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公开(公告)号：JP5657444B2
公开(公告)日：2015-01-21
申请号：JP2011064462
申请日：2011-03-23
Applicant: 東京エレクトロン株式会社
IPC: G01K11/12
CPC classification number: G01K11/12 , G01J5/0007 , G01J5/0044 , G01J5/0821 , G01J2005/583
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公开(公告)号：JPWO2007094435A1
公开(公告)日：2009-07-09
申请号：JP2008500553
申请日：2007-02-15
Applicant: 国立大学法人 岡山大学 , 国立大学法人 岡山大学
CPC classification number: G01J5/04 , G01J5/08 , G01J5/0803 , G01J5/0809 , G01J5/0896 , G01J5/58 , G01J2005/583
Abstract: レーザ光を照射する光源部と、この光源部から照射されたレーザ光を試験光と参照光に分離する分離部と、試験光の光路を温度が計測される被計測空間を横断させて配置する受感部と、被計測空間を横断した試験光と参照光とを干渉させて干渉状態の変動を検出することにより温度の変化を検出する検出部とを備えた温度センサにおいて、信頼性の高い温度変動の検出を可能とする温度センサを提供する。受感部は試験光の光路と平行とした筒状のケーシングの先端に設けるとともに、このケーシングの基端に分離部を設ける。ケーシングの先端には試験光を通過させる透明体を備えた先端壁を設け、この透明体を通過した試験光を受感部に到達させるとともに、先端壁には参照光を反射する反射体を設ける。
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公开(公告)号：JP4257438B2
公开(公告)日：2009-04-22
申请号：JP2008500553
申请日：2007-02-15
Applicant: 国立大学法人 岡山大学
CPC classification number: G01J5/04 , G01J5/08 , G01J5/0803 , G01J5/0809 , G01J5/0896 , G01J5/58 , G01J2005/583
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公开(公告)号：EP2032956A2
公开(公告)日：2009-03-11
申请号：EP07873910.9
申请日：2007-05-22
Applicant: Regents Of The University Of Minnesota
Inventor： TALGHADER, Joseph , WANG, Yuyan , SUTTON, Michael, S.
CPC classification number: G01J3/26 , G01J5/0225 , G01J5/023 , G01J5/045 , G01J5/08 , G01J5/0809 , G01J5/084 , G01J5/0853 , G01J5/0893 , G01J5/20 , G01J5/58 , G01J5/60 , G01J2005/583
Abstract: A cavity thermal detector assembly (10) is presented that allows both tunable narrowband and broadband operation. This allows for high light efficiency, low thermal time constant, and flexibility in designing the optical path. The thermal detector/filter layers are part of the top mirror or mirrors (12) of a Gires-Tournois-type optical cavity and provide absorption and reflection that can be adjusted to the desired width and position of the detected band. Tuning, if desired, can be achieved by applying micromechanical methods. Broadband operation may be achieved by bringing the sensor close to the bottom mirror. In this mode, the sensor or its supports may or may not touch over a small area.
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公开(公告)号：EP1953511A3
公开(公告)日：2008-10-29
申请号：EP08103928.1
申请日：2006-08-22
Inventor： Urey, Hakan , Torun, Hamdi
CPC classification number: G01J5/58 , G01J5/38 , G01J5/40 , G01J2005/583
Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.
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Patent Agency Ranking86.发明公开Thermal imaging detector array with optial readout 审中-公开Thermische Bildwandlermatrix mit optischem Leseverfahren
公开(公告)号：EP1953511A2
公开(公告)日：2008-08-06
申请号：EP08103928.1
申请日：2006-08-22
Inventor： Urey, Hakan , Torun, Hamdi
CPC classification number: G01J5/58 , G01J5/38 , G01J5/40 , G01J2005/583
Abstract: The present invention relates to thermal detectors and the application of such to devices and methods of detecting the infrared images using thermal detectors. For example, by using optical measuring systems in combination with at least one light source to measure changes position of a movable anchored surface coupled to an absorption surface such that the movable anchored surface changes position due to absorption of infrared radiation by the absorption surface. In another example, by combining a detector pixel (infrared radiation sensitive) with an optical measuring device such as an interferometer.
