POLARIZATION ANALYSIS APPARATUS
    81.
    发明申请
    POLARIZATION ANALYSIS APPARATUS 有权
    极化分析装置

    公开(公告)号:US20150168291A1

    公开(公告)日:2015-06-18

    申请号:US14568122

    申请日:2014-12-12

    CPC classification number: G01N21/211 G01N2021/213 G01N2201/0675

    Abstract: Provided is a polarization analysis apparatus that can quickly measure the polarization properties of a sample. The polarization analysis apparatus includes a light source configured to emit light in a predetermined wavelength region, a polarizer configured to transmit the light emitted from the light source, a spatial phase modulator configured to transmit the light from the sample, an analyzer configured to transmit the light that has passed through the spatial phase modulator, and an imaging spectrometer configured to receive the light that has passed through the analyzer. The spatial phase modulator is formed of a birefringent material, and is configured to have different phase differences at respective positions in a first direction in a plane orthogonal to an optical axis. The imaging spectrometer disperses the received light in a second direction that is different from the first direction in the plane orthogonal to the optical axis.

    Abstract translation: 提供了一种可以快速测量样品的偏振特性的偏振分析装置。 所述偏振光分析装置包括被配置为发射预定波长区域的光的光源,被配置为透射从所述光源发射的光的偏振器,被配置为透射来自所述样品的光的空间相位调制器, 已经通过空间相位调制器的光和被配置为接收已经通过分析器的光的成像光谱仪。 空间相位调制器由双折射材料形成,并且被配置为在与光轴正交的平面中的第一方向上的各个位置处具有不同的相位差。 成像光谱仪将接收的光在与光轴正交的平面中与第一方向不同的第二方向分散。

    SYSTEMS AND METHODS FOR SELECTIVE DETECTION AND IMAGING IN COHERENT RAMAN MICROSCOPY BY SPECTRAL-TEMPORAL EXCITATION SHAPING
    84.
    发明申请
    SYSTEMS AND METHODS FOR SELECTIVE DETECTION AND IMAGING IN COHERENT RAMAN MICROSCOPY BY SPECTRAL-TEMPORAL EXCITATION SHAPING 有权
    通过光谱激发成像在相干拉曼显微镜中选择性检测和成像的系统和方法

    公开(公告)号:US20100188496A1

    公开(公告)日:2010-07-29

    申请号:US12690579

    申请日:2010-01-20

    Abstract: A microscopy imaging system is disclosed that includes a light source system, a spectral shaper, a modulator system, an optics system, an optical detector and a processor. The light source system is for providing a first train of pulses and a second train of pulses. The spectral shaper is for spectrally modifying an optical property of at least some frequency components of the broadband range of frequency components such that the broadband range of frequency components is shaped producing a shaped first train of pulses to specifically probe a spectral feature of interest from a sample, and to reduce information from features that are not of interest from the sample. The modulator system is for modulating a property of at least one of the shaped first train of pulses and the second train of pulses at a modulation frequency. The optical detector is for detecting an integrated intensity of substantially all optical frequency components of a train of pulses of interest transmitted or reflected through the common focal volume. The processor is for detecting a modulation at the modulation frequency of the integrated intensity of substantially all of the optical frequency components of the train of pulses of interest due to the non-linear interaction of the shaped first train of pulses with the second train of pulses as modulated in the common focal volume, and for providing an output signal for a pixel of an image for the microscopy imaging system.

    Abstract translation: 公开了一种显微镜成像系统,其包括光源系统,光谱整形器,调制器系统,光学系统,光学检测器和处理器。 光源系统用于提供第一脉冲串和第二脉冲串。 频谱整形器用于频谱修改频率分量的宽带范围的至少一些频率分量的光学特性,使得频率分量的宽带范围成形,产生成形的第一脉冲串,从而特别地探测来自 样本,并从样本中不感兴趣的特征中减少信息。 调制器系统用于以调制频率调制成形的第一脉冲序列和第二脉冲串中的至少一个的性质。 光学检测器用于检测通过公共焦点体积传输或反射的感兴趣的脉冲串的基本上所有的光学频率分量的积分强度。 处理器用于检测由于成形的第一脉冲序列与第二脉冲串的非线性相互作用而导致的感兴趣的脉冲串的基本上所有的光学频率分量的积分强度的调制频率的调制 在公共焦点体积中调制,并且为显微镜成像系统提供用于图像的像素的输出信号。

    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
    85.
    发明授权
    Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering 失效
    使用动态可编程光学空间滤波对大平面图案化介质进行高通量检测的方法和装置

    公开(公告)号:US07180084B2

    公开(公告)日:2007-02-20

    申请号:US11377080

    申请日:2006-03-15

    Abstract: In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

    Abstract translation: 在具有周期结构的平面物体的检查系统中,使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波(OFF)在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查,同时保持高检测灵敏度。

    Spatial light modulator spectroscopy

    公开(公告)号:US12072241B2

    公开(公告)日:2024-08-27

    申请号:US17180109

    申请日:2021-02-19

    Abstract: In described examples, a spatial light modulator includes groups of pixels. Each group is arranged to transmit only a respective portion of a light spectrum. The respective portion has a respective dominant color. The respective portions of the light spectrum are distinct from one another, according to their respective dominant colors. Each group is controlled by a respective reset signal. The spatial light modulator is coupled to receive a selection from the integrated circuit and in response to the selection: cause a selected one of the groups to transmit its respective portion of the light spectrum; and cause an unselected one of the groups to block transmission of its respective portion of the light spectrum. A photodetector is coupled to: receive the respective portion of the light spectrum transmitted by the selected group; and output a signal indicating an intensity thereof.

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