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    Plasma micro-thruster
    1.
    发明专利
    Plasma micro-thruster 审中-公开

    公开(公告)号：JP2014519148A

    公开(公告)日：2014-08-07

    申请号：JP2014509567

    申请日：2012-05-12

    Applicant: ボズウェル,ロデリック,ウィリアムBOSWELL,Roderick,William

    Inventor： ボズウェル，ロデリック，ウィリアム

    IPC: H05H1/54 ,  F03H1/00

    CPC classification number: F03H1/00 ,  F03H1/0093 ,  H01J27/16 ,  H05H1/46 ,  H05H2001/4675 ,  H05H2001/469

    Abstract: 噴射ガスの供給を受けるための第１端および排気口である第２端を有する細長く実質的に不導体の管と、管の外周に巡らされる第１、第２および第３電極であって、管の長軸方向に沿って互い離隔され、第３電極は第１電極および第２電極との間に長軸方向に配置される第１、第２および第３電極とを備え、管、第１、第２および第３電極は、第３電極がラジオ周波数電力を受信しかつ第１および第２電極が第３電極に対して電気的に接地されたとき、管の第１端部から管を通じて流れる噴射ガスからプラズマが生成され、管の第２端からのプラズマ拡張に対応してスラストが生成される、プラズママイクロスラスタ。

    PLASMA MICRO-THRUSTER
    3.
    发明公开
    PLASMA MICRO-THRUSTER 审中-公开
    等离子微型推力器

    公开(公告)号：EP2707598A1

    公开(公告)日：2014-03-19

    申请号：EP12781773.2

    申请日：2012-05-12

    Applicant: Boswell, Roderick, William

    Inventor： Boswell, Roderick, William

    IPC: F03H1/00 ,  H05H1/46 ,  H01J27/16

    CPC classification number: F03H1/00 ,  F03H1/0093 ,  H01J27/16 ,  H05H1/46 ,  H05H2001/4675 ,  H05H2001/469

    Abstract: A plasma micro-thruster, including: an elongate and substantially non-conductive tube having a first end to receive a supply of propellant gas, and an open second end to act as an exhaust; first, second, and third electrodes extending circumferentially around the tube and being mutually spaced along a longitudinal axis of the tube, the third electrode being longitudinally interposed between the first and second electrodes; wherein the tube and the first, second and third electrodes are configured to generate a plasma from propellant gas flowing though the tube from the first end of the tube when the third electrode receives radio frequency power and the first and second electrodes are electrically grounded relative to the third electrode, such that the expansion of the plasma from the open end of the tube generates a corresponding thrust.

    Abstract translation: 一种等离子体微推进器，包括：细长且基本上不导电的管，其具有接收推进剂气体供应的第一端和作为排气装置的敞开的第二端; 第一电极，第二电极和第三电极，所述第一电极，所述第二电极和所述第三电极围绕所述管周向延伸并且沿着所述管的纵向轴线相互间隔开， 其中所述管和所述第一，第二和第三电极被配置为当所述第三电极接收射频功率并且所述第一和第二电极相对于所述第一电极电接地时从由所述管的第一端流过所述管的推进剂气体产生等离子体 第三电极，使得来自管的开口端的等离子体的膨胀产生相应的推力。

    Plasma micro-thruster
    4.
    发明专利
    Plasma micro-thruster 未知

    公开(公告)号：AU2012253236A1

    公开(公告)日：2013-04-04

    申请号：AU2012253236

    申请日：2012-05-12

    Applicant: BOSWELL RODERICK

    Inventor： BOSWELL RODERICK WILLIAM

    IPC: F03H1/00 ,  H01J27/16 ,  H05H1/46

    Abstract: A plasma micro-thruster, including: an elongate and substantially non-conductive tube having a first end to receive a supply of propellant gas, and an open second end to act as an exhaust; first, second, and third electrodes extending circumferentially around the tube and being mutually spaced along a longitudinal axis of the tube, the third electrode being longitudinally interposed between the first and second electrodes; wherein the tube and the first, second and third electrodes are configured to generate a plasma from propellant gas flowing though the tube from the first end of the tube when the third electrode receives radio frequency power and the first and second electrodes are electrically grounded relative to the third electrode, such that the expansion of the plasma from the open end of the tube generates a corresponding thrust.

    Plasma micro-thruster
    5.
    发明专利
    Plasma micro-thruster 未知

    公开(公告)号：AU2012253236B2

    公开(公告)日：2015-01-29

    申请号：AU2012253236

    申请日：2012-05-12

    Applicant: BOSWELL RODERICK WILLIAM

    Inventor： BOSWELL RODERICK WILLIAM

    IPC: F03H1/00 ,  H01J27/16 ,  H05H1/46

    Abstract: A plasma micro-thruster, including: an elongate and substantially non-conductive tube having a first end to receive a supply of propellant gas, and an open second end to act as an exhaust; first, second, and third electrodes extending circumferentially around the tube and being mutually spaced along a longitudinal axis of the tube, the third electrode being longitudinally interposed between the first and second electrodes; wherein the tube and the first, second and third electrodes are configured to generate a plasma from propellant gas flowing though the tube from the first end of the tube when the third electrode receives radio frequency power and the first and second electrodes are electrically grounded relative to the third electrode, such that the expansion of the plasma from the open end of the tube generates a corresponding thrust.

