公开(公告)号：WO1989010003A1

公开(公告)日：1989-10-19

申请号：PCT/EP1989000375

申请日：1989-04-07

Applicant: SIEMENS AKTIENGESELLSCHAFT ,  FRIEDE, Dirk ,  BRÜCKNER, Volker ,  BAUMGARTL, Rudolf ,  CIRKEL, Hans-Jürgen

Inventor： SIEMENS AKTIENGESELLSCHAFT

IPC: H01J35/00

CPC classification number: H05G2/003 ,  H01J3/025 ,  H01J17/40 ,  H01J33/00 ,  H01S3/09716

Abstract: In the preferred application for preionizing TE lasers, in particular excimer lasers, the plasma X-ray tube (ER), which can also be referred to as single-chamber ion tube, has an elongated, box-shaped housing (G) including in its inside an also elongated cylindrical cathode (K) of generally U-shaped cross-section, the open end of which faces the X-ray target in the form of a gastight film. An elongated wire-shaped initiating electrode (11) is arranged between X-ray target (1) and cylindrical cathode (K). An electrical field is generated around the initiating electrode (11) by applying thereto a positive voltage or voltage pulse. The field thus generated forces the electrons which are present because of the ambient radiation to form long spiral paths, thus ionising gas atoms. Electron avalanches develop and initiate the wire discharge. Ions (i+) are extracted from the low-pressure plasma (3) by applying to the cylindrical cathode (K) a beam potential of typically between 60 kV and a maximum of 120 kV, and accelerated against the cylindrical cathode (K). On impact of the ions from the cylindrical cathode (K), secondary electrons are emitted and accelerated in the opposite direction, thus forming the electron beam (E), which on striking the X-ray target (1) creates the X-ray bremsstrahlung (X). Said plasma X-ray tube is also basically suitable as an electron gun: for this application, the film used as an electron window covering the window opening in the target holding wall need only be designed so as to be accordingly radiolucent to electron beams.

Abstract translation: 在用于预先激发TE激光器，特别是准分子激光器的优选应用中，也可以称为单室离子管的等离子体X射线管（ER）具有细长的箱形壳体（G），其包括 其内部还具有大致U形横截面的也是细长的圆柱形阴极（K），其开口端以气密膜的形式面向X射线靶。 在X射线靶（1）和圆柱形阴极（K）之间布置细长的线状起始电极（11）。 通过向其施加正电压或电压脉冲，在起动电极（11）周围产生电场。 因此产生的场强迫由于环境辐射而存在的电子形成长的螺旋路径，从而电离气体原子。 电子雪崩开发和启动电线放电。 通过向圆柱形阴极（K）施加通常在60kV至最大120kV之间的波束电势，并且相对于圆柱形阴极（K）加速，从低压等离子体（3）中提取离子（i +）。 在来自圆柱形阴极（K）的离子的冲击下，二次电子在相反方向发射和加速，从而形成电子束（E），其在X射线靶（1）上产生X射线bre致辐射 （X）。 所述等离子体X射线管也基本上适合作为电子枪：对于这种应用，用作覆盖目标保持壁中的窗口的电子窗的膜仅需要设计成相应地射入电子束。

公开(公告)号：WO1989010657A1

公开(公告)日：1989-11-02

申请号：PCT/DE1989000244

申请日：1989-04-20

Applicant: SIEMENS AKTIENGESELLSCHAFT ,  FRIEDE, Dirk ,  BETTE, Willi

Inventor： SIEMENS AKTIENGESELLSCHAFT

IPC: H03K03/55

CPC classification number: H01S3/0971 ,  H03K3/55

Abstract: The device disclosed generates high-voltage pulses for the laser in a pulse-generating network comprising a first, larger charging capacitor (C1) connected in series with a magnetic switch (M1 = saturable inductor) and a second, smaller changing capacitor (C2) connected in parallel with the series circuit (C1-M1) and with the laser electrode section. A series circuit comprising a high-voltage switch (Thy) and a choke (LS1) is connected in parallel with the laser electrode section. The high-voltage switch (Thy) acts as a trigger which initiates the charge reversal process in the first and second charging capacitors (C1, C2), which are charged by a battery charger (LG) to approximately twice the conducting voltage of the laser (LK). The invention also concerns a process for generating high-voltage pulses with said device. Excimer lasers are the preferred field of application.

