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公开(公告)号：KR1020130014322A
公开(公告)日：2013-02-07
申请号：KR1020120016463
申请日：2012-02-17
Applicant: 한국전자통신연구원
IPC: G01N33/574 , G01N33/532 , G01N27/72 , B82Y15/00
Abstract: PURPOSE: A multiple analyzer and a method for analyzing cancer cells in blood are provided to analyze cancer cells in each cancer. CONSTITUTION: A multiple analyzer comprises a magnetophoresis sorting part, a magnetic field measuring unit, and an analyzing and determining unit. The magnetophoresis sorting part comprises: a solution inlet; a saline solution inlet; a channel which is connected to the solution inlet and the saline solution inlet; one or more ferromagnetism patterns which are placed under the bottom of the channel; a first discharging path which is connected to the channel and discharges a first kind of material contained in the solution; and a second discharge path which is connected to the channel and discharges a second kind of material contained in the solution. A method for analyzing cancer cells in blood comprises the following steps: a step of mixing blood to be tested with a magnetic nanoparticle which is conjugated with a cancer cell-specific antibody, and preparing a mixture solution(S10); a step of dividing the mixture solution into normal cells and cancer cells by magnetophoresis(S20); a step of continuously measuring a magnetic field of the cancer cells(S30); and a step of analyzing and determining cancer cells in each cancer using the magnetic field of the cancer cell(S40). [Reference numerals] (AA) Blood; (BB) Magnetic nanoparticles; (CC) Mixture solution; (S20) Magnetophoresis division: dividing cancer cells and normal cells; (S30) Continuously measuring the magnetic field of the cancer cells; (S40) Analyzing/determining the cancer kinds of cancer cells
Abstract translation: 目的：提供多种分析仪和分析血液中癌细胞的方法，以分析各种癌症中的癌细胞。 构成：多分析仪包括磁电泳分选部，磁场测定部以及分析判断部。 磁电泳分选部分包括：溶液入口; 盐水溶液入口; 连接到溶液入口和盐水溶液入口的通道; 放置在通道底部下方的一个或多个铁磁图案; 第一排出路径，其连接到所述通道并排出所述溶液中包含的第一种材料; 以及第二排出路径，其连接到通道并排出溶液中包含的第二种材料。 用于分析血液中的癌细胞的方法包括以下步骤：将待测血液与与癌细胞特异性抗体结合的磁性纳米颗粒混合，制备混合液（S10）; 通过磁电泳将混合溶液分成正常细胞和癌细胞的步骤（S20）; 连续测量癌细胞的磁场的步骤（S30）; 以及使用癌细胞的磁场分析和确定各癌症中的癌细胞的步骤（S40）。 （附图标记）（AA）血液; （BB）磁性纳米粒子; （CC）混合溶液; （S20）磁电泳分割：分割癌细胞和正常细胞; （S30）连续地测量癌细胞的磁场; （S40）分析/确定癌细胞的癌症种类
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公开(公告)号：KR1020130014305A
公开(公告)日：2013-02-07
申请号：KR1020110130311
申请日：2011-12-07
Applicant: 한국전자통신연구원
IPC: G01N33/574 , G01N33/553 , G01N27/72
Abstract: PURPOSE: A multiple sorting apparatus and a method for sorting cancer cells in blood using the same are provided to sort the cancer cells by each kind of cancer and to simply diagnose cancer development. CONSTITUTION: A multiple sorting apparatus(100) comprises a first magnetophoresis sorting part(MP1) and a second magnetophoresis sorting part(MP2). The first magnetophoresis sorting part has a first channel(CH1). One side of the first channel is connected with a mixture solution inlet port(IP1) and a first saline solution inlet port(IP2). The other side of the first channel is connected with a first outlet port(OP1) and a preliminary separation path(PSP). The second magnetophoresis sorting part has a second channel. One side of the first channel is connected with a second saline solution inlet port(IP3) and a preliminary separation path. The other side of the second channel is connected with the second outlet port(OP2).
Abstract translation: 目的：提供使用其分选血液中的癌细胞的多重分选装置和方法，以通过各种癌症对癌细胞进行分类并简单地诊断癌症发展。 构成：多重分选装置（100）包括第一磁电泳分选部（MP1）和第二磁电泳分选部（MP2）。 第一磁电泳分选部具有第一通道（CH1）。 第一通道的一侧与混合溶液入口（IP1）和第一盐水溶液入口（IP2）连接。 第一通道的另一侧与第一出口（OP1）和初步分离路径（PSP）连接。 第二磁电泳分选部件具有第二通道。 第一通道的一侧与第二盐水溶液入口（IP3）和初步分离路径连接。 第二通道的另一侧与第二出口（OP2）连接。
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公开(公告)号：KR101064962B1
公开(公告)日：2011-09-16
申请号：KR1020080127240
申请日：2008-12-15
Applicant: 한국전자통신연구원
IPC: H01L31/09 , H01L31/101
Abstract: 본 발명에 따른 적외선 센서의 제조 방법은 기판 상에 질화 금속 박막을 증착하는 단계, 상기 질화 금속 박막을 포토리소그래피 공정을 통하여 패터닝하는 단계, 그리고 패터닝된 상기 질화 금속 박막을 환원 분위기에서 플라즈마 처리하는 단계를 포함한다. 따라서, 본 발명에 따른 적외선 센서 제조 방법은 흡수층 또는 전극 패터닝 후의 플라즈마 처리 공정에서 산소 플라즈마에 의해 부분적으로 산화된 전극 또는 흡수층을 다시 환원시켜 본래의 저항값에 근접하게 회복시켜 주며 저항값의 균일도를 크게 개선시켜주는 효과를 가진다.
