公开(公告)号：WO1991016607A1

公开(公告)日：1991-10-31

申请号：PCT/AU1991000162

申请日：1991-04-24

Applicant: COMMONWEALTH OF AUSTRALIA, THE SECRETARY ... ,  LIDDIARD, Kevin, Charles

Inventor： COMMONWEALTH OF AUSTRALIA, THE SECRETARY ...

IPC: G01J05/20

CPC classification number: G01J5/20 ,  G01J2005/204

Abstract: A thermal infrared detector comprising a dielectric pellicle (5) suspended over a cavity in a substrate (6), the pellicle supporting a detector element (1) comprising a heat sensitive semiconductor layer (3) between a pair of thin film metallic contacts (2, 4), these being deposited on the pellicle, the cavity being formed by etching and removal of the substrate material through holes or slots (8) in the surface of the substrate.

Abstract translation: 一种热红外检测器，包括悬挂在衬底（6）中的空腔上的介电防护薄膜（5），所述防护薄膜组件支撑检测器元件（1），其包括在一对薄膜金属触点（2）之间的热敏半导体层（3） ，4），它们被沉积在防护薄膜组件上，通过蚀刻和去除衬底材料而形成的腔体通过衬底表面中的孔或槽（8）形成。