Abstract translation: 所公开的装置在包括与磁性开关（M1 =饱和电感器）串联连接的第一较大充电电容器（C1）和第二较小变化电容器（C2））的脉冲发生网络中产生用于激光器的高电压脉冲， 与串联电路（C1-M1）和激光电极部分并联连接。 包括高压开关（Thy）和扼流圈（LS1）的串联电路与激光电极部分并联连接。 高电压开关（Thy）用作触发器，其在第一和第二充电电容器（C1，C2）中启动电荷反向处理，其由电池充电器（LG）充电至激光器的导通电压的大约两倍 （LK）。 本发明还涉及用所述装置产生高电压脉冲的过程。 准分子激光器是首选的应用领域。

公开(公告)号：WO1999008347A1

公开(公告)日：1999-02-18

申请号：PCT/EP1998005057

申请日：1998-08-10

Applicant: ROFIN-SINAR LASER GMBH ,  FRIEDE, Dirk ,  HAGE, Hermann ,  NORTHEMANN, Thomas ,  SCHOLZ, Volker

Inventor： ROFIN-SINAR LASER GMBH

IPC: H01S03/00

CPC classification number: G02B27/0966 ,  G02B27/09 ,  G02B27/0911 ,  G02B27/0983 ,  H01S3/005 ,  H01S3/0315

Abstract: The invention relates to a slab laser, especially a CO2 slab laser, comprising an optical imaging system for shaping a laser beam (LS) leaving a resonator (4). The divergence of said beam is smaller in a first direction (14) which is perpendicular to the direction of propagation than in a second direction (16) which is perpendicular to the first direction and to the direction of perpendicular. According to the invention the optical imaging system comprises a first optical imaging element (24) for focusing the laser beam (LS) in the first direction (14) and collimating the laser beam (LS) in the second direction (16), as well as a second optical imaging element (26) for collimating the focused laser beam (LS) in the first direction (14).

Abstract translation: 带状线激光器，尤其是CO 2平板波导激光器，它包含了波束形成的谐振器（4）输出激光束（LS），垂直于所述第一方向的传播方向，其发散的方向中的一个的成像光学系统（14）比在和与传播方向垂直较小 第二方向（16）。 根据本发明，包括：成像光学系统包括用于聚焦激光束（LS）在第一方向（14）的第一成像光学元件（24）和用于激光束的准直（LS）在第二方向（16）和一个第二光学成像元件（26），用于 在第一方向（14）聚焦的激光束（LS）的准直。

公开(公告)号：WO1996005637A1

公开(公告)日：1996-02-22

申请号：PCT/EP1995003134

申请日：1995-08-07

Applicant: ROFIN-SINAR LASER GMBH ,  FRIEDE, Dirk ,  HAGE, Hermann ,  HERZNER, Karl-Heinz ,  SCHOLZ, Volker

Inventor： ROFIN-SINAR LASER GMBH

IPC: H01S03/04

CPC classification number: H01S3/08081 ,  H01S3/0401 ,  H01S3/08059 ,  H01S3/139

Abstract: Described is a laser system with compensated optics, the invention calling for the system to be fitted with at least one optical element (4) which is thermally linked to a heat source (8) to provide thermal compensation for the distortion, caused by the laser beam, of the optical elements located in the laser beam path.

Abstract translation: 与本发明的补偿的光学器件的激光系统包括热耦合到由布置在所述激光系统光学元件的热源（8）的光束路径中的激光束的变形引起的损伤的热补偿的至少一个光学元件（4）。

公开(公告)号：WO1989010646A1

公开(公告)日：1989-11-02

申请号：PCT/DE1989000266

申请日：1989-04-26

Applicant: SIEMENS AKTIENGESELLSCHAFT ,  BRÜCKNER, Volker ,  BETTE, Willi ,  FRIEDE, Dirk ,  CIRKEL, Hans-Jürgen

