公开(公告)号：EP2753155A4

公开(公告)日：2016-01-20

申请号：EP12829086

申请日：2012-08-31

Applicant: UNIV IND DE SANTANDER

Inventor： DONDOKOVICH DUGAR-ZHABON VALERIY ,  OROZCO OSPINO EDUARDO ALBERTO

IPC: H01J35/00 ,  H01J35/12 ,  H01J35/14 ,  H05G2/00

CPC classification number: H01J35/14 ,  H01J35/00 ,  H01J35/12 ,  H01J2235/1204 ,  H05G2/00 ,  H05H7/04 ,  H05H13/005

公开(公告)号：EP2775804A4

公开(公告)日：2015-08-05

申请号：EP12845991

申请日：2012-10-31

Applicant: FUJI FILM CORP

Inventor： AGANO TOSHITAKA ,  KUWABARA TAKAO ,  SHIMIZU HITOSHI

IPC: H05G1/00

CPC classification number: A61N5/1077 ,  A61N2005/1094 ,  A61N2005/1095 ,  G21K1/02 ,  H01J35/00 ,  H01J35/12 ,  H01J35/16 ,  H05G2/00

公开(公告)号：EP2775804A1

公开(公告)日：2014-09-10

申请号：EP12845991.4

申请日：2012-10-31

Applicant: FUJI-FILM Corporation

Inventor： AGANO, Toshitaka ,  KUWABARA, Takao ,  SHIMIZU, Hitoshi

IPC: H05G1/00

CPC classification number: A61N5/1077 ,  A61N2005/1094 ,  A61N2005/1095 ,  G21K1/02 ,  H01J35/00 ,  H01J35/12 ,  H01J35/16 ,  H05G2/00

Abstract: A radiation irradiation device is provided that includes: a metal target that emits bremsstrahlung X-rays as a radiation beam due to irradiation with an electron beam; a radiation shielding member that includes a slit-shaped radiation passage portion and that is disposed downstream of the metal target in the radiation beam emission direction and is disposed such that a portion of the radiation beam passes through the radiation passage portion and the radiation beam incident to regions other than the radiation passage portion is blocked; and an electron beam generating device that irradiates, onto the metal target, an electron beam such that a diameter at a generation point of the emitted radiation beam is smaller than a length of an entry portion of the radiation passage portion along a length direction of the entry portion.

Abstract translation: 提供一种辐射照射装置，其包括：由于用电子束照射而发射作为辐射束的bre致辐射X射线的金属靶; 辐射屏蔽构件，其包括狭缝状辐射通道部分，并且在辐射束发射方向上设置在金属靶的下游，并且被布置成使得辐射束的一部分穿过辐射通道部分和辐射束入射 到除了辐射通道部分以外的区域被阻挡; 以及电子束产生装置，其向金属靶上照射电子束，使得发射的辐射束的发生点处的直径小于沿着辐射束的长度方向的辐射通道部分的入口部分的长度 进入部分。

公开(公告)号：EP1462794A3

公开(公告)日：2006-04-19

申请号：EP03257992.2

申请日：2003-12-18

Applicant: Oxford Diffraction Limited

Inventor： Kucharczyk, Damian

IPC: G01N23/00 ,  H01J35/00 ,  H05G1/04

CPC classification number: B82Y10/00 ,  G21K2201/061 ,  H01J35/00 ,  H05G1/04

Abstract: The present invention provides a high flux X-ray source 100 comprising a sealed X-ray tube contained within an X-ray shield (101), an optic housing 103 containing a multi-layer optic for collecting and focussing X-rays generated in the sealed X-ray tube, and an X-ray beam conditioner 104. The multi-layer optic 103 is located at a predetermined distance from the sealed X-ray tube 101, with the optic housing 103 being adjustable relative to the sealed X-ray tube 101 and the beam conditioner 104 adjustable relative to the optic housing 103. The use of a multi-layer optic provides for the efficient collection and focussing of X-rays generated in a compact sealed tube and wavelength selectively enables it to act as a monochromator, providing a beam of X-rays with a predetermined range of photon energy.

