公开(公告)号：WO1996011895A1

公开(公告)日：1996-04-25

申请号：PCT/US1995012694

申请日：1995-10-12

Applicant: FUSION SYSTEMS CORPORATION ,  INSALACO, Linda ,  MITCHENER, James

Inventor： FUSION SYSTEMS CORPORATION

IPC: C07B61/00

CPC classification number: H01L21/0337 ,  G03F7/091 ,  H01L21/0276

Abstract: A method of treating an anti-reflective coating on a substrate. The method includes exposing the anti-reflective coating to a dosage of ultraviolet radiation sufficient to result in the removal of at least a portion of the anti-reflective coating resulting in reduced ARC etch process time and reduced damage to photoresist during one etch.

Abstract translation: 一种在基材上处理抗反射涂层的方法。 该方法包括将抗反射涂层暴露于足以导致至少一部分抗反射涂层的紫外线辐射剂量，导致在一次蚀刻期间减少的ARC蚀刻工艺时间和减少对光致抗蚀剂的损伤。

公开(公告)号：WO1995002472A1

公开(公告)日：1995-01-26

申请号：PCT/US1994007751

申请日：1994-07-12

Applicant: FUSION SYSTEMS CORPORATION ,  SPARKS, Eileen, R. ,  MITCHENER, James, C. ,  ROUNDS, Stuart, N. ,  MATTHEWS, John, C.

Inventor： FUSION SYSTEMS CORPORATION

IPC: B08B03/12

CPC classification number: H01L21/02046 ,  C03C17/32 ,  C03C23/00 ,  C03C2218/328 ,  G03F7/42 ,  H01L21/31138

Abstract: Material that has previously been subjected to a removal treatment is removed from a substrate by being contacted with a gas containing an excited halogen at a pressure of greater than 50 torr.

Abstract translation: 通过在大于50托的压力下与含有被激发的卤素的气体接触，从基板除去已经进行去除处理的材料。

公开(公告)号：WO1992008240A1

公开(公告)日：1992-05-14

申请号：PCT/US1991007865

申请日：1991-10-24

Applicant: FUSION SYSTEMS CORPORATION ,  DOLAN, James, T. ,  URY, Michael, G. ,  WOOD, Charles, H. ,  WAYMOUTH, John, F.

Inventor： FUSION SYSTEMS CORPORATION

IPC: H01J61/18

CPC classification number: G03F7/70016 ,  H01J61/025 ,  H01J61/12 ,  H01J61/38 ,  H01J61/54 ,  H01J65/042 ,  H01J65/044

Abstract: A high power lamp (2) that may be either an electrodeless or arc lamp is disclosed. The lamp contains a fill of either selenium or sulfur and a small amount of rare gas (e.g. argon or xenon).

Abstract translation: 公开了可以是无电极或弧光灯的高功率灯（2）。 灯含有硒或硫的填充物和少量稀有气体（例如氩气或氙气）。

公开(公告)号：WO1993021655A1

公开(公告)日：1993-10-28

申请号：PCT/US1993003417

申请日：1993-04-13

Applicant: FUSION SYSTEMS CORPORATION ,  DOLAN, James, T. ,  URY, Michael, G. ,  WOOD, Charles, H. ,  TURNER, Brian ,  WAYMOUTH, John, F.

Inventor： FUSION SYSTEMS CORPORATION

IPC: H01J61/38

CPC classification number: G03F7/70016 ,  H01J61/025 ,  H01J61/04 ,  H01J61/12 ,  H01J61/24 ,  H01J61/38 ,  H01J61/52 ,  H01J61/54 ,  H01J61/82 ,  H01J65/042 ,  H01J65/044 ,  H01J65/046 ,  H01J65/048

Abstract: The spectral energy characteristic of a discharge lamp is controlled by changing the density of the fill substance. The spectral characteristic can be shifted while substantially maintaining its shape by changing the density of the fill. A sulfur or selenium containing discharge lamp which is operated at a pressure of at least about 1 atmosphere contains a low ionization potential substance in the fill. Characteristics which are improved are one or more of spatial color uniformity, extinguishing characteristics, and bulb starting reliability. Particular substances which are added to the fill are alkali metal containing substances, III B metal containing substances, and alkaline earth metal containing substances. When light is reflected back into the bulb, the light which is re-emitted is stronger in the higher wavelengths.

