公开(公告)号：US09891175B2

公开(公告)日：2018-02-13

申请号：US14982747

申请日：2015-12-29

Applicant: KLA-Tencor Corporation

Inventor： Jamie M. Sullivan ,  Yevgeniy Churin

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G02F1/33 ,  G02B27/10 ,  G02B27/12 ,  G02B26/10

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/0635 ,  G01N2201/104 ,  G01N2201/105 ,  G01N2201/106 ,  G02B26/101 ,  G02B27/1086 ,  G02B27/123 ,  G02F1/33

Abstract: A system to generate multiple beam lines in an oblique angle multi-beam spot scanning wafer inspection system includes a beam scanning device configured to scan a beam of illumination, an objective lens oriented at an oblique angle relative to the surface of a sample and with an optical axis perpendicular to a first scanning direction on the sample, and one or more optical elements positioned between the objective lens and the beam scanning device. The one or more optical elements split the beam into two or more offset beams such that the two or more offset beams are separated in a least a second direction perpendicular to the first direction. The one or more optical elements further modify the phase characteristics of the two or more offset beams such that the two or more offset beams are simultaneously in focus on the sample during a scan.

公开(公告)号：US20170030842A1

公开(公告)日：2017-02-02

申请号：US15105479

申请日：2013-12-27

Applicant: Sensofar Medical, S.L.

Inventor： Ferran LAGUARTA BERTRAN ,  Carlos Bermudez Porras ,  Roger Artigas Pursals ,  Cristina Cadevall Artigues

IPC: G01N21/952 ,  G01B11/06 ,  G01B11/24 ,  G01N21/954

CPC classification number: G01N21/952 ,  A61F2/82 ,  A61F2240/008 ,  G01B11/0675 ,  G01B11/2408 ,  G01N21/954 ,  G01N2201/062 ,  G01N2201/101 ,  G01N2201/104

Abstract: The device has an apparatus for rotatably holding and positioning at least one stent-like object and a unit for illuminating at least inner and outer surfaces thereof, including at least a wide field epi illumination device and a diffuse back illumination device for simultaneously illuminating the stent-like object. The illumination unit may further include diffuse side illumination device for inspecting side surfaces of the stent-like object. An apparatus for acquiring images of the stent-like object including at least one microscope objective lens and at least one camera is also provided.

Abstract translation: 该装置具有用于可旋转地保持和定位至少一个支架状物体的装置和用于至少照射其内表面和外表面的单元，该装置包括至少一个宽视野外照明装置和漫反射照明装置，用于同时照射支架 类物体 照明单元还可以包括用于检查支架状物体的侧表面的漫射侧照明装置。 还提供了一种用于获取包括至少一个显微镜物镜和至少一个照相机的支架样物体的图像的设备。

公开(公告)号：US09557284B2

公开(公告)日：2017-01-31

申请号：US14653001

申请日：2013-12-18

Applicant: Commissariat A L'Energie Atomique et Aux Energies Alternatives

Inventor： Rene Vogler

IPC: G01N23/203 ,  H04N5/32 ,  H04N5/33 ,  G01N23/04 ,  G21K1/02 ,  G01N21/59 ,  G01N21/47 ,  G21K1/04

CPC classification number: G01N23/203 ,  G01N21/47 ,  G01N21/59 ,  G01N23/04 ,  G01N2201/104 ,  G01N2223/314 ,  G01N2223/3301 ,  G01N2223/335 ,  G21K1/02 ,  G21K1/043 ,  H04N5/32 ,  H04N5/33

Abstract: A scanning illuminating device includes an emission center from which radiation is emitted in an illuminating sector. A cylindrical ring is centered on the source and is rotatably movable about a first axis. The ring includes a plurality of slits regularly distributed about its axis of rotation and having the same angular amplitude α. A cylinder portion is centered on the source and is rotatably movable about a second axis crossing the first axis at the center and forming a nonzero angle therewith. The cylinder portion includes a slit having an angular amplitude β. A first device control of the rotation of the ring, defining an elementary angular step as such that an integer N1 other than 1 meets the condition α=N1·αα. A second device controls the rotation of the ring portion defining an angular step ββ such that an integer N2 other than 1 meets the condition β=N2·ββ.

Abstract translation: 扫描照明装置包括在照明扇区中从其发射辐射的发射中心。 圆柱形环在源体上居中并且可围绕第一轴线可旋转地移动。 环包括围绕其旋转轴规则分布并且具有相同角度振幅α的多个狭缝。 圆筒部分以源为中心，并且可围绕中心与第一轴线交叉的第二轴线可旋转地移动，并与其形成非零的角度。 圆筒部包括具有角度振幅β的狭缝。 环的旋转的第一设备控制，限定基本角度步长，使得除了1以外的整数N1满足条件α= N1·αα。 第二装置控制限定角度步长ββ的环部分的旋转，使得除了1以外的整数N2满足条件β= N2·ββ。

公开(公告)号：US20160178520A1

公开(公告)日：2016-06-23

申请号：US14973306

申请日：2015-12-17

Applicant: Singulex, Inc.