멤스, 적외선 센서, 볼로미터, 전극, 흡수층-
公开(公告)号：KR1020100073070A
公开(公告)日：2010-07-01
申请号：KR1020080131655
申请日：2008-12-22
Applicant: 한국전자통신연구원
IPC: H01L27/14
CPC classification number: H01L27/14669 , H01L27/14685
Abstract: PURPOSE: A non-cooling type infrared ray sensor and a manufacturing method thereof are provided to increase the infrared absorptivity of a microbolometer by forming a dual absorption layer above/under a structure film for a microbolometer. CONSTITUTION: A reflecting layer(30) is formed on a substrate(10). A first absorption layer(60) is formed by being separated from the reflecting layer. A resistant layer(80) is formed on the first absorption layer. A second absorption layer(100) is formed on the resistant layer. An insulating layer which electrically insulates each layer is formed between the reflecting layer, the first absorption layer, the resistant layer, and the second absorption layer.
Abstract translation: 目的：提供一种非冷却型红外线传感器及其制造方法，通过在微电热计的结构膜的上方/下方形成双吸收层，来提高微电热计的红外线吸收率。 构成：在基板（10）上形成反射层（30）。 通过与反射层分离形成第一吸收层（60）。 在第一吸收层上形成有电阻层（80）。 第二吸收层（100）形成在电阻层上。 在反射层，第一吸收层，耐电介质层和第二吸收层之间形成绝缘层，该绝缘层电绝缘层。
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公开(公告)号：KR1020100069047A
公开(公告)日：2010-06-24
申请号：KR1020080127604
申请日：2008-12-16
Applicant: 한국전자통신연구원
IPC: H01L31/09 , H01L31/101
Abstract: PURPOSE: A bolometer structure including a supplementation absorbing layer, a pixel for sensing infrared rays using the same, and a manufacturing method thereof are provided to improve a processing yield by thinly forming the depth of a bolometer structure. CONSTITUTION: A first metal layer(410) is formed on the single-side of a temperature sensitivity type register(414). The first metal layer absorbs infrared rays. A second metal layer(416) is formed on the other side of the temperature sensitivity type register. The second metal layer outputs a resistance change of the temperature sensitivity type register to the outside. An insulating layer(412) is formed between the temperature sensitivity type register and the first metal layer.
Abstract translation: 目的：提供包括补充吸收层，用于感测使用其的红外线的像素的测辐射热计结构及其制造方法，以通过薄层地形成测辐射热计结构的深度来提高加工产率。 构成：第一金属层（410）形成在温度敏感型寄存器（414）的单面上。 第一金属层吸收红外线。 第二金属层（416）形成在温度敏感型寄存器的另一侧。 第二金属层将温度敏感度型寄存器的电阻变化输出到外部。 在温度敏感型寄存器和第一金属层之间形成绝缘层（412）。
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Patent Agency Ranking
公开(公告)号：KR100925483B1
公开(公告)日：2009-11-06
申请号：KR1020070126806
申请日：2007-12-07
Applicant: 한국전자통신연구원
Abstract: 본 발명은 폴리이미드 박막을 희생층으로 사용하는 멤스 구조체의 제작과정에 있어 엥커 공정시에 격자형태의 더미 패턴을 형성하여 균열을 방지하는 방법에 관한 것이다.
본 발명의 멤스 구조체 제조 방법은, (a) 기판을 형성하는 단계; 및 (b) 다수개의 비워진 영역이 구비된 형태의 희생층을 상기 기판 상에 형성하고, 상기 비워진 영역에 소자를 형성하는 단계를 포함하되, 상기 희생층의 상기 각 비워진 영역들 사이에 적어도 일방향의 격자 홈들이 위치하는 것을 특징으로 한다.
본 발명에 의해 제안된 방법을 이용함으로써 멤스 구조체의 균열 현상을 줄일 수 있으며 이를 이용하여 더욱 얇은 두께를 가지는 멤스 구조체를 제조하는 것이 현저히 용이해진다.
