公开(公告)号：EP0670587B1

公开(公告)日：1999-07-07

申请号：EP95102332.4

申请日：1995-02-20

Applicant: FUSION SYSTEMS CORPORATION

Inventor： Kamarehi, Mohammad ,  Simpson, James E.

IPC: H01J37/32 ,  H05B6/76

CPC classification number: H01J37/32275 ,  H01J37/32357 ,  H05B6/76 ,  H05B6/806

公开(公告)号：EP0670587A1

公开(公告)日：1995-09-06

申请号：EP95102332.4

申请日：1995-02-20

Applicant: FUSION SYSTEMS CORPORATION

Inventor： Kamarehi, Mohammad ,  Simpson, James E.

IPC: H01J37/32 ,  H05B6/76

CPC classification number: H01J37/32275 ,  H01J37/32357 ,  H05B6/76 ,  H05B6/806

Abstract: A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap (20) proximate the opening through which the plasma tube (8) exits the microwave cavity.

Abstract translation: 一种等离子体灰浆，其通过在等离子体管（8）离开微波腔的开口附近提供微波阱（20）来消除微波泄漏和伴随的问题。