公开(公告)号：EP0792195A4

公开(公告)日：1999-05-26

申请号：EP95941397

申请日：1995-11-14

Applicant: COMPLEX FLUID SYSTEMS INC

Inventor： PETERSON WILLIAM R ,  STAUFFER CRAIG M

IPC: G03F7/075 ,  G03F7/085 ,  G03F7/38 ,  H01L21/027 ,  H01L21/312 ,  B05D3/10 ,  B05D5/12 ,  B32B15/04 ,  B32B17/06 ,  H01L21/314

CPC classification number: G03F7/0751 ,  H01L21/312

Abstract: A method for providing an inorganic substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.

Abstract translation: 公开了一种用于提供具有改进的聚合物膜附着性的无机基材的方法。 该方法需要使至少一种具有至少一个烷基甲硅烷基部分的有机硅烷化合物与至少一种能够与基材反应以使基材甲硅烷基化的至少一种可水解基团反应。 来自反应的可水解的副产物（如果有的话）具有小于或等于约7的pH。

公开(公告)号：EP0792195A1

公开(公告)日：1997-09-03

申请号：EP95941397.0

申请日：1995-11-14

Applicant: COMPLEX FLUID SYSTEMS, INC.

Inventor： PETERSON, William R. ,  STAUFFER, Craig M.

IPC: G03F7 ,  H01L21

CPC classification number: G03F7/0751 ,  H01L21/312

Abstract: A method for providing an inorganic substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.

公开(公告)号：AU4283196A

公开(公告)日：1996-06-17

申请号：AU4283196

申请日：1995-11-14

Applicant: COMPLEX FLUID SYSTEMS INC

Inventor： PETERSON WILLIAM R ,  STAUFFER CRAIG M

IPC: G03F7/075 ,  G03F7/085 ,  G03F7/38 ,  H01L21/027 ,  H01L21/312 ,  B05D3/10 ,  B05D5/12 ,  B32B15/04 ,  B32B17/06 ,  H01L21/314

Abstract: A method for providing an inorganic substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.

公开(公告)号：MX9703797A

公开(公告)日：1998-10-31

申请号：MX9703797

申请日：1997-05-21

Applicant: COMPLEX FLUID SYSTEMS INC

Inventor： PETERSON WILLIAM R ,  STAUFFER CRAIG M

IPC: G03F7/075 ,  G03F7/085 ,  G03F7/38 ,  H01L21/027 ,  H01L21/312 ,  B05D03/10 ,  B05D05/12 ,  B32B15/04 ,  B32B17/06 ,  H01L21/314

Abstract: Se describe un método para proveer un substrato sililado que tiene adherencia mejorada a películas poliméricas; el método comprende hacer reaccionar por lo menos un compuesto de organosilano que tiene por lo menos una porcion alquilsililo en el mismo y por lo menos un grupo hidrolizable capaz de reaccionar con el substrato para sililar el substrato; subproductos hidrolizables de la reaccion, si acaso los hay, tienen un pH menor que o igual a 7.

公开(公告)号：CA2205549A1

公开(公告)日：1996-05-30

申请号：CA2205549

申请日：1995-11-14

Applicant: COMPLEX FLUID SYSTEMS INC

Inventor： STAUFFER CRAIG M ,  PETERSON WILLIAM R

IPC: G03F7/075 ,  G03F7/085 ,  G03F7/38 ,  H01L21/027 ,  H01L21/312 ,  B05D3/10 ,  C03C17/30

Abstract: A method for providing a substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.