Inventor： Richard Livingston ,  Michele Gilbert ,  Jacqueline Felberg ,  Jeffrey Bishop

IPC: G01N21/64 ,  G01N33/536 ,  G01N33/68 ,  G01N33/53

CPC classification number: G01N21/6428 ,  G01J3/4406 ,  G01N21/645 ,  G01N21/6452 ,  G01N33/5302 ,  G01N33/536 ,  G01N33/58 ,  G01N33/6845 ,  G01N2021/6419 ,  G01N2021/6421 ,  G01N2021/6441 ,  G01N2201/0612 ,  G01N2201/103 ,  G01N2201/104 ,  G01N2201/105

Abstract: Analyzers and analyzer systems that include an analyzer for determining multiple label species, methods of using the analyzer and analyzer systems to analyze samples, are disclosed herein. The analyzer includes one or more sources of electromagnetic radiation to provide electromagnetic radiation at wavelengths within the excitation bands of one or more fluorophore species to an interrogation space that is translated through the sample to detect the presence or absence of molecules of different target analytes. The analyzer may also include one or more detectors configured to detect electromagnetic radiation emitted from the one or more fluorophore species. The analyzer for determining multiple target molecule species provided herein is useful for diagnostics because the concentration of multiple species of target molecules may be determined in a single sample and with a single system.

Abstract translation: 本文公开了包括用于确定多个标签种类的分析器，使用分析仪和分析仪系统分析样品的方法的分析仪和分析仪系统。 分析仪包括一个或多个电磁辐射源，以将一个或多个荧光团物质的激发带内的波长处的电磁辐射提供给通过样品翻译的询问空间，以检测不同目标分析物的分子的存在或不存在。 分析器还可以包括被配置为检测从一个或多个荧光团物种发射的电磁辐射的一个或多个检测器。 用于确定本文提供的多种靶分子物质的分析仪可用于诊断，因为可以在单个样品中和单个系统中确定多种目标分子的浓度。

公开(公告)号：US20150116717A1

公开(公告)日：2015-04-30

申请号：US14581719

申请日：2014-12-23

Applicant: Kla-Tencor Corporation

Inventor： Amnon MANASSEN ,  Andrew HILL ,  Daniel KANDEL ,  Ilan SELA ,  Ohad BACHAR ,  Barak BRINGOLTZ

IPC: G01N21/55 ,  G01B11/00

CPC classification number: G01N21/55 ,  G01B11/00 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/06113 ,  G01N2201/104

Abstract: Angle-resolved reflectometers and reflectometry methods are provided, which comprise a coherent light source, an optical system arranged to scan a test pattern using a spot of coherent light from the light source to yield realizations of the light distribution in the collected pupil, wherein the spot covers a part of the test pattern and the scanning is carried out optically or mechanically according to a scanning pattern, and a processing unit arranged to generate a composite image of the collected pupil distribution by combining the pupil images. Metrology systems and methods are provided, which reduce diffraction errors by estimating, quantitatively, a functional dependency of measurement parameters on aperture sizes and deriving, from identified diffraction components of the functional dependency which relate to the aperture sizes, correction terms for the measurement parameters with respect to the measurement conditions.

Abstract translation: 提供了角度分辨反射计和反射测量方法，其包括相干光源，光学系统布置成使用来自光源的相干光的光点扫描测试图案，以产生收集的瞳孔中的光分布的实现，其中 斑点覆盖测试图案的一部分，并且根据扫描图案光学地或机械地执行扫描;以及处理单元，被配置为通过组合瞳孔图像来生成收集的瞳孔分布的合成图像。 提供了测量系统和方法，其通过估计定量地测量参数对孔径尺寸的功能依赖性并且从与孔径尺寸相关的功能依赖性的识别的衍射分量推导出测量参数的校正项，从而降低衍射误差， 相对于测量条件。

公开(公告)号：US08116555B2

公开(公告)日：2012-02-14

申请号：US12266437

申请日：2008-11-06

Applicant: Woo Jung Ahn ,  Jung Hwan Kim ,  Hee Wook You

Inventor： Woo Jung Ahn ,  Jung Hwan Kim ,  Hee Wook You

IPC: G06K9/00

CPC classification number: G01N21/88 ,  G01N21/8901 ,  G01N21/8903 ,  G01N2201/104

Abstract: A vision inspection system and a workpiece inspection method are used in inspecting a workpiece. The vision inspection system includes a level block having an upper surface whose opposite end regions are defined as a first position and a second position. A first transfer device has a table for supporting the workpiece. The first transfer device is installed on the upper surface of the level block for rectilinearly moving the table between the first position and the second position. A camera is arranged above the level block for taking an image of the workpiece to output image data. A second transfer device is installed on the upper surface of the level block for rectilinearly moving the camera between the first position and the second position. A computer is connected to the first transfer means, the camera and the second transfer means to control them in a specified manner.

