MEMS device and methods for manufacturing and using same
    81.
    发明授权
    MEMS device and methods for manufacturing and using same 有权
    MEMS器件及其制造和使用方法

    公开(公告)号:US09148075B2

    公开(公告)日:2015-09-29

    申请号:US14479615

    申请日:2014-09-08

    Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

    Abstract translation: 微机电系统(MEMS)装置包括具有形成在至少两层绝缘体上硅(SOI)衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中,并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中,并且属于第二定子齿的每个定子齿形成在第二层中。

    Kinetic energy atom-powered engine
    82.
    发明授权
    Kinetic energy atom-powered engine 有权
    动能原子发动机

    公开(公告)号:US09039359B2

    公开(公告)日:2015-05-26

    申请号:US13336881

    申请日:2011-12-23

    Applicant: Lee Ervin

    Inventor: Lee Ervin

    Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

    Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器,其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体,其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作,例如发电或运输材料。

    MEMS DEVICE AND METHODS FOR MANUFACTURING AND USING SAME
    83.
    发明申请
    MEMS DEVICE AND METHODS FOR MANUFACTURING AND USING SAME 有权
    MEMS器件及其制造方法和使用方法

    公开(公告)号:US20150002916A1

    公开(公告)日:2015-01-01

    申请号:US14479615

    申请日:2014-09-08

    Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

    Abstract translation: 微机电系统(MEMS)装置包括具有形成在至少两层绝缘体上硅(SOI)衬底上的第一转子齿和第二转子齿的转子。 属于第一转子齿的每个转子齿形成在第一层中,并且属于第二转子齿的每个转子齿形成在第二层中。 定子包括形成在至少两层SOI衬底中的第一定子齿和第二定子齿。 属于第一定子齿的每个定子齿形成在第一层中,并且属于第二定子齿的每个定子齿形成在第二层中。

    Micro electro mechanical device and manufacturing method thereof
    85.
    发明授权
    Micro electro mechanical device and manufacturing method thereof 有权
    微机电装置及其制造方法

    公开(公告)号:US08455928B2

    公开(公告)日:2013-06-04

    申请号:US13248283

    申请日:2011-09-29

    CPC classification number: H01L29/84 B81B2201/034 B81C1/00246 B81C2203/0742

    Abstract: A micro structure and an electric circuit included in a micro electro mechanical device are manufactured over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes layers formed of the same insulating film as the gate insulating layer and the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

    Abstract translation: 包含在微电子机械装置中的微结构和电路在相同的步骤中在相同的绝缘表面上制造。 在微机电装置中,包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说,结构层包括由与绝缘层相同的绝缘膜和与晶体管的半导体层相同的半导体膜形成的层。 此外,通过使用用作晶体管的栅电极,源电极和漏电极的导电层作为牺牲层来制造微结构。

    Kinetic Energy Atom-Powered Engine
    86.
    发明申请
    Kinetic Energy Atom-Powered Engine 审中-公开
    动能原子动力发动机

    公开(公告)号:US20120169068A1

    公开(公告)日:2012-07-05

    申请号:US13336881

    申请日:2011-12-23

    Applicant: Lee Ervin

    Inventor: Lee Ervin

    Abstract: A device for converting the kinetic energy of molecules into useful work includes an actuator configured to move within a fluid or gas due to collisions with the molecules of the fluid or gas. The actuator has dimensions that subject it to the Brownian motion of the surrounding molecules. The actuator utilizes objects having multiple surfaces where the different surfaces result in differing coefficients of restitution. The Brownian motion of surrounding molecules produce molecular impacts with the surfaces. Each surface then experiences relative differences in transferred energy from the kinetic collisions. The sum effect of the collisions produces net velocity in a desired direction. The controlled motion can be utilized in a variety of manners to perform work, such as generating electricity or transporting materials.

    Abstract translation: 用于将分子的动能转化为有用功的装置包括致动器,其构造成由于与流体或气体的分子碰撞而在流体或气体内移动。 致动器具有使其受到周围分子的布朗运动的尺寸。 致动器利用具有多个表面的物体,其中不同的表面导致不同的恢复系数。 周围分子的布朗运动与表面产生分子冲击。 每个表面然后经历来自动力学碰撞的转移能量的相对差异。 碰撞的总和效应产生所需方向的净速度。 受控运动可以以各种方式用于执行工作,例如发电或运输材料。

    MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
    87.
    发明申请
    MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF 有权
    微电子机械装置及其制造方法

    公开(公告)号:US20100133537A1

    公开(公告)日:2010-06-03

    申请号:US12647704

    申请日:2009-12-28

    CPC classification number: H01L29/84 B81B2201/034 B81C1/00246 B81C2203/0742

    Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

    Abstract translation: 在相同的步骤中,在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中,包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说,结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外,通过使用用作晶体管的栅电极,源电极和漏电极的导电层作为牺牲层来制造微结构。

    Micro electro mechanical device and manufacturing method thereof
    88.
    发明授权
    Micro electro mechanical device and manufacturing method thereof 有权
    微机电装置及其制造方法

    公开(公告)号:US07642114B2

    公开(公告)日:2010-01-05

    申请号:US11777409

    申请日:2007-07-13

    CPC classification number: H01L29/84 B81B2201/034 B81C1/00246 B81C2203/0742

    Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

    Abstract translation: 在相同的步骤中,在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中,包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说,结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外,通过使用用作晶体管的栅电极,源电极和漏电极的导电层作为牺牲层来制造微结构。

    Method of manufacturing a micromechanical structure
    89.
    发明授权
    Method of manufacturing a micromechanical structure 有权
    微机械结构的制造方法

    公开(公告)号:US07152300B1

    公开(公告)日:2006-12-26

    申请号:US09702881

    申请日:2000-11-01

    Inventor: Kenichiro Suzuki

    Abstract: A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.

    Abstract translation: 微致动器包括固定元件,可移动元件和第一微结构。 固定元件固定在基板上,并且具有以预定间距排列的多个固定元件电极。 可移动元件具有与固定元件电极相对的多个可移动元件电极。 通过施加跨过固定元件和可移动元件的电压来移动可移动元件。 第一微结构形成在可移动元件和固定元件的至少一个相对表面上,以防止可移动元件附接到固定元件。

Patent Agency Ranking