Abstract:
본 발명은 3차원 핀펫형 가스 감지소자에 관한 것으로, 수평 방향으로 형성된 플로팅 전극 구조를 가짐으로써, 종래 수직방향으로 적층된 플로팅 전극, 감지물질층, 제어 전극을 갖는 가스 감지소자에 비해 잡음감소, 공정단순화, 오염방지, 감지속도개선, 다양한 감지물질 적용 가능, 기계적 안정성 등의 장점을 갖고, 다양한 감지 기작으로 동작하는 복수 개의 가스 감지소자를 하나의 기판에 쉽게 구현할 수 있는 효과가 있다.
Abstract:
The present invention relates to a manufacturing method for a cantilever element with a cantilever structure which includes a length unit which is extended from a second electrode formed on the top of a first insulator film to the upper part of a first electrode, and a contact point unit formed at the end of the length unit. The manufacturing method comprises: a first step which forms a first electrode at one side of the top of a first insulator film; a second step which forms a second insulator film and a second electrode consecutively on the first electrode and the first insulator film; a third step which etches between a contact point unit part on the second insulator film form on the first electrode and the first electrode; a fourth step which coats graphene on the top of the second electrode, the top of the length unit, and the contact point unit; and a fifth step which etches the second insulator film formed in the lower part of the length unit. The cantilever element using graphene and a manufacturing method thereof can reduce a separation distance of a contact point part by replacing a metal electrode playing a role of an MEMS probe with a graphene material with excellent electrical conductivity and mechanical elasticity, can effectively reduce operating voltage applied to the relevant separation distance, can facilitate both the application of structures with various shapes and the forming process compared with a probe structure using a simple graphene material, can increase sensitivity for the applied voltage and be applied to various MEMS elements such as FPGA and Gyroscope, and can provide an effect of improving electrical characteristics using graphene with excellent electrical conductivity and low Young′s Modulus characteristics as a thinner film than general metal.
Abstract:
The present invention is to provide a cell string of a nonvolatile memory applied to a nerve imitation technology and a memory array using the same. The present invention increases a degree of integration by separating a fence-type semiconductor into two fins and forming a memory cell string with a memory cell of a gate diode structure in each fin, and basically prevents the interference between adjacent cells. By forming the memory cell string on a first semiconductor layer surrounded by a gate electrode and a depletion region of a PN junction, a GSL and a CSL required for an existing NAND flash memory array are removed by an memory operation due to a GIDL, and the degree of integration is greatly increased.
Abstract:
PURPOSE: A multi-functional hollow type implant is provided to improve safety by supplying an accurate amount of dose and load different kinds of peptide or protein as well as a neurotization promotion drug to a supply body. CONSTITUTION: A multi-functional hollow type implant includes a fixture(1) in which a screw thread is formed in the outer periphery, a path(10) is formed inside, an opening part is formed in the upper end of the path, and an inlet is formed in the lower end of the path; a supply body(2) inserted into the inner path of the fixture, combined with the inlet of the lower end in order to be connected, and containing a neurotization promotion drug inside; and a combining body(3) hermetically combined with the upper end opening part of the inner path of the fixture in order to prevent the separation of the supply body.
Abstract:
본 발명은 수직형 반도체 메모리 셀 스트링, 이를 이용한 메모리 어레이 및 그 제조방법에 관한 것으로서, 보다 상세하게는 MOS 기반 플래시 메모리 소자의 축소화 특성과 성능을 개선하고 메모리 용량을 늘리기 위하여 차폐전극을 사이에 두고 반도체 기판 상에 수직 방향을 따라 3차원으로 반도체 메모리 셀 스트링을 구현한 차폐전극을 갖는 3차원 수직형 메모리 셀 스트링과 이를 이용한 메모리 어레이 및 그 제조 방법에 관한 것이다.