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公开(公告)号：KR1020140039773A
公开(公告)日：2014-04-02
申请号：KR1020120106438
申请日：2012-09-25
Applicant: 한국과학기술원
CPC classification number: B29C45/372 , B29C33/38 , B29K2905/02 , B29L2011/0016 , C23C16/0272 , C25D11/022 , C25D11/04
Abstract: The present invention relates to a metal mold for an anti-reflection lens with nanostructures formed on the surface by using an etch stop layer, and a manufacturing method thereof. The present invention provides the metal mold for an anti-reflection lens with nanostructures formed on the surface by using an etch stop layer and a manufacturing method thereof, which manufactures a lens mold form by performing a mechanical process and polishing on an aluminum alloy with excellent machinability; deposits a high purity aluminum thin layer after depositing the etch stop layer on the surface; manufactures a nanostructure by positive electrode-oxidizing the high purity aluminum thin layer; solves the aluminum purity and workability problems of the manufacturing method for the metal mold for the anti-reflection lens using the positive electrode oxidation of existing high purity aluminum; is able to form the nanostructure on the surface while maintaining a smooth surface without micro-defects; and enables a mass production of the polymers and plastic anti-reflection lenses by using an injection molding.
Abstract translation: 本发明涉及一种用于通过使用蚀刻停止层在表面上形成纳米结构的防反射透镜的金属模及其制造方法。 本发明提供了一种用于具有通过使用蚀刻停止层在表面上形成的纳米结构的防反射透镜的金属模具及其制造方法，其通过对具有优异的铝合金进行机械加工和抛光来制造透镜模具形状 切削加工; 在表面上沉积蚀刻停止层后沉积高纯度的铝薄层; 通过正极氧化高纯度铝薄层制造纳米结构; 解决了使用现有高纯度铝的正极氧化的防反射透镜用金属模具的制造方法的铝纯度和可加工性问题; 能够在保持光滑表面而没有微缺陷的同时在表面上形成纳米结构; 并且通过使用注射成型可以大量生产聚合物和塑料防反射透镜。
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公开(公告)号：KR1020130129605A
公开(公告)日：2013-11-29
申请号：KR1020120053628
申请日：2012-05-21
Applicant: 한국과학기술원
CPC classification number: G02B3/0018 , G02B1/10 , G02B3/0031 , G02B3/0056 , G03F7/0005
Abstract: The present invention relates to a high fill factor lens array using fluoropolymer thin film coating and a manufacturing method thereof which can increase the fill factor of the lens array by coating a fluoropolymer thin film to form a hydrophobic film when a lens is manufactured. The manufacturing method of the high fill factor lens array using the fluoropolymer coating according to the present invention comprises: a step for forming at least one cylinder-shaped pattern on a substrate; a step for coating the fluoropolymer thin film on the top of the cylinder-shaped pattern and the surface of the substrate; and a step for forming the microlens by thermally treating the fluoropolymer thin film-coated pattern. [Reference numerals] (AA) Start;(BB) End;(S10) Forming a cylinder-shaped pattern on a substrate;(S20) Fluoropolymer thin film coating on the upper part of the pattern and the surface of the substrate;(S30) Heat-treating to the pattern after coating;(S40) Forming microlens
Abstract translation: 本发明涉及使用氟聚合物薄膜涂层的高填充因子透镜阵列及其制造方法，其可以通过在制造透镜时涂覆含氟聚合物薄膜以形成疏水膜来增加透镜阵列的填充因子。 使用根据本发明的氟聚合物涂层的高填充因子透镜阵列的制造方法包括：在基底上形成至少一个圆柱形图案的步骤; 在所述圆筒状图案的顶部和所述基材的表面上涂布所述含氟聚合物薄膜的工序; 以及通过热处理含氟聚合物薄膜涂布图案来形成微透镜的步骤。 （AA）开始;（BB）结束;（S10）在基板上形成圆筒状图案;（S20）在图案的上部和基板的表面上的含氟聚合物薄膜涂布;（S30 ）涂布后对图案进行热处理;（S40）形成微透镜
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公开(公告)号：KR1020130071912A
公开(公告)日：2013-07-01
申请号：KR1020110139393
申请日：2011-12-21
Applicant: 한국과학기술원
CPC classification number: G02B5/09 , B81B2201/042 , G02B26/0833 , G02B26/101
Abstract: PURPOSE: A large-diameter terahertz micro electro mechanical system (MEMS) scanning mirror is provided to obtain a high driving range while reflecting beams of terahertz waves. CONSTITUTION: A large-diameter terahertz MEMS scanning mirror (100) includes a plurality of holes (20) formed on the surface. The holes have a diameter smaller than that of terahertz waves. The large-diameter terahertz MEMS scanning mirror has a high Q-factor. The diameter of the holes is 300um or less.