公开(公告)号：EP1077019B1

公开(公告)日：2002-04-03

申请号：EP99922221.9

申请日：1999-05-04

Applicant: Ecole Polytechnique

Inventor： BACAL VERNEY, Marthe ,  BUZZI, Jean-Max ,  GAUDIN, Christelle ,  DE LAPPARENT, Dominique ,  ROUILLE, Claude ,  SCHWARTZ, Laurent ,  SEREBRENNIKOV, Konstantin

IPC: H05G2/00

CPC classification number: H01J35/00 ,  H05G2/00

Abstract: The invention concerns a device for emitting X-rays comprising a microwave source (60), a resonance chamber (10) containing a tightly confined gas volume, a magnetic structure (50, 51) defining an electron confinement geometric zone (H) wherein electrons move at high velocity and at least a target (90, 91, 92) placed on an electron trajectory to emit X-rays. The invention is characterised in that the target is offset relative to a median region (M) of the geometric confinement zone (H).

公开(公告)号：EP0244769A2

公开(公告)日：1987-11-11

申请号：EP87106299.8

申请日：1987-04-30

Applicant: Quantum Diagnostics, Ltd.

Inventor： Birnbach, Curtis ,  Tanner, Jay ,  Heese,Richard

IPC: H01J35/02 ,  H01J35/06

CPC classification number: G21K1/02 ,  H01J35/00 ,  H01J35/04 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/087 ,  H01S4/00 ,  H05G2/00

Abstract: An X-ray source with a cathode (2) formed as a cylindrical electrode having a hollow central anode tube (4) on its axis, with a grid (6) surrounding the anode (4) and interposed between the anode (4) and cathode (2). The central anode tube (4) is hollow and filled with a lasing medium. A high voltage is applied to the cathode (2) but the flow of electrons to the anode (4) is blocked by the grid (6) which is held at ground potential. After a space charge is created at the grid (6) by electrons from the cathode (2), a very short high voltage pulse is applied to one end of the grid (6), yielding a relativistic wave of potential which propagates along the axial length of the grid. This wave of potential releases the electrons from the grid (6), which flow directly from the grid (6) to the anode (4). The impingement of the electrons on the tubular anode (4) produces X-rays from the interior surface of the anode tube (4). These X-rays pump the lasing medium along the length of the anode (4), causing a population inversion leading to the release of coherent X-ray in a wave synchronized with the propagating grid potential which exits the structure at the far end of the anode. The X-ray source may consist of identical unit coupled together in series to provide a high power X-ray beam, and may be configured in other cylindrical shapes depending on the output desired.

Abstract translation: 一种具有阴极（2）的X射线源，其形成为在其轴上具有中空中心阳极管（4）的圆柱形电极，其中围绕阳极（4）的栅极（6）并且介于阳极（4）和 阴极（2）。 中心阳极管（4）是中空的并且填充有激光介质。 向阴极（2）施加高电压，但是电子向阳极（4）的流动被保持在地电位的电网（6）阻挡。 在栅极（6）通过来自阴极（2）的电子产生空间电荷之后，将非常短的高电压脉冲施加到栅格（6）的一端，产生沿轴向传播的相对论电位波 网格长度 这个电势波从电网（6）释放电子，电网（6）直接从电网（6）流向阳极（4）。 电子在管状阳极（4）上的撞击从阳极管（4）的内表面产生X射线。 这些X射线沿着阳极（4）的长度泵浦激光介质，引起群体反转，导致在与在远端结构处离开结构的传播网格电位同步的波中释放相干X射线 阳极。 X射线源可以由串联耦合在一起的相同单元组成，以提供高功率X射线束，并且可以根据所需的输出而配置成其它圆柱形形状。

公开(公告)号：EP0147009A3

公开(公告)日：1987-05-13

申请号：EP84306270

申请日：1984-09-13

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ramamurti, Krishnamurti

IPC: H01J35/00 ,  H01J35/24 ,  H01J03/02

CPC classification number: H01J35/065 ,  H01J35/00 ,  H01J35/24

Abstract: A light controlled X-ray scanner has a ring cathode (24) and a ring anode (22) located parallel one another within an annular evacuated chamber (10). A light beam derived from source (30) through optical system (40) sweeps round a surface of the cathode (24) as mirror (41) rotates. Electrons are emitted from the part of cathode on which the light beam is incident and those electrons are accelerated towards the anode (22) to produce X-rays.

公开(公告)号：EP0117729A2

公开(公告)日：1984-09-05

申请号：EP84301181.8

申请日：1984-02-23

Applicant: IMATRON INC.

Inventor： Rand, Roy Edward

IPC: H01J35/00 ,  H01J35/14 ,  A61B6/02

CPC classification number: H01J35/00 ,  H01J35/14

Abstract: An electron beam production and control assembly especially suitable for use in producing X-rays in a computed tomography X-ray scanning system is disclosed herein. In this system, an electron beam is ultimately directed onto an X-ray producing target in a converging manner using electromagnetic components to accomplish this. The system also includes an arrangement for neutralizing the converging beam in a controlled manner sufficientto cause itto converge to a greater extent than it otherwise would in the absence of controlled neutralization, whereby to provide ion aided focusing.

