公开(公告)号：US07391518B1

公开(公告)日：2008-06-24

申请号：US09607827

申请日：2000-06-30

Applicant: Peter Schwarz ,  Uwe Sperling

Inventor： Peter Schwarz ,  Uwe Sperling

IPC: G01N21/00 ,  G01N21/55 ,  G01N21/47 ,  G01B11/30

CPC classification number: G01J3/10 ,  G01B11/30 ,  G01J3/2803 ,  G01J3/465 ,  G01J3/501 ,  G01J3/51 ,  G01J2003/1282 ,  G01N21/255

Abstract: The present invention relates to a device and method for making quantified determinations of the quality of surfaces and wherein the device comprises an optical system with a first optical means and a second optical means as well as a control and evaluation means and an output (display) means. Said first optical means comprises an illuminating means having at least one LED as its light source and serves the function of illuminating the measurement surface at a predetermined angle. Said second optical means is likewise directed at a predetermined angle to the measurement surface and receives the reflected light. A photo sensor of said second optical means emits an electrical measurement signal which is characteristic of said reflected light.The light emitted from the illuminating means is configured such that its spectral characteristic comprises blue, green and red spectral components in the visible light spectrum. A filter means is arranged in the path of radiation between the light source and the photo sensor and which changes the spectral characteristics of the incident light so as to approach a predetermined spectral distribution. The control and evaluation means control the measurement sequence and evaluate the reflected light, deriving therefrom at least one parameter which is characteristic of the surface.

Abstract translation: 本发明涉及一种用于对表面质量进行量化确定的装置和方法，其中该装置包括具有第一光学装置和第二光学装置的光学系统以及控制和评估装置以及输出（显示） 手段。 所述第一光学装置包括具有至少一个LED作为其光源并具有以预定角度照射测量表面的功能的照明装置。 所述第二光学装置同样指向与测量表面成预定的角度，并接收反射光。 所述第二光学装置的光传感器发射作为所述反射光的特征的电测量信号。 从照明装置发射的光被配置为使得其光谱特性包括可见光光谱中的蓝色，绿色和红色光谱分量。 滤光器装置布置在光源和光传感器之间的辐射路径中，并且改变入射光的光谱特性以接近预定的光谱分布。 控制和评估装置控制测量序列并评估反射光，由此导出至少一个是表面特征的参数。

公开(公告)号：US07304735B2

公开(公告)日：2007-12-04

申请号：US11096448

申请日：2005-04-01

Applicant: David Y. Wang ,  James L. Hendrix ,  Adam E. Norton

Inventor： David Y. Wang ,  James L. Hendrix ,  Adam E. Norton

IPC: G01J3/28

CPC classification number: G01N21/55 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/14 ,  G01J3/18 ,  G01J2003/1213 ,  G01J2003/1282 ,  G01N21/4788 ,  G01N21/9501 ,  G01N21/956

Abstract: An optical filter for the selective attenuation of specific wavelengths of light includes at least one spectrally dispersive element, such as a diffraction grating or prism, in combination with an optical filter. A dispersive element separates broadband light into a constituent wavelength spread in angle space. An optical filter, or filter array, can block and/or attenuate specific wavelengths or wavelength ranges of interest while the light is angularly dispersed. A second dispersive element can recombine this filtered, separated wavelength fan of light into a coaxial broadband beam having a smoother intensity profile than the unfiltered beam.

Abstract translation: 用于特定波长的光的选择性衰减的滤光器包括与滤光器组合的至少一个光谱色散元件，例如衍射光栅或棱镜。 分散元件将宽带光分成在角度空间中扩散的构成波长。 光学滤波器或滤波器阵列可以在光被角度地分散时阻挡和/或衰减特定的波长或波长范围。 第二分散元件可以将该经过滤波的分离的波长风扇重新组合成具有比未滤波光束更平滑的强度分布的同轴宽带光束。

公开(公告)号：US20070153277A1

公开(公告)日：2007-07-05

申请号：US11362582

申请日：2006-02-24

Applicant: Tarja Shakespeare ,  John Shakespeare

Inventor： Tarja Shakespeare ,  John Shakespeare

IPC: G01J3/46 ,  G01J1/42

CPC classification number: G01J3/10 ,  G01J3/50 ,  G01J3/501 ,  G01J3/524 ,  G01J2003/1282 ,  G01J2003/468 ,  G01N21/86

Abstract: Devices, systems, and methods for measuring the color of a sample are disclosed. The exemplary device may have one or more light emitting diodes for directing a beam of ultraviolet light onto the sample and may also have one or more light emitting diodes for directing a beam of visible light onto the sample. The exemplary device may have a component for controlling the timing and power of operation of each light emitting diode. The exemplary device may also have at least one light detector for receiving the beam of light reflected from or transmitted through the sample and measuring at least one wavelength band of the received light. The exemplary device may further have a measurement analyzer for determining the color of the sample based on the measured light. The color may be determined for a specified illuminator incorporating effects of fluorescence.