Abstract translation: 目的：提供大直径太赫兹微电子机械系统（MEMS）扫描镜，以在反射太赫兹波束的同时获得高的驱动范围。 构成：大直径太赫兹MEMS扫描镜（100）包括形成在表面上的多个孔（20）。 这些孔的直径小于太赫兹波的直径。 大直径太赫兹MEMS扫描镜具有高Q因子。 孔的直径为300um以下。
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公开(公告)号：KR1020130071837A
公开(公告)日：2013-07-01
申请号：KR1020110139285
申请日：2011-12-21
Applicant: 한국과학기술원
CPC classification number: G02B3/0031 , B29D11/00365 , B29D11/00423 , G02B1/041
Abstract: PURPOSE: A high numerical aperture lens using fluorine polymer thin film coating and a manufacturing method thereof are provided to have the advantage of making an excellent high numerical aperture lens with a large area by using a simple making method when a micro lens is formed by using thermal reflow. CONSTITUTION: A manufacturing method of high numerical aperture lens using fluorine polymer thin film coating comprises the following steps of: the step of forming at least one cylindrical shape pattern on a substrate which consists of one among glass, photoresist, polymer, silicone, and a III-V semiconductor material; the step of coating a fluorine polymer thin film on the upper part of the cylindrical-shaped pattern of a cylinder and on the surface of a substrate; and the step of forming a micro lens by performing heat treatment on the pattern which is coated with the fluorine polymer thin film. The lateral cross section of the cylindrical shape pattern has one among a circle, a square, and a hexagon. [Reference numerals] (AA) Start; (BB) End; (S10) Form a cylindrical pattern on a substrate; (S20) Coat a fluorine polymer thin film on the upper part of the cylindrical pattern and on the surface of the substrate; (S30) Perform heat treatment on the coated pattern; (S40) Form a micro-lens
Abstract translation: 目的：提供一种使用氟聚合物薄膜涂层的高数值孔径透镜及其制造方法，其优点是通过使用简单的制造方法制造具有大面积的优异的高数值孔径透镜，当通过使用微透镜形成微透镜时 热回流 构成：使用氟聚合物薄膜涂层的高数值孔径透镜的制造方法包括以下步骤：在由玻璃，光致抗蚀剂，聚合物，硅树脂和硅树脂中的一种构成的基板上形成至少一个圆柱形图案的步骤 III-V半导体材料; 将氟聚合物薄膜涂布在圆柱形圆筒形图案的上部和基板表面上的步骤; 以及通过对涂布有氟聚合物薄膜的图案进行热处理来形成微透镜的步骤。 圆柱形图案的横截面具有圆，正方形和六边形之一。 （附图标记）（AA）开始; （BB）结束; （S10）在基板上形成圆筒状图案; （S20）在圆筒形图案的上部和基板的表面上涂覆氟聚合物薄膜; （S30）对涂布图案进行热处理; （S40）形成微透镜
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公开(公告)号：KR1020130063249A
公开(公告)日：2013-06-14
申请号：KR1020110129669
申请日：2011-12-06
Applicant: 한국과학기술원
Abstract: PURPOSE: A polymer lens comprising an anti-reflective nano structure and a method for manufacturing the same are provided to extract light emitted from a light source efficiently and to reduce reflection of a lens in a compact imaging system, by forming the anti-reflective structure on the surface of the lens. CONSTITUTION: A polymer lens includes a lens(500) and an anti-reflective nano structure layer(200). The lens has a predetermined curvature, which is controlled to have a vertical incident angle to increase anti-reflection efficiency. The anti-reflection nano structure layer is formed by using a mold where an anti-reflective nano structure with smaller size than a wavelength is formed on one surface of the lens. The anti-reflective nano structure layer is formed on a micro structure or between the micro structures which is larger than the wavelength, and increases a light emission angle and anti-reflection efficiency.