Abstract translation: 在检查工件时使用视觉检查系统和工件检查方法。 视觉检查系统包括具有上表面的水平块，其相对的端部区域被定义为第一位置和第二位置。 第一传送装置具有用于支撑工件的工作台。 第一传送装置安装在水平块的上表面上，用于在第一位置和第二位置之间直线移动工作台。 摄像机布置在水平块上方，用于拍摄工件的图像以输出图像数据。 第二传送装置安装在水平块的上表面上，用于在第一位置和第二位置之间直线地移动照相机。 计算机连接到第一传送装置，照相机和第二传送装置，以指定方式控制它们。

公开(公告)号：US20110006219A1

公开(公告)日：2011-01-13

申请号：US12666035

申请日：2009-02-13

Applicant: Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

Inventor： Alois Schausberger ,  Andreas Gfrörer ,  Wolfgang Fuchs

IPC: G01T1/10

CPC classification number: G02B21/26 ,  G01N21/278 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2201/104 ,  G01N2201/11 ,  G02B21/0076

Abstract: The invention relates to a data acquisition method using a laser scanner for the pixel-precise imaging of fluorescent samples which are on object carriers and have been treated with fluorescent dyes. Such a laser scanner comprises a sample table; at least one laser and a first optical system for providing at least one laser beam for exciting the fluorescent samples; a scanner head (50) having an optical deflecting element for scanning this sample in at least one direction of movement (75); a first lens; a second optical system for forwarding emission beams, which are triggered by the laser beams on the sample and are deflected by the first lens and the deflecting element, to at least one detector; a position encoder (91) which emits position encoder signals (92) which indicate the instantaneous location of the scanner head (50) in relation to a zero point; an electronic element for filtering the detector signals (93) with a defined time constant; and an A/D converter for digitizing the filtered detector signals (93). The data acquisition method according to the invention is characterized in that the filtered detector signals (93) from the A/D converter and the position encoder signals (92) are acquired independently, in a parallel manner and continuously by a computer unit or a controller (40) and are related to a common time base (94), wherein the A/D conversion is carried out so often that each pixel (95) of an image is always assigned more than one data point of the A/D converter.

Abstract translation: 本发明涉及一种使用激光扫描仪进行像素精确成像的数据采集方法，其中荧光样品位于物体载体上并用荧光染料处理。 这种激光扫描器包括样品台; 至少一个激光器和第一光学系统，用于提供用于激发荧光样品的至少一个激光束; 扫描头（50）具有用于在至少一个运动方向（75）扫描该样品的光学偏转元件; 第一个镜头; 用于转发发射光束的第二光学系统，其由样品上的激光束触发并被第一透镜和偏转元件偏转到至少一个检测器; 位置编码器（91），其发射指示扫描器头（50）相对于零点的瞬时位置的位置编码器信号（92） 用于以确定的时间常数对检测器信号（93）进行滤波的电子元件; 以及用于数字化滤波的检测器信号（93）的A / D转换器。 根据本发明的数据获取方法的特征在于，来自A / D转换器的滤波检测器信号（93）和位置编码器信号（92）以并行方式独立地获取并且由计算机单元或控制器 （40）并且与公共时基（94）相关，其中所述A / D转换经常被执行，使得图像的每个像素（95）总是被分配多个A / D转换器的一个数据点。

公开(公告)号：US07595874B1

公开(公告)日：2009-09-29

申请号：US11672794

申请日：2007-02-08

Applicant: Vladimir M. Pelekhaty ,  Anatoliy Kachurin ,  William Warren ,  Kenneth Church ,  Heather Fahlenkamp ,  Russell Higbee

Inventor： Vladimir M. Pelekhaty ,  Anatoliy Kachurin ,  William Warren ,  Kenneth Church ,  Heather Fahlenkamp ,  Russell Higbee

IPC: G01J3/30

CPC classification number: G01N21/6458 ,  G01N1/36 ,  G01N15/1434 ,  G01N2201/104 ,  G01N2201/1045 ,  G01N2201/112 ,  G02B21/26 ,  G02B21/365

Abstract: Detection of a rarely occurring event within one or more biological samples includes (a) processing each biological sample to provide a gellable liquid solution comprising concentrated biological sample and a flourochrome designed to associate with a rarely occurring event within the concentrated biological sample; (b) depositing the solution in a layer on a surface of a slide; and (c) scanning the solution on the slide with energy adapted to cause fluorescence of the flourochrome to detect potential instances of the rarely occurring event within the concentrated biological sample in the solution.

Abstract translation: 在一个或多个生物样品中检测到很少发生的事件包括（a）处理每个生物样品以提供包含浓缩的生物样品和设计成与浓缩的生物样品中罕见事件相关的荧光染料的可胶凝液体溶液; （b）将溶液沉积在载玻片表面上的层中; 和（c）用适于引起荧光色素的能量扫描载玻片上的溶液以检测溶液中浓缩的生物样品内很少发生的事件的潜在情况。

公开(公告)号：US07589835B2

公开(公告)日：2009-09-15

申请号：US12099705

申请日：2008-04-08

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

公开(公告)号：US20080212081A1

公开(公告)日：2008-09-04

申请号：US12099705

申请日：2008-04-08

Applicant: Daniel Some

Inventor： Daniel Some

IPC: G01N21/00 ,  G02B27/10 ,  G01N21/55 ,  G01J3/00 ,  G01N21/47 ,  G02B5/122

CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。