Abstract translation: 公开了用于测量样品颜色的装置，系统和方法。 示例性装置可以具有一个或多个用于将紫外光束引导到样品上的发光二极管，并且还可以具有一个或多个用于将可见光束引导到样品上的发光二极管。 示例性装置可以具有用于控制每个发光二极管的操作的定时和功率的部件。 示例性装置还可以具有至少一个光检测器，用于接收从样品反射或透射通过样品并测量接收光的至少一个波长带的光束。 示例性装置还可以具有用于基于所测量的光来确定样品的颜色的测量分析器。 可以针对包含荧光效应的指定照明器确定颜色。

公开(公告)号：US20070035740A1

公开(公告)日：2007-02-15

申请号：US11504120

申请日：2006-08-15

Applicant: Jon Nisper ,  Michael Mater

Inventor： Jon Nisper ,  Michael Mater

IPC: G01N21/47

CPC classification number: G01J3/28 ,  G01J3/0275 ,  G01J3/0289 ,  G01J3/10 ,  G01J3/50 ,  G01J3/501 ,  G01J3/51 ,  G01J3/513 ,  G01J3/524 ,  G01J2003/1282 ,  G01J2003/2866 ,  G01J2003/467

Abstract: An optical system comprising an optical instrument and a processing unit. The optical instrument may comprise an illumination source and a sensor. The processing unit may comprise a data storage having stored thereon a characterization of the illumination source and a characterization of the sensor. The processing unit may also comprise a computer configured to calculate a system response of the illumination source and the receiving element considering the characterization of the illumination source and the characterization of the receiving element.

Abstract translation: 一种光学系统，包括光学仪器和处理单元。 光学仪器可以包括照明源和传感器。 处理单元可以包括其上存储有照明源的表征和传感器的表征的数据存储器。 处理单元还可以包括计算机，其被配置为考虑照明源的特征和接收元件的表征来计算照明源和接收元件的系统响应。

公开(公告)号：US20060097188A1

公开(公告)日：2006-05-11

申请号：US11301439

申请日：2005-12-13

Applicant: Volker Seyfried

Inventor： Volker Seyfried

IPC: G01N21/64

CPC classification number: G01N21/6458 ,  G01J3/0229 ,  G01J2003/1282 ,  G02B21/0004 ,  G02B21/0032 ,  G02B21/0064 ,  G02B21/0068 ,  G02B21/008

Abstract: A method for microscopy includes generating pulsed illuminating light including wavelengths in a spectral region. A detection spectral region within the spectral region is defined. Using a dynamically controllable mask, light components of the illuminating light that comprise wavelengths within the detection spectral region are influenced. A specimen is illuminated with the influenced illuminating light. Detection light proceeding from the specimen within the detection spectral region is detected.

Abstract translation: 显微镜的方法包括产生包括光谱区域中的波长的脉冲照明光。 定义光谱区域内的检测光谱区域。 使用动态可控制的掩模，影响包括检测光谱区域内的波长的照明光的光分量。 受影响的照明光照射样本。 检测从检测光谱区域内的样本进行的检测光。

公开(公告)号：US20050194516A1

公开(公告)日：2005-09-08

申请号：US10792850

申请日：2004-03-05

Applicant: Roy Littleton

Inventor： Roy Littleton

IPC: G01J1/32

CPC classification number: G01J3/108 ,  G01J1/08 ,  G01J3/0286 ,  G01J5/522 ,  G01J2003/1282

Abstract: An apparatus for emulating various known night sky illumination conditions. The apparatus comprises a plurality of electrically-powerable LEDs which are disposed in an array and have respective spectral curves centered at different wavelengths in the visible to the short wave infrared wavebands, and means for fixing the temperatures of the LEDs to avoid temperature-induced changes in their spectral curves. Additionally, the apparatus includes means for varying the light intensities of the individual LEDs so that the combination of their spectral curves matches the spectrum of the known night sky illumination condition to be emulated, and means for regulating the total amount of light collected from the array so that the cumulative spectrum has the same intensity as the known night sky illumination condition to be emulated.