Abstract translation: 目的：提供一种包含抗反射纳米结构的聚合物透镜及其制造方法，以便通过形成抗反射结构来提取从光源发射的光线，并减少紧凑的成像系统中的透镜的反射 在镜头的表面。 构成：聚合物透镜包括透镜（500）和抗反射纳米结构层（200）。 透镜具有预定的曲率，其被控制为具有垂直入射角以增加抗反射效率。 抗反射纳米结构层通过使用其中在透镜的一个表面上形成具有比波长更小的抗反射纳米结构的模具形成。 抗反射纳米结构层形成在微结构上或微结构之间，该结构大于波长，并且增加了发光角度和抗反射效率。
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Patent Agency Ranking
公开(公告)号：KR1020130057954A
公开(公告)日：2013-06-03
申请号：KR1020120133559
申请日：2012-11-23
Applicant: 한국과학기술원
CPC classification number: G02B3/02 , B82Y20/00 , G02B1/118 , G02B3/00 , G02B3/0006
Abstract: PURPOSE: A lens having a large area anti-reflective nanostructure using a nano-island mask and a manufacturing method thereof are provided to reduce reflectivity of a lens, to increase transmittance and to manufacture a lens with high efficiency. CONSTITUTION: A lens having a large area anti-reflective nanostructure includes a lens(200) having a flat or a specific radius of curvature and an anti-reflective nanostructure(300) having an area of a horizontal cross-section or vertical cross-section smaller than optical wavelength using a nano-island mask on one surface of the lens.
Abstract translation: 目的：提供一种使用纳米岛掩模的具有大面积抗反射纳米结构的透镜及其制造方法，以减少透镜的反射率，提高透射率和高效率地制造透镜。 构成：具有大面积抗反射纳米结构的透镜包括具有平坦或特定曲率半径的透镜（200）和具有水平横截面或垂直截面面积的抗反射纳米结构（300） 在透镜的一个表面上使用纳米岛掩模小于光学波长。
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87.发明授权저온 비젖음 현상과 극미세 패턴을 갖는 템플렛을 이용한 표면 증강 라만 분광 측정용 대면적 금속 나노섬 형성 방법. 有权使用具有纳米图案模板的低温去污方法形成金属纳米群体用于表面增强拉曼光谱
公开(公告)号：KR101209701B1
公开(公告)日：2012-12-10
申请号：KR1020110017305
申请日：2011-02-25
Applicant: 한국과학기술원
IPC: H01L21/027 , G01J3/44
Abstract: 저온비젖음현상과극미세패턴을갖는템플렛을이용한표면증강라만분광측정용(Surface Enhanced Raman Spectroscopy) 대면적금속나노섬형성방법을개시한다. 상기표면증강라만분광측정용(Surface Enhanced Raman Spectroscopy) 극미세패턴을가지는금속나노섬(Metal Nano Isalnds)의형성방법은기판(10)을제공하는제1단계, 상기기판(10) 상에나노레벨의금속박막(11)을형성하는제2단계, 상기금속박막(11) 상에미세나노패턴이형성된고분자주형(12)의패턴면을접촉시킨후, 열처리공정을수행하여상기금속박막(11)에비젖음성현상을유발시키는제3단계및 상기고분자주형(12)의미세패턴형상으로상기금속박막(11)의금속물질이비젖음성되어금속나노섬(Metal Nano islands)을형성하는제4단계를포함한다.
