公开(公告)号：WO2004049017A3

公开(公告)日：2004-06-10

申请号：PCT/US2003/037941

申请日：2003-11-25

Applicant: REFLECTIVITY, INC. ,  HUIBERS, Andrew, G. ,  PATEL, Satyadev, R. ,  DUBOC, Robert, M.

Inventor： HUIBERS, Andrew, G. ,  PATEL, Satyadev, R. ,  DUBOC, Robert, M.

IPC: G02B26/00

Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.

公开(公告)号：WO2004049017A2

公开(公告)日：2004-06-10

申请号：PCT/US0337941

申请日：2003-11-25

Applicant: REFLECTIVITY INC ,  HUIBERS ANDREW G ,  PATEL SATYADEV R ,  DUBOC ROBERT M

Inventor： HUIBERS ANDREW G ,  PATEL SATYADEV R ,  DUBOC ROBERT M

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08 ,  G02B

CPC classification number: G02B26/0841 ,  B82Y30/00 ,  Y10T428/30

Abstract: A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.

Abstract translation: 公开了投影系统，空间光调制器和用于形成微镜的方法。 衬底包括用于静电偏转微镜元件的电路和电极，微镜元件设置在形成空间光调制器的这种元件的阵列内。 在一个实施例中，衬底是具有电路和电极的硅衬底，用于静电地驱动相邻的微镜元件，并且衬底被完全或选择性地覆盖有光吸收材料。