Abstract translation: 用于模拟各种已知夜空照明条件的装置。 该装置包括多个可电功率的LED，它们以阵列的形式设置，并且具有以对于短波红外波段的可见光的不同波长为中心的各个光谱曲线，以及用于固定LED的温度以避免温度引起的变化的装置 在它们的光谱曲线。 此外，该装置包括用于改变各个LED的光强度的装置，使得它们的光谱曲线的组合与待仿真的已知夜空照明条件的光谱匹配，以及用于调节从阵列收集的光的总量的装置 使得累积光谱具有与要仿真的已知夜空照明条件相同的强度。

公开(公告)号：US20050078187A1

公开(公告)日：2005-04-14

申请号：US10481304

申请日：2002-06-19

Applicant: Henrik Fabricius ,  Jan Hansen ,  Jens Jensen ,  Hans Nielsen

Inventor： Henrik Fabricius ,  Jan Hansen ,  Jens Jensen ,  Hans Nielsen

IPC: G01J3/46 ,  G01J3/51 ,  H04N17/02 ,  H04N17/04 ,  H04N17/00

CPC classification number: G01J3/51 ,  G01J3/0208 ,  G01J3/0251 ,  G01J3/465 ,  G01J3/506 ,  G01J3/524 ,  G01J2003/1213 ,  G01J2003/1278 ,  G01J2003/1282 ,  G01J2003/467 ,  H04N17/02 ,  H04N17/04

Abstract: A combination of a response adapting filter (11, 12, 13) and a detector (14), the detector having a predetermined spectral response function to electromagnetic radiation, a method of its preparation, a camera (11, 12, 13, 14, 15) comprising such a response filter and detector combination, and use thereof in e.g. colour measurements in combination with an integrating cavity and a vision inspection system of natural and/or a synthetic material surfaces; also a display and detector combination, a method of displaying optical information, a colour display and monitor system, and a method of controlling colour display, said combination, systems and methods comprising such combination of a response adapting filter and a detector.

Abstract translation: 响应适应滤波器（11,12,13）和检测器（14）的组合，所述检测器具有对电磁辐射的预定光谱响应函数，其准备方法，相机（11,12,13,14， 15），其包括这样的响应滤波器和检测器组合，以及其在例如 颜色测量结合积分腔和天然和/或合成材料表面的视觉检查系统; 显示和检测器组合，显示光学信息的方法，彩色显示和监视系统以及控制彩色显示的方法，所述组合，系统和方法包括响应适配滤波器和检测器的组合。

公开(公告)号：US20030223248A1

公开(公告)日：2003-12-04

申请号：US10163233

申请日：2002-06-04

Inventor： Paul J. Cronin ,  Daniel Orband ,  Stephen D. Fantone ,  Peter J. Miller

IPC: F21V007/04

CPC classification number: G01J3/10 ,  G01J3/2823 ,  G01J2003/1282 ,  G01N21/255 ,  G01N2201/062 ,  G01N2201/0633 ,  G01N2201/0635 ,  G01N2201/0638

Abstract: The invention features a multi-spectral microscopy system for illuminating a sample with light of a selectable spectral content and generating an image of the sample in response to the illumination. The multi-spectral microscopy system includes a multispectral illuminator that provides output radiation having the selectable spectral content. A preferred set of optical arrangements for the multispectral illuminator generates the output radiation so that the spectral content of the output radiation is substantially uniform across its transverse profile. Furthermore, the multispectral illuminator can include monitoring optics and a corresponding detector array that independently monitors the output in each spectral band of the radiation produced by the multispectral illuminator. The monitoring provides calibration, feedback, and/or source aging information to insure robust and reliable performance for the multispectral illuminator. The multi-spectral microscopy system also includes a microscope which illuminates the sample with light derived from the output of the multispectral illuminator, and beam modification optics, which modify the output from the lamp prior to the microscope to increase the light efficiency of the microscope and fully exploit field of view and resolution of the microscope.

