Micro actuator
    82.
    发明专利
    Micro actuator 审中-公开
    微动执行器

    公开(公告)号:JP2009050135A

    公开(公告)日:2009-03-05

    申请号:JP2007240406

    申请日:2007-09-18

    CPC classification number: H01H59/0009 B81B3/0075 B81B2201/038 H01H1/06

    Abstract: PROBLEM TO BE SOLVED: To solve the problem that the friction between a board and a substrate of a micro actuator and a drive voltage cause shorter life of a component. SOLUTION: The micro actuator is arranged on a substrate 22, and includes a board 20 and a bushing 21. The rear end of the board 20 is formed in triangle with tapered tip or in arc. Otherwise, at least one projection is formed on the bottom surface at the rear end of the board 20. Under this configuration, when the rear end of the board 20 contacts the substrate 22, contacting between the rear end of the board 20 and the substrate is nonplanar. So, the friction between the board 20 and the substrate 22 as well as driving voltage can be reduced effectively, for longer life of components of the micro actuator. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:为了解决微型致动器的基板和基板之间的摩擦和驱动电压导致部件寿命缩短的问题。 解决方案:微型致动器布置在基板22上,并且包括板20和衬套21.板20的后端形成为具有锥形尖端或弧形的三角形。 否则,在板20的后端的底面上形成至少一个突起。在该构造下,当板20的后端与基板22接触时,板20的后端与基板 是非平面的 因此,可以有效地降低板20和基板22之间的摩擦以及驱动电压,以延长微型致动器的部件的使用寿命。 版权所有(C)2009,JPO&INPIT

    Micro electromechanical system actuator

    公开(公告)号:JP2004001196A

    公开(公告)日:2004-01-08

    申请号:JP2003088840

    申请日:2003-03-27

    Abstract: PROBLEM TO BE SOLVED: To provide a MEMS actuator to use a bimorph configuration by which an out-of-plane motion is made possible. SOLUTION: A bimorph electrostatic actuator 170 includes a cantilever type bending bimorph arm 178 which has one end 177 fixed to a planar substrate and is insulated from the planar substance. The bimorph arm 178 is generally parallel with the planar substrate in an electrostatically actuated state. In a relaxed state, a free end of the bimorph arm 178 extends out of the the plane of the planar substrate by residual stress in the bimorph arm 178. This actuator 170 includes a substrate electrode which is fixed to the substrate and electrically separated therefrom, and is alighned with the bimorph arm 178 to be arranged under the bimorph arm 178. A potential difference to be applied between the bimorph arm 178 and the substrate electrode imparts electrostatically attractive force therebetween, thus the actuator 170 is actuated. COPYRIGHT: (C)2004,JPO

    마이크로전자기계 액튜에이터
    87.
    发明授权
    마이크로전자기계 액튜에이터 失效
    마이크로전자기계액튜에이터

    公开(公告)号:KR100439423B1

    公开(公告)日:2004-07-09

    申请号:KR1020020002495

    申请日:2002-01-16

    Abstract: The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.

    Abstract translation: 本发明涉及一种微机电致动器。 本发明的电磁型微机电致动器具有形成在磁性物质的上侧的微电子基板中的导电束,使得导电束能够平行于微型地移动到平面内模式 电子基板取决于电流流动的方向。 因此,微机电致动器可应用于需要面内模式的大多数电磁微机电系统。

    작동 부재 및 그 제조 방법
    89.
    发明公开
    작동 부재 및 그 제조 방법 有权
    작동부재및그제조방법

    公开(公告)号:KR1020030045843A

    公开(公告)日:2003-06-11

    申请号:KR1020037005869

    申请日:2001-10-31

    Abstract: 본 발명은, 마주 놓인 경계면에 각각 전극이 하나씩 제공된 탄성 중합체 바디를 포함하는 작동 부재에 관한 것이다. 본 발명의 목적은, 상기와 같은 작동 부재의 역학 관계를 개선시키는 것이다. 이 목적을 위해, 적어도 하나의 경계면에는 적어도 하나의 파형 섹션이 제공되며, 상기 파형 섹션은 가로 방향에 평행하게 진행하는 융기부(13) 및 함물부를 극단부로서 포함한다. 상기 섹션은 상기 극단부(13, 14)의 적어도 한 부분을 완전하게 커버하면서 상기 파형 섹션을 가로질러 뻗는 전극에 의해서 커버된다.

    Abstract translation: 本发明涉及一种包括弹性体的致动构件,该弹性体在相对的周边上设置有一个电极。 本发明的目的是改善这种致动构件的动态性。 为此,至少一个周边设置有至少一个波形部分,该波形部分包括作为平行于横向布置的极限的隆起和凹陷。 所述部分覆盖有完全覆盖至少一部分极限并且延伸跨过波形部分的电极。

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