멤스, 폴리이미드, 희생층, 균열-
公开(公告)号：KR100925214B1
公开(公告)日：2009-11-06
申请号：KR1020070122577
申请日：2007-11-29
Applicant: 한국전자통신연구원
IPC: H01L31/09
CPC classification number: G01J5/20
Abstract: 본 발명은 잡음 감소 및 온도 감지에 대한 정밀도가 향상된 볼로미터 및 그 제조 방법에 관한 것으로, 결정화도가 높은 단결정 실리콘(Si) 또는 실리콘 게르마늄(Si
1-x Ge
x , x=0.2~0.5)으로 저항층을 형성함으로써, 종래의 비정질 실리콘 볼로미터에 비하여 1/f 잡음을 감소시킬 수 있으며, 이에 따라 적외선 센서의 온도 감지에 대한 정밀도를 획기적으로 향상시킬 수 있는 것을 특징으로 한다.
볼로미터, 저항체, 단결정, 실리콘, 실리콘 게르마늄-
公开(公告)号：KR1020090063371A
公开(公告)日：2009-06-18
申请号：KR1020070130698
申请日：2007-12-14
Applicant: 한국전자통신연구원
IPC: H01L31/09 , H01L31/101
CPC classification number: G01J5/20 , B81B3/007 , B81B2201/0207 , B81B2203/0118 , G01J5/02 , G01J5/023 , G01J5/024
Abstract: A MEMS infrared sensor and a manufacturing method thereof are provided to improve a characteristic of the sensor by increasing an area of a senor unit by reducing the area occupied by a support arm. A sacrificial layer is formed on a substrate(10) including a reflective film. A step(12) for a support arm structure of the three-dimensional structure is formed. An anchor(13) is patterned in a lower part of the step. A lower protective film(14) is deposited in the front side of the sacrificial layer. A contact hole(15) is formed in the lower protective film. An electrode(16) is formed on the lower protective film of the support arm structure. A sensor material(17) is deposited in the front side of the sacrificial layer. An upper protective film(18) is deposited in the front side of the sacrificial layer. A path(19) of the etchant material is formed by patterning the upper protective film.
Abstract translation: 提供了一种MEMS红外传感器及其制造方法，通过减小支撑臂占据的面积来增加传感器单元的面积来提高传感器的特性。 在包括反射膜的基板（10）上形成牺牲层。 形成用于三维结构的支撑臂结构的台阶（12）。 锚（13）在台阶的下部被图案化。 在牺牲层的前侧沉积下保护膜（14）。 在下保护膜中形成接触孔（15）。 电极（16）形成在支撑臂结构的下保护膜上。 传感器材料（17）沉积在牺牲层的前侧。 在牺牲层的前侧沉积上保护膜（18）。 蚀刻剂材料的路径（19）通过图案化上保护膜而形成。
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公开(公告)号：KR1020090055766A
公开(公告)日：2009-06-03
申请号：KR1020070122577
申请日：2007-11-29
Applicant: 한국전자통신연구원
IPC: H01L31/09
CPC classification number: G01J5/20
Abstract: A bolometer and a manufacturing method thereof are provided to reduce 1/f noise and improve the sense accuracy of an infrared sensor by forming a resistance layer with a single-crystal silicon and silicon-germanium. A semiconductor substrate(210) comprises a detection circuit inside it, and a reflective film(214) is built up in a partial region on the surface of the semiconductor substrate. A metal pad(212) is formed at both sides of a reflective film by a certain space, and a sensor structure(230) is formed on the substrate while being separated from the surface of the reflective film by lambda/4 of an infrared. A sensor structure comprises a body part including a resistance layer(234) composed of the single-crystal silicon having a doped impurity or a silicon-germanium.
Abstract translation: 提供测辐射热计及其制造方法以通过形成具有单晶硅和硅 - 锗的电阻层来降低1 / f噪声并提高红外传感器的感测精度。 半导体衬底（210）包括其内部的检测电路，并且反射膜（214）被构建在半导体衬底的表面上的部分区域中。 金属焊盘（212）通过一定的空间形成在反射膜的两侧，并且传感器结构（230）形成在基板上，同时通过λ/ 4的红外线与反射膜的表面分离。 传感器结构包括主体部分，其包括由具有掺杂杂质的单晶硅或硅 - 锗构成的电阻层（234）。
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公开(公告)号：KR100630805B1
公开(公告)日：2006-10-04
申请号：KR1020040095874
申请日：2004-11-22
Applicant: 한국전자통신연구원
Abstract: 본 발명은 어스펙트비가 큰 전도성 물질과 절연성 고분자 물질로 된 가스 센서용 복합재료 및 이를 제조하는 방법에 관한 것이다. 이와 같이 어스펙트비가 큰 전도성 물질을 사용함에 따라 복합재료에 첨가되는 전도성 물질의 함량을 감소시킬 수 있으면서 동시에 높은 감지 감도를 얻을 수 있다.
가스 센서, 카본 나노튜브, 감도, 분산
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