Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a frst process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An apparatus has a tank with an interior for containing water, a nozzle for directing ozonated water out of the spray apparatus, and an electrolytic cell located between the nozzle and the tank. The electrolytic cell is configured to ozonate water as the water flows from the tank to the nozzle. The apparatus also includes a power source for providing electric potential to the electrolytic cell. The tank, nozzle, and electrolytic cell all are part of a single spray bottle or dispenser (e.g., like a soap dispenser).
Abstract:
An apparatus has a tank with an interior for containing water, a nozzle for directing ozonated water out of the spray apparatus, and an electrolytic cell located between the nozzle and the tank. The electrolytic cell is configured to ozonate water as the water flows from the tank to the nozzle. The apparatus also includes a power source for providing electric potential to the electrolytic cell. The tank, nozzle, and electrolytic cell all are part of a single spray bottle or dispenser (e.g., like a soap dispenser).
Abstract:
A silent discharge plasma apparatus includes a dielectric member, a pair of electrodes opposed to each other across the dielectric member and an alternating-current source applying an alternating-current voltage between the electrodes and causing a discharge. A gas is supplied to a discharge space, where discharge occurs, and a plasma is produced. At least one of the electrodes includes a conductive power feeding thin film on the dielectric member. When the dielectric member is destroyed and an arc discharge develops between the electrodes, the power feeding thin film is eliminated or oxidized, and the arc discharge is stopped.
Abstract:
A method for generating ozone from gases containing oxygen. The ozone is generated by silent electric discharge in an installation comprising at least two gaps, which are traversed by the gas, each of said gaps being formed between an electrode and a dielectric that separates each gap from an additional electrode. According to the invention, the restriction of the volumetric flow of the gas of at least one gap is controlled.
Abstract:
An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
An ozone generator for generating ozone by applying a specified process to oxygen by discharge includes a first raw material gas supply unit for supplying the oxygen as a first raw material gas, and a second raw material gas supply unit for supplying an oxide compound gas as a second raw material gas, in which, by excited light, excited and generated by a discharge in the oxygen and the oxide compound gas, the oxide compound gas is dissociated, or the oxide compound gas is excited accelerating dissociation of the oxygen, and ozone is generated. In this way, ozone generation efficiency is raised.