Abstract translation: 电子束的生产和控制组件的爱特别适用于在计算机断层摄影的X射线扫描系统中产生X射线的使用光盘游离缺失。 在该系统中，电子束是利用电磁元件来完成这个最终引导到X射线靶生产以会聚方式。 因此，该系统包括：在用于在充以受控的方式，以使其收敛到更大的程度比其否则将在不存在控制中和，由此提供离子辅助聚焦中和会聚光束布置。

公开(公告)号：EP0104371A2

公开(公告)日：1984-04-04

申请号：EP83107713.6

申请日：1983-08-04

Applicant: THE PERKIN-ELMER CORPORATION

Inventor： Buckley, William D.

IPC: G03F7/20

CPC classification number: G03F7/70058 ,  H01J35/00

Abstract: This invention relates to an x-ray lithography system comprising a radiant energy source including an electron beam and an x-ray target, structure for mounting a wafer containing a resist thereon spaced from the energy source, structure for mounting a mask between the energy source and the wafer, and apparatus for adjusting the penumbra shadows on the wafer to match the minimum feature size on the mask, thereby maximizing the resolution with respect to throughput or the throughput with respect to resolution.

Abstract translation: 本发明涉及一种包括包括电子束和X射线靶的辐射能源的X射线光刻系统，用于将包含抗蚀剂的晶片与能量源隔开的结构，用于将掩模安装在能量源 以及用于调整晶片上的半影阴影以匹配掩模上的最小特征尺寸的晶片和装置，从而使关于分辨率的吞吐量或吞吐量的分辨率最大化。

公开(公告)号：EP0022948A1

公开(公告)日：1981-01-28

申请号：EP80103663.3

申请日：1980-06-27

Applicant: SIEMENS AKTIENGESELLSCHAFT

Inventor： Tombaugh, Dennis ,  Martinsen, Nick ,  Roumbanis, Ted ,  Heinz, Lothar

IPC: H01J35/00 ,  G21K5/08

CPC classification number: G21K5/08 ,  H01J35/00

Abstract: Die Erfindung bezieht sich auf einen Elektronenbeschleuniger zur ausschießlichen Erzeugung von Röntgenstrahlung, mit einer evakuierten Beschleunigerröhre (3, 25), mit einem dem Elektronenstrahl ausgesetzten Target (9, 21) und mit einem dem Target nachgeschalteten Elektronenabsorber (7, 29). Bei Elektronenbeschleunigern führt der Durchtritt der Elektronen durch das Elektronenaustrittsfenster der Beschleunigerröhre, die dieses vakuumdicht abschließt, stets zu einem Leistungsverlust. Um diesen zu vermeiden, sieht die Erfindung vor, daß das Target unmittelbar an das Vakuum der Beschleunigerröhre angrenzt. Um ein örtliches Durchschmelzen des Targets bei hohen Strahlenleistungen zu vermeiden, kann das Target an ein Kühlsystem (10, 11, 12, 13; 24, 26, 27, 28) angeschlossen sein. Außerdem kann das Target auf einer Metallplatte (7) hoher Wärmeleitfähigkeit aufgelötet sein, die die Beschleunigerröhre ihrerseits auf der Strahlenaustrittsseite gasdicht abschließt. Alternativ kann das vom Kühlmedium umströmte Target (21) die Austrittsöffnung (23) der Beschleunigerröhre (25) selber unmittelbar gasdicht abschließen (Fig. 1):

Abstract translation: 本发明涉及专门用于产生X射线的电子加速器，具有抽真空的加速管（3,25），经受电子束的靶（9,21）和电子吸收体（7,29） 连接到目标的下游。 当电子加速时，电子穿过加速管的电子出口窗口，其以真空密封的方式封闭后者，总是导致功率的损失。 为了避免这种情况，本发明提供了目标直接邻接加速管的真空。 为了在远光束功率的情况下避免目标的局部熔化，靶可以连接到冷却系统（10,11,12,13; 24,26,27,28）。 此外，目标可以焊接到高导热性的金属板（7）上，其以气密封的方式封闭加速管，其部分在辐射出口侧。 或者，冷却介质流动的目标物21本身可以以气密方式直接关闭加速管25的出口（23）（图1）。