：提供一种用于检查发光二极管阵列的装置，以通过同时来自主摄像机和侧摄像机的图像缩短测量所需的时间。 构成：用于检查发光二极管阵列的装置包括盒（20），盒驱动器（30），图像获取模块，图像获取模块驱动器（40）和图像处理器。 发光二极管阵列安装在磁带盒上。 磁带机驱动程序转移磁带。 图像获取模块获得发光二极管阵列的图像。 图像获取模块驱动器传送图像获取模块。 图像处理器分析来自图像获取模块的图像以检查发光二极管阵列。
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公开(公告)号：KR1020110061359A
公开(公告)日：2011-06-09
申请号：KR1020090117980
申请日：2009-12-01
Applicant: (주) 인텍플러스
IPC: H01L33/48
CPC classification number: H01L33/486 , G06T7/0004 , H05K13/08
Abstract: PURPOSE: An LED chip counter is provided to counter chips of a wafer using an inexpensive DSLR camera, thereby saving the costs for realizing a measuring system. CONSTITUTION: An LED(Light Emitting Diode) chip counter includes a light unit(20), a camera, and a computer(30). The camera is a DSLR camera. The light unit is located on the bottom of an object(40) to be measured. The light unit is arranged between the object to be measured and a table to increase the rate of accurately obtaining an image.
Abstract translation: 目的：提供LED芯片计数器，以便使用便宜的数码单反相机对晶片的芯片进行对焦，从而节省实现测量系统的成本。 构成：LED（发光二极管）芯片计数器包括光单元（20），相机和计算机（30）。 相机是数码单反相机。 灯单元位于要测量的物体（40）的底部。 光单元布置在要测量的对象和表之间以增加准确获得图像的速率。
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公开(公告)号：KR100922625B1
公开(公告)日：2009-10-21
申请号：KR1020070136623
申请日：2007-12-24
Applicant: (주) 인텍플러스
Abstract: 본 발명은, PZT 구동 제어 방식 변경을 통해 최고점과 최저점 단차를 가지는 대상에 대한 영상 획득을 동시에 할 수 있는 입체 형상 측정 방법에 관한 것이다.
이를 위한 본 발명의 입체 형상 측정 방법은, 빔분할기를 통해 분할된 빛을 각각 측정물의 측정면과 PZT 엑츄에이터를 이용하여 미소 이동시킨 기준미러에 조사하고, 기준미러와 측정면으로부터 각각 반사되는 기준광과 측정광 간섭에 의해 생성되는 간섭무늬를 CCD 카메라로 촬영하여 촬영된 영상을 통해 측정물의 입체 형상을 측정하는 방법에 있어서, 상기 CCD 카메라 1 프레임 촬영시 상기 기준미러가 시간차를 두고 서로 다른 위치에 놓이도록 제어하고 각각의 위치에서 생성되는 간섭무늬를 한번에 획득하는 것이다.
PZT, 카메라, 프레임, 측정광, 기준광, 간섭
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