Abstract translation: 本发明的特征在于一种多光谱显微镜系统，用于利用可选光谱含量的光照射样品，并响应于照明产生样品的图像。 多光谱显微镜系统包括多光谱照明器，其提供具有可选光谱含量的输出辐射。 用于多光谱照明器的优选的一组光学装置产生输出辐射，使得输出辐射的光谱含量在其横向轮廓上基本上是均匀的。 此外，多光谱照明器可以包括监视光学器件和相应的检测器阵列，其独立地监视由多光谱照明器产生的辐射的每个光谱带中的输出。 监控提供校准，反馈和/或源老化信息，以确保多光谱照明器的稳健可靠的性能。 多光谱显微镜系统还包括用来自多光谱照明器的输出的光照射样品的显微镜以及在显微镜之前改变来自灯的输出的光束修改光学器件，以提高显微镜的光效率， 充分利用显微镜的视野和分辨率。

公开(公告)号：US20030011832A1

公开(公告)日：2003-01-16

申请号：US09851099

申请日：2001-05-08

Inventor： Chin Chang

IPC: G06K001/00 ,  G06F015/00

CPC classification number: G01J1/32 ,  G01J3/10 ,  G01J3/465 ,  G01J3/506 ,  G01J3/51 ,  G01J3/513 ,  G01J2001/4252 ,  G01J2003/1282

Abstract: A system and method for identifying primary color chromaticity coordinates of a red, green and blue light sources includes a tristimulus filter the receives the combined light generated by the light sources. The light sources are preferably a group of red, green and blue light emitting diodes. A processor is configured to generate a plurality of test control signals that sets a desired intensity value for each of the red, green and blue LEDs. Based on these test control signals, the system is configured to measure three sets of chromaticity coordinates corresponding to the combined light generated by these red, green and blue LEDs. The processor thereafter calculates the color chromaticity coordinates of the LEDs, based on the measured coordinates of the combined light, and the intensity values of the LEDs, and the intensity values of the combined light. This calculation in accordance with one embodiment of the invention is accomplished by solving a matrix equation. Once the color coordinates of the individual light sources is uniquely calculated, the system measures the intensity values of light for each of the light sources that is necessary to provide a combined light with a desired color chromaticity coordinates. These intensity values can be used in a feedback control circuit to maintain the desired combined light as the LEDs change their characteristics from batch to batch or over time.

Abstract translation: 用于识别红色，绿色和蓝色光源的原色色度坐标的系统和方法包括三刺激滤光器，其接收由光源产生的组合光。 光源优选为一组红色，绿色和蓝色发光二极管。 处理器被配置为产生多个测试控制信号，其为红色，绿色和蓝色LED中的每一个设置期望的强度值。 基于这些测试控制信号，该系统被配置为测量与由这些红色，绿色和蓝色LED产生的组合光相对应的三组色度坐标。 此后，处理器基于测量的组合光的坐标，以及LED的强度值和组合的光的强度值来计算LED的色彩色度坐标。 根据本发明的一个实施例的该计算通过求解矩阵方程来实现。 一旦独立地计算出各个光源的颜色坐标，系统就可以测量每个光源的光强度值，这些光源需要提供具有所需颜色色度坐标的组合光。 这些强度值可以用在反馈控制电路中，以保持所期望的组合光，因为LED随着时间的推移而逐批改变其特性。

公开(公告)号：TWI600169B

公开(公告)日：2017-09-21

申请号：TW103104469

申请日：2014-02-11

Applicant: 旭化成微電子股份有限公司 ,  ASAHI KASEI MICRODEVICES CORPORATION

Inventor： 福中敏昭 ,  FUKUNAKA, TOSHIAKI ,  柯曼爾古 愛迪生 古梅斯 ,  CAMARGO, EDSON GOMES ,  西田聰佑 ,  NISHIDA, SOSUKE ,  高木雄太 ,  TAKAGI, YUTA

IPC: H01L31/02 ,  H01L31/0232 ,  G01J1/04

CPC classification number: G01J3/12 ,  G01J1/0403 ,  G01J1/0407 ,  G01J1/0488 ,  G01J3/28 ,  G01J5/0205 ,  G01J5/04 ,  G01J5/045 ,  G01J5/046 ,  G01J5/0803 ,  G01J5/0862 ,  G01J2003/1213 ,  G01J2003/1282 ,  G02B3/0012 ,  H01L31/02325 ,  H01L31/09 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014