    A PLASMA BEAM GENERATOR
    6.
    发明申请
    A PLASMA BEAM GENERATOR 审中-公开
    等离子体发生器

    公开(公告)号：WO2004002201A1

    公开(公告)日：2003-12-31

    申请号：PCT/AU2003/000763

    申请日：2003-06-19

    Applicant: THE AUSTRALIAN NATIONAL UNIVERSITY ,  BOSWELL, Roderick ,  CHARLES, Christine

    Inventor： BOSWELL, Roderick ,  CHARLES, Christine

    IPC: H05H1/54

    CPC classification number: B64G1/405 ,  H05H1/54

    Abstract: A neutrally charged plasma beam generator (1) includes a containment vessel (2) that has a first end (4), a second end (6), and defines a plasma source volume. The second end (6) is open for expulsion of plasma. A gas inlet (8) is adjacent the first end (4) for the supply of plasma producing gas, and a plasma generator (10) generates a high density neutral plasma in the source volume. A magnetic field generator (15, 16) generates an axial magnetic field directed from the source volume and expanding gradually through the second end (6). An electric double layer is established between the source volume and the second end (6).

    Abstract translation: 中性充电等离子体束发生器（1）包括容纳容器（2），其具有第一端（4），第二端（6），并限定等离子体源体积。 第二端（6）打开以排出等离子体。 气体入口（8）与第一端（4）相邻，用于供应等离子体产生气体，等离子体发生器（10）在源体积中产生高密度中性等离子体。 磁场发生器（15,16）产生从源体积引导的轴向磁场并逐渐扩大穿过第二端（6）。 在源体积和第二端（6）之间建立电双层。

    IMPROVEMENTS IN REACTIVE ION ETCHING APPARATUS
    7.
    发明申请
    IMPROVEMENTS IN REACTIVE ION ETCHING APPARATUS 审中-公开
    反应离子蚀刻装置的改进

    公开(公告)号：WO1988001435A1

    公开(公告)日：1988-02-25

    申请号：PCT/AU1987000261

    申请日：1987-08-12

    Applicant: THE AUSTRALIAN NATIONAL UNIVERSITY ,  BOSWELL, Roderick, William

    Inventor： THE AUSTRALIAN NATIONAL UNIVERSITY

    IPC: H01L21/302

    CPC classification number: H01J37/32082 ,  H01J37/32623 ,  H01J37/32697

    Abstract: Conventional plasma etching equipment has an anode (13) and a cathode (14) mounted in spaced-apart relationship in a plasma chamber (10). The anode is usually earthed and the cathode is capacitively connected to an rf signal source (16). The application of an rf voltage enables a plasma of the low pressure gas within the chamber to be established. The improvement of this invention is the inclusion, between the anode and the cathode, of an electrically conducting body (17) which is connected to the cathode but does not obscure the line of sight between the centre of the anode and the centre of the cathode. The presence of this conducting body - which may be an annular plate - reduces the self-bias voltage of the cathode while simultaneously permitting the minimum amplitude of the rf signal to be reduced and increasing the plasma density.

    Abstract translation: 常规的等离子体蚀刻设备具有在等离子体室（10）中以间隔的关系安装的阳极（13）和阴极（14）。 阳极通常接地，阴极电容连接到射频信号源（16）。 施加射频电压使得室内的低压气体的等离子体能够被建立。 本发明的改进是在阳极和阴极之间包括连接到阴极但不遮蔽阳极中心和阴极中心之间的视线的导电体（17） 。 该导电体（其可以是环形板）的存在降低了阴极的自偏压，同时允许减小rf信号的最小幅度并增加等离子体密度。

    PLASMA MICRO-THRUSTER
    10.
    发明申请
    PLASMA MICRO-THRUSTER 审中-公开
    等离子体微型THRUSTER

    公开(公告)号：WO2012151639A1

    公开(公告)日：2012-11-15

    申请号：PCT/AU2012/000532

    申请日：2012-05-12

    Applicant: BOSWELL, Roderick, William

    Inventor： BOSWELL, Roderick, William

    IPC: F03H1/00 ,  H05H1/46 ,  H01J27/16

    CPC classification number: F03H1/00 ,  F03H1/0093 ,  H01J27/16 ,  H05H1/46 ,  H05H2001/4675 ,  H05H2001/469

    Abstract: A plasma micro-thruster, including: an elongate and substantially non-conductive tube having a first end to receive a supply of propellant gas, and an open second end to act as an exhaust; first, second, and third electrodes extending circumferentially around the tube and being mutually spaced along a longitudinal axis of the tube, the third electrode being longitudinally interposed between the first and second electrodes; wherein the tube and the first, second and third electrodes are configured to generate a plasma from propellant gas flowing though the tube from the first end of the tube when the third electrode receives radio frequency power and the first and second electrodes are electrically grounded relative to the third electrode, such that the expansion of the plasma from the open end of the tube generates a corresponding thrust.

    Abstract translation: 一种等离子体微推进器，包括：细长且基本上不导电的管，其具有用于接收推进剂气体供应的第一端和用作排气的开放的第二端; 第一，第二和第三电极围绕管周向延伸并且沿着管的纵向轴线相互间隔开，第三电极纵向插入在第一和第二电极之间; 其中所述管和所述第一，第二和第三电极被配置为当所述第三电极接收射频功率时，从所述管的第一端流过所述管的推进剂气体产生等离子体，并且所述第一和第二电极相对于 第三电极，使得等离子体从管的开口端的膨胀产生相应的推力。

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