Abstract translation: 本发明涉及热检测器及其应用于使用热检测器检测红外图像的装置和方法。 例如，通过使用与至少一个光源组合的光学测量系统来测量耦合到吸收表面的可移动锚定表面的变化位置，使得可移动锚定表面由于吸收表面吸收红外辐射而改变位置。 在另一示例中，通过将检测器像素（红外辐射敏感）与诸如干涉仪之类的光学测量装置组合。
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公开(公告)号：EP0943085A1
公开(公告)日：1999-09-22
申请号：EP97947154.0
申请日：1997-12-01
Applicant: Graham Thomas Consultants Limited
Inventor： ANDREOU, Michael Paul
CPC classification number: G01J5/0014 , G01J3/453 , G01J3/4535 , G01J2005/0077 , G01J2005/068 , G01J2005/583 , G01N21/3504 , G01N21/3518 , G01N2021/1765 , G01N2021/1774 , G01N2021/1793 , G01N2021/3595 , H04N5/33
Abstract: There is disclosed a method for imaging a quantity of gas present in the atmosphere of a selected area comprising the steps of: directing background infra-red radiation from the selected area into an interferometer; imaging the infra-red radiation emerging from the interferometer onto at least one infra-red detector; obtaining a plurality of Fourier transform infra-red spectra in the 8-14 νm spectral region, each spectrum corresponding to infra-red radiation collected from a different portion of the selected area; and displaying in a suitable form an infra-red image, said infra-red image comprising the plurality of infra-red spectra, or quantities derived therefrom; in which the temperature of the quantity of gas or ambient temperature is measured, the temperature of the background is measured, and the difference between the two measured temperatures is used to derive gas column densities from said infra-red spectra.
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公开(公告)号：EP0057568B1
公开(公告)日：1987-04-01
申请号：EP82300419.7
申请日：1982-01-27
Applicant: EXXON RESEARCH AND ENGINEERING COMPANY
Inventor： Kaldor, Andrew , Robinowitz, Paul , Stein, Alexander
CPC classification number: G01J5/522 , B62B13/10 , G01J5/0044 , G01J5/08 , G01J5/0806 , G01J5/0834 , G01J5/0846 , G01J5/0862 , G01J5/0871 , G01J5/0896 , G01J9/04 , G01J2005/0051 , G01J2005/0074 , G01J2005/583
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公开(公告)号：EP0057568A3
公开(公告)日：1982-09-08
申请号：EP82300419
申请日：1982-01-27
Applicant: EXXON RESEARCH AND ENGINEERING COMPANY
Inventor： Kaldor, Andrew , Robinowitz, Paul , Stein, Alexander
CPC classification number: G01J5/522 , B62B13/10 , G01J5/0044 , G01J5/08 , G01J5/0806 , G01J5/0834 , G01J5/0846 , G01J5/0862 , G01J5/0871 , G01J5/0896 , G01J9/04 , G01J2005/0051 , G01J2005/0074 , G01J2005/583
Abstract: The present invention concerns an unique laser radiometer capable of accurately measuring the radiation temperature of a radiant surface and independently measuring the surface's emissivity. A narrow-band radiometer is combined with a laser reflectometer to measure concurrently radiance and emissivity of a remote, hot surface. Together, radiance and emissivity yield the true surface temperature of the remote target. A narrow receiver bandwidth is attained by one of two methods; (a) heterodyne detection or (b) optical filtering. A direct measurement of emissivity is used to adjust the value obtained for the thermal radiation signal to substantially enhance the accuracy of the temperature measurement for a given subject surface. The technique provides substantially high detection sensitivity over a very narrow spectral bandwidth.
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公开(公告)号：EP0057568A2
公开(公告)日：1982-08-11
申请号：EP82300419.7
申请日：1982-01-27
Applicant: EXXON RESEARCH AND ENGINEERING COMPANY
Inventor： Kaldor, Andrew , Robinowitz, Paul , Stein, Alexander
CPC classification number: G01J5/522 , B62B13/10 , G01J5/0044 , G01J5/08 , G01J5/0806 , G01J5/0834 , G01J5/0846 , G01J5/0862 , G01J5/0871 , G01J5/0896 , G01J9/04 , G01J2005/0051 , G01J2005/0074 , G01J2005/583
Abstract: The present invention concerns an unique laser radiometer capable of accurately measuring the radiation temperature of a radiant surface and independently measuring the surface's emissivity. A narrow-band radiometer is combined with a laser reflectometer to measure concurrently radiance and emissivity of a remote, hot surface. Together, radiance and emissivity yield the true surface temperature of the remote target. A narrow receiver bandwidth is attained by one of two methods; (a) heterodyne detection or (b) optical filtering. A direct measurement of emissivity is used to adjust the value obtained for the thermal radiation signal to substantially enhance the accuracy of the temperature measurement for a given subject surface. The technique provides substantially high detection sensitivity over a very narrow spectral bandwidth.
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