Inventor： SIEMENS AKTIENGESELLSCHAFT

IPC: H01S03/097

CPC classification number: H01S3/0971

Abstract: An excitation circuit for partial-discharge gas lasers produces a uniform high-pressure glow discharge in the gas cavity of a laser chamber between the laser electrodes. The high-speed high-voltage switch of the pulse-generating network is designed as a multichannel pseudo-spark switch (VIP switch S) and is preferably incorporated in the laser. It consists of a plurality of single pseudo-spark sections (P-switches 11) connected in parallel. The anode of each P-switch (11) is insulated in particular from all other anodes (12) and can therefore be controlled individually. The cathode (13), on the other hand, is common to all individual P-switches (11). The separate metallic anodes (12) are lodged in a common insulator, the anode holder (14). Slits (15) are arranged between the metallic anode inserts in the anode holder. The anode holder (14) is separated from the cathode (13) by an insulator, the main insulator (16), which maintains the anode holder (14) at a distance (d) from the cathode (13). The entire VIP switch (S) is filled with an ionizable low-pressure gas at pressure (p). A voltage is applied to the anode (12) and the cathode (13) so that the resultant gas discharge is located on the left-hand branch of the Paschen curve. The VIP switch of the excitation cicuit can also be used as a separate component for triggering an electrical high-voltage pulse circuit, as well as for so-called flat laser arrangements.

Abstract translation: 用于局部放电气体激光器的激励电路在激光电极之间的激光室的气腔中产生均匀的高压辉光放电。 脉冲发生网络的高速高压开关被设计为多通道伪火花开关（VIP开关S），并且优选地并入激光器中。 它由并联连接的多个单个伪火花部分（P开关11）组成。 每个P开关（11）的阳极特别与所有其它阳极（12）绝缘，因此可以单独控制。 另一方面，阴极（13）对于所有单独的P开关（11）是共同的。 单独的金属阳极（12）被放置在公共绝缘体中，阳极保持器（14）。 狭缝（15）布置在阳极保持器中的金属阳极插入件之间。 阳极保持器（14）通过绝缘体（主绝缘体16）与阴极（13）分离，绝缘体（16）将阳极保持器（14）保持在距离阴极（13）的距离（d）。 整个VIP开关（S）在压力（p）下填充有可电离的低压气体。 向阳极（12）和阴极（13）施加电压，使得所得到的气体放电位于帕邢曲线的左手支路上。 激励电路的VIP开关也可以用作用于触发电气高压脉冲电路以及所谓的平面激光装置的单独部件。

公开(公告)号：WO1989010645A1

公开(公告)日：1989-11-02

申请号：PCT/DE1989000261

申请日：1989-04-24

Applicant: SIEMENS AKTIENGESELLSCHAFT ,  FRIEDE, Dirk ,  BETTE, Willi

Inventor： SIEMENS AKTIENGESELLSCHAFT

IPC: H01S03/097

CPC classification number: H01S3/09713

Abstract: The device disclosed is connected to the pulse-generating network of an excitation circuit for gas lasers. The primary winding (W1) of a high-voltage pulse transformer (PT) is incorporated in the pulse-generating network between a storage capacitance (C1) and a high-voltage switch (S). Pre-ionization pulses for a pre-ionization device (VE), in particular an X-ray tube (RR), which precipitate the ignition of the laser glow discharge, are emitted at the secondary winding of the pulse transformer (PT). For this purpose, the pulse transformer is designed as a saturable magnetic inductor with at least one secondary winding (W2). When the high-voltage switch (S) is closed, the primary winding of the unsaturated pulse transformer (PT) attains its maximal inductance, at which point a high-voltage pulse is emitted at the secondary winding in accordance with the law of inductance. After a predetermined delay time of, for example, 50-100 ns, the inductance (Lp) of the primary winding drops sharply and the total current flows in the inversion circuit. As a result, the total high voltage required to ignite the glow discharge builds up at the laser electrodes (E1, E2).

Abstract translation: 所公开的装置连接到用于气体激光器的激励电路的脉冲发生网络。 高压脉冲变压器（PT）的初级绕组（W1）被并入存储电容（C1）和高压开关（S）之间的脉冲发生网络中。 在脉冲变压器（PT）的次级绕组处发射用于使电激光辉光放电点燃的预电离装置（VE），特别是X射线管（RR）的预电离脉冲。 为此，脉冲变压器被设计为具有至少一个次级绕组（W2）的饱和磁电感器。 当高压开关（S）闭合时，不饱和脉冲变压器（PT）的初级绕组达到其最大电感，此时根据电感定律在次级绕组上发出高压脉冲。 在例如50-100ns的预定延迟时间之后，初级绕组的电感（Lp）急剧下降，并且总电流在反相电路中流动。 结果，在激光电极（E1，E2）处产生点燃辉光放电所需的总高电压。