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公开(公告)号：KR1020120045516A
公开(公告)日：2012-05-09
申请号：KR1020100107109
申请日：2010-10-29
IPC: G02B6/42 , G02B6/32 , G02B6/06 , H04N5/232 , H01L27/146
CPC classification number: G02B6/06 , G01S3/783 , G02B6/4206 , G02B6/32 , G02B6/4221 , H01L27/14625 , H04N5/23287
Abstract: PURPOSE: An insect eye-shaped photo sensor and a method for manufacturing the photo sensor are provided to detect the incident direction of light by planarily or three dimensional-partially copying the structure of insect eyes. CONSTITUTION: A photo sensor includes a substrate part(100) and an ommatidium part(200). The substrate is based on a material of a first refraction index with respect to light. The ommatidium part is formed on or inside the substrate part and is based on a material of a second refraction index which is different from the first refraction index. The ommatidium part includes a micro-lens(201), an optical waveguide(202), and a cone structure(203). The micro-lens copies the facet lens of the ommatidium part. The optical waveguide copies the rhabdom of the ommatidium part. The cone structure copies the cylindrical cone of ommatidia of an insect.
Abstract translation: 目的：提供一种昆虫眼形光传感器和光传感器的制造方法，以通过平面或三维部分地复制昆虫眼的结构来检测光的入射方向。 构成：光传感器包括基片部分（100）和小眼部分（200）。 衬底基于相对于光的第一折射率的材料。 小idium部分形成在基底部分上或内部，并且基于与第一折射率不同的第二折射率的材料。 小眼部分包括微透镜（201），光波导（202）和锥形结构（203）。 微透镜复制小眼部分的小平面。 光波导复制了小眼idium部分的横纹肌。 锥形结构复制了昆虫的圆锥形圆锥体。
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89.发明公开하이드로겔을 이용한 생체 적합성을 가지는 표면증강라만산란 패치 형성 방법 및 표면증강라만산란 패치를 이용한 표면강화라만산란 방법 失效使用水压和表面增强拉曼散射方法的表面增强拉曼散射板的制造方法
公开(公告)号：KR1020110027366A
公开(公告)日：2011-03-16
申请号：KR1020090085431
申请日：2009-09-10
Applicant: 한국과학기술원
Abstract: PURPOSE: A method for manufacturing a surface-enhanced raman scattering patch with biocompatibility using hydrogel is provided to ensure biocompatibility using hydrogel in which metal nanoparticles are mixed and to enable biological transplantation. CONSTITUTION: A method for manufacturing a surface-enhanced raman scattering patch with biocompatibility using hydrogel comprises the steps of: (S10) forming micro-patterns on a substrate; (S20) molding PDMS(polydimethylsiloxane) on the substrate to form PDMS mold with micro-patterns; (S30) imprinting hydro gel in which metal nanoparticles located on the slide glass with PDMS mold; and (S40) removing the PDMS mold on the hydro gel to form a Plasmonic patch.
Abstract translation: 目的：提供使用水凝胶制造具有生物相容性的表面增强拉曼散射贴片的方法，以确保使用其中混合金属纳米颗粒的水凝胶的生物相容性并实现生物移植。 构成：使用水凝胶制造具有生物相容性的表面增强拉曼散射片的方法包括以下步骤：（S10）在基底上形成微图案; （S20）在基材上成型PDMS（聚二甲基硅氧烷）以形成具有微图案的PDMS模具; （S30）压印水凝胶，其中使用PDMS模具位于载玻片上的金属纳米粒子; 和（S40）去除水凝胶上的PDMS模具以形成Plasmonic贴片。
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公开(公告)号：KR1020100128042A
公开(公告)日：2010-12-07
申请号：KR1020090046469
申请日：2009-05-27
Applicant: 한국과학기술원
Abstract: PURPOSE: An ultra-sensitive terahertz photoconductive antenna using metal pattern arrays and a manufacturing method thereof are provided to improve measuring sensitivity of terahertz wave by increasing the amount of photoelectrons. CONSTITUTION: An ultra-sensitive terahertz photoconductive antenna using metal pattern arrays comprises an antenna substrate(100), one or more minute metal pattern arrays(310), and a driving electrode. The minute metal pattern arrays are continuously arranged on the antenna substrate and have an 800 nanometer size or less.
Abstract translation: 目的：提供一种使用金属图案阵列的超灵敏的太赫兹光电导天线及其制造方法，通过增加光电子的量来提高太赫兹波的测量灵敏度。 构成：使用金属图案阵列的超灵敏太赫兹光电导天线包括天线基板（100），一个或多个微小的金属图案阵列（310）和驱动电极。 微小金属图案阵列连续地布置在天线基板上并具有800纳米或更小的尺寸。
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