Abstract translation: 通过改变填充物质的密度来控制放电灯的光谱能量特性。 通过改变填充物的密度，可以使光谱特性基本保持其形状而移动。 在至少约1个大气压下工作的含硫或硒的放电灯在填充物中含有低电离势物质。 改进的特征是空间颜色均匀性，熄灭特性和灯泡启动可靠性中的一个或多个。 添加到填充物中的特定物质是含碱金属的物质，含有IIIB族金属的物质和含碱土金属的物质。 当光被反射回灯泡时，再发射的光在较高波长下更强。

公开(公告)号：WO1997037055A1

公开(公告)日：1997-10-09

申请号：PCT/US1997005517

申请日：1997-04-02

Applicant: FUSION SYSTEMS CORPORATION

Inventor： FUSION SYSTEMS CORPORATION

IPC: C23C16/00

CPC classification number: H01J37/32192

Abstract: A method of removing material from a substrate (88), and a plasma discharge device wherein a plasma is excited by microwave energy (91, 93, 95, 97) having an electric field which is azimuthally and axially uniform in relation to the plasma tube (40). The microwave cavity is divided longitudinally into sections by conducting partitions (44, 45, 46), each of which is separately fed with microwave energy (91, 93, 95, 97), and the plasma tube (40) extends through openings in the partitions (44, 45, 46).

Abstract translation: 一种从衬底（88）中去除材料的方法和等离子体放电装置，其中等离子体被微波能（91,93,95,97）激发，其具有相对于等离子体管方位和轴向均匀的电场 （40）。 微波腔通过导电隔板（44,45,46）纵向分成几个部分，每个隔板分别馈送有微波能量（91,93,95,97），等离子体管（40）延伸穿过 分区（44，45，46）。

公开(公告)号：WO1996034512A1

公开(公告)日：1996-10-31

申请号：PCT/US1996006021

申请日：1996-04-29

Applicant: FUSION SYSTEMS CORPORATION

Inventor： FUSION SYSTEMS CORPORATION

IPC: H05B06/68

CPC classification number: H05B6/683 ,  H05B2206/043

Abstract: A magnetron power supply prevents high level mode current, varies a power output level and prevents moding of the magnetron (8). To limit excessive anode current, a transformer (26) includes an air gap located between primary and secondary windings and a shunt of high magnetic permeability adjacent the air gap. When the magnetron (8) starts conducting, the secondary winding becomes heavily loaded. Some of the flux overcomes the magnetic permeability and passes through the shunt and the resulting current becomes diverted from the secondary winding to reduce the high level anode current. A microprocessor (46) senses anode (36) current and voltage of the magnetron (8) for adjusting the conduction angle of a thyristor (22) to obtain the desired power level and monitors the anode (36) voltage for detecting moding of the magnetron (8). If moding is detected, the microprocessor (46) adjusts the conduction angle of another thyristor (38) to change the current supplied to the filament (34).

Abstract translation: 磁控管电源防止高电平模式电流，改变功率输出电平并防止磁控管（8）的调制。 为了限制过多的阳极电流，变压器（26）包括位于初级和次级绕组之间的气隙和与气隙相邻的高导磁率的分路。 当磁控管（8）开始导通时，次级绕组重载。 一些焊剂克服了磁导率并且通过分流器，并且所得到的电流从次级绕组转向以降低高电平的阳极电流。 微处理器（46）感测磁控管（8）的阳极（36）电流和电压，用于调节晶闸管（22）的导通角以获得期望的功率电平，并监测阳极（36）的电压以检测磁控管的调制 （8）。 如果检测到调制，则微处理器（46）调节另一晶闸管（38）的导通角以改变提供给灯丝（34）的电流。

公开(公告)号：WO1998014036A1

公开(公告)日：1998-04-02

申请号：PCT/US1997016886

申请日：1997-09-24

Applicant: FUSION SYSTEMS CORPORATION ,  HUFFMAN, Maria ,  SAKTHIVEL, Palanikumaran ,  ZIMMERMAN, Teresa ,  NOBLE, Thomas

Inventor： FUSION SYSTEMS CORPORATION

IPC: H05H01/00

CPC classification number: H01J37/32192 ,  H01J37/32357 ,  H01J2237/3342 ,  H01L21/02071 ,  H01L21/31116 ,  H05H1/46

Abstract: A method for removing material from a substrate. A plasma is generated in a plasma generating and discharge device including a sapphire plasma tube (40). At least one fluorine-containing compound is introduced into the plasma. A forming gas is introduced into the plasma. The plasma is directed toward the material to be removed from the substrate (88).

Abstract translation: 一种从基板上去除材料的方法。 在包括蓝宝石等离子体管（40）的等离子体发生和放电装置中产生等离子体。 将至少一种含氟化合物引入等离子体中。 将形成气体引入等离子体。 等离子体被引向要从衬底（88）移除的材料。

公开(公告)号：WO1994008439A1

公开(公告)日：1994-04-14

申请号：PCT/US1993009373

申请日：1993-09-30

Applicant: FUSION SYSTEMS CORPORATION ,  DOLAN, James, T. ,  WOOD, Charles, H. ,  KAMAREHI, Mohammed ,  SIMPSON, James, E. ,  TURNER, Brian ,  PREMYSLER, Philip, A.

Inventor： FUSION SYSTEMS CORPORATION

IPC: H05B41/16

CPC classification number: G03F7/70016 ,  H01J61/025 ,  H01J61/12 ,  H01J61/30 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/044 ,  H05B41/24

Abstract: An electrodeless lamp bulb (12) is rotated at sufficient rate to obviate isolated discharges. A coaxially excited electrodeless lamp bulb (12) is rotated in such manner that different regions of the bulb are near the high field region caused by the inner coaxial conductor, thus preventing arc attachment from occurring. An electrodeless lamp bulb (12) is rotated at a high speed sufficient to improve lamp efficiency and reduce cooling requirement. An electrodeless lamp bulb (12) is provided with wall of reduced thickness at the area of the bulb (12) where it is desired to condense the fill upon turning off the power, thus providing for quicker starting.

Abstract translation: 无电极灯泡（12）以足够的速率旋转以消除隔离放电。 同轴激发的无电极灯泡（12）以这样的方式旋转，使得灯泡的不同区域接近由内同轴导体引起的高场区域，从而防止发生电弧附着。 无极灯泡（12）以足以提高灯效率并降低冷却要求的高速旋转。 无电极灯泡（12）在灯泡（12）的区域处设置有厚度较小的壁，其中期望在关闭电源时使填充物冷凝，从而提供更快的启动。

公开(公告)号：EP0670587B1

公开(公告)日：1999-07-07

申请号：EP95102332.4

申请日：1995-02-20

Applicant: FUSION SYSTEMS CORPORATION

Inventor： Kamarehi, Mohammad ,  Simpson, James E.

IPC: H01J37/32 ,  H05B6/76

CPC classification number: H01J37/32275 ,  H01J37/32357 ,  H05B6/76 ,  H05B6/806

公开(公告)号：EP0868836A1

公开(公告)日：1998-10-07

申请号：EP97944360.0

申请日：1997-09-24

Applicant: FUSION SYSTEMS CORPORATION

Inventor： HUFFMAN, Maria ,  SAKTHIVEL, Palanikumaran ,  ZIMMERMAN, Teresa ,  NOBLE, Thomas

IPC: C23F4 ,  H01J37 ,  H01L21 ,  H05H1

CPC classification number: H01J37/32192 ,  H01J37/32357 ,  H01J2237/3342 ,  H01L21/02071 ,  H01L21/31116 ,  H05H1/46

Abstract: A method for removing material from a substrate. A plasma is generated in a plasma generating and discharge device including a sapphire plasma tube (40). At least one fluorine-containing compound is introduced into the plasma. A forming gas is introduced into the plasma. The plasma is directed toward the material